JPS6134721A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS6134721A
JPS6134721A JP15304584A JP15304584A JPS6134721A JP S6134721 A JPS6134721 A JP S6134721A JP 15304584 A JP15304584 A JP 15304584A JP 15304584 A JP15304584 A JP 15304584A JP S6134721 A JPS6134721 A JP S6134721A
Authority
JP
Japan
Prior art keywords
layer
coercive force
recording medium
whose
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15304584A
Other languages
Japanese (ja)
Inventor
Fumio Kishi
岸 文夫
Kenji Suzuki
謙二 鈴木
Hirotsugu Takagi
高木 博嗣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15304584A priority Critical patent/JPS6134721A/en
Publication of JPS6134721A publication Critical patent/JPS6134721A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compositions Of Macromolecular Compounds (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To improve the reproduction output in the longwave region as well as in the shortwave region by forming a Co-Pt layer, having specified Pt content and whose in-surface coercive force is more than a specified value, and a layer, having specified Co-Cr composition and whose vertical coercive force is more than a specified value, on a nonmagnetic supporting body in said order. CONSTITUTION:A Co-Pt layer 2 contg. 5-15atom% Pt is formed on a nonmagnetic supporting body 1 of plastics, glass, etc. in about 0.15-0.3mum thickness, and a magnetic recording medium whose coercive force in the in-surface direction is regulated to >=300 Oe and whose c-axis is sufficiently oriented in the vertical direction of the film surface is formed. Then a Co-Cr layer 3 contg. 20-22atom% Cr and whose vertical coercive force is regulated to >=400 Oe is formed on the layer 2. Since the c-axis of the layer 2 is vertically oriented, the vertical orientation of the layer 3 is sufficiently formed. Consequently, the magnetic recording medium, whose reproduction output in the longwave region is improved, is obtained while keeping the vertical recording system in favorable conditions.

Description

【発明の詳細な説明】 炎髭欠I 本発明は、蒸着法、イオンブレーティング法、スパッタ
リング法、メッキ法などの薄膜堆積法を用いて形成され
たCo−pt合金からなる下層磁性層と、Co−Cr合
金よりなる上層磁性層とからなる積層磁性層を有する金
属薄膜型磁気記録媒体に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention provides a lower magnetic layer made of a Co-pt alloy formed using a thin film deposition method such as a vapor deposition method, an ion blating method, a sputtering method, or a plating method; The present invention relates to a metal thin film magnetic recording medium having a laminated magnetic layer including an upper magnetic layer made of a Co--Cr alloy.

腎」」1芳 垂直磁気記録は、高密度記録に適した方式として、近年
注目されており、この方式に適した媒体としてCo−C
r合金薄膜よりなる媒体の研究が各方面で行われている
Perpendicular magnetic recording has attracted attention in recent years as a method suitable for high-density recording, and Co-C is a suitable medium for this method.
Research on media made of r-alloy thin films is being conducted in various fields.

このCo−Cr合金薄膜型媒体は、いわゆる補助磁極励
磁型または主磁極励磁型の垂直ヘッドを用いることによ
り高い性能を発揮するが、従来のリングヘッドを用いて
も記録再生が可能である。
This Co--Cr alloy thin film type medium exhibits high performance by using a so-called auxiliary pole excitation type or main pole excitation type vertical head, but it is also possible to perform recording and reproduction using a conventional ring head.

その場合、同一のリングヘッドで、垂直記録媒体と従来
の面内記録媒体をそれぞれ用いて記録−再生した場合の
、再生出力と記録波長の関係を見ると、短波長領域では
垂直記録媒体がすぐれ、長波長領域では面内記録媒体が
すぐれているという傾向がある。
In that case, looking at the relationship between the playback output and the recording wavelength when recording and playing back using the same ring head using a perpendicular recording medium and a conventional longitudinal recording medium, the perpendicular recording medium is superior in the short wavelength region. There is a tendency for longitudinal recording media to be superior in the long wavelength region.

このような長波長領域での再生出力の低下は、広い周波
数帯域を持つ信号を記録する場合や、システムを制御す
るための信号を長波長領域に持つ場合などに、従来方式
との互換性を保ちながら垂直記録媒体を用いようとする
ときに問題となっていた。
This decrease in playback output in the long wavelength region makes it difficult to maintain compatibility with conventional methods, such as when recording signals with a wide frequency band or when having signals for controlling a system in the long wavelength region. This has been a problem when trying to use perpendicular recording media while maintaining

この点を解決する方法としては、高い保持力を持つ垂直
記録媒体を用いることが挙げられる。上述のCo−Cr
合金薄膜において、高い保磁力を得るためには、スパッ
タリング法又は蒸着法によって成膜する際に、基板の温
度を150℃以上の高温にするのが一般的な方法である
。しかしながら、この方法は、基板として高分子フィル
ムなどのフレキシブルな基板を用いる場合に、基板の材
料の選定に対して極めて重大な制限を加える。
One way to solve this problem is to use a perpendicular recording medium with high retention. The above Co-Cr
In order to obtain a high coercive force in an alloy thin film, it is a common method to raise the temperature of the substrate to a high temperature of 150° C. or higher when forming the film by sputtering or vapor deposition. However, when a flexible substrate such as a polymer film is used as the substrate, this method imposes extremely serious restrictions on the selection of the material for the substrate.

さらに、基板と合金薄膜の熱膨張係数の違いに起因する
媒体のカールを更に大きくし、このことは良好な記録を
行う上で重大な問題となっている。
Furthermore, the curling of the medium due to the difference in thermal expansion coefficient between the substrate and the alloy thin film is further increased, which poses a serious problem in performing good recording.

一方、面内記録層の上に垂直記録層を重ねて成膜し、長
波長領域の再生出力を補なう方法も考えられている。こ
の場合問題となるのは、面内記録層の上に、垂直配向性
の良いCo−Cr薄膜を形成する方法である。
On the other hand, a method of forming a perpendicular recording layer on top of the in-plane recording layer to supplement the reproduction output in the long wavelength region has also been considered. In this case, the problem is how to form a Co--Cr thin film with good vertical alignment on the in-plane recording layer.

すなわち、Co−Cr合金はhcp構造をしておりその
C軸が膜面に対して垂直に配向して垂直磁化膜を形成す
る。このC軸の配向が乱れると、短波長領域での再生出
力の低下を招き、垂直記録方式の長所がそこなわれる。
That is, the Co--Cr alloy has an hcp structure, and its C axis is oriented perpendicularly to the film surface to form a perpendicularly magnetized film. If the orientation of the C-axis is disturbed, the reproduction output in the short wavelength region will be reduced, and the advantages of the perpendicular recording method will be impaired.

ところでC軸配向性は、高分子フィルムやガラスなどの
非晶質材料を下地基板として用いると良いものが得られ
るが、結晶質材料を下地基板として用いた場合、普通は
劣化することが知られている。とりわけ現在、面内記録
用の薄膜媒体として研究が進められているCo−Ni系
合金の斜め蒸着による媒体では、hcp構造のC軸が膜
面に対して傾いており、これを下層として、Co−Cr
合金よりなる上層を成膜しても、垂直配向性が極めて悪
いCo−Cr層しか得られず、垂直記録方式の長所を十
分生かした記録媒体とはならなかった。
By the way, good C-axis orientation can be obtained when an amorphous material such as a polymer film or glass is used as the base substrate, but it is known that it usually deteriorates when a crystalline material is used as the base substrate. ing. In particular, in media made of oblique vapor deposition of Co-Ni alloy, which is currently being researched as a thin film medium for in-plane recording, the C axis of the hcp structure is tilted with respect to the film surface, and this is used as the lower layer to -Cr
Even if an upper layer made of an alloy was formed, only a Co--Cr layer with extremely poor vertical alignment was obtained, and a recording medium that took full advantage of the advantages of the perpendicular recording method could not be obtained.

11豊11 従って、本発明は、主として下層の面内記録材料の選択
により、その上に形成するCo−Cr層に良い配向をも
たらすと同時に、面内記録層として充分な磁気特性を発
揮させ、全体として、短波長領域における垂直記録方式
の長所を生かしながら長波長領域における再生出力を改
善した磁気記録媒体を提供することを目的とする。
11 Yutaka 11 Therefore, the present invention provides good orientation to the Co--Cr layer formed thereon, and at the same time exhibits sufficient magnetic properties as a longitudinal recording layer, mainly by selecting the longitudinal recording material for the lower layer. Overall, the object of the present invention is to provide a magnetic recording medium that improves reproduction output in the long wavelength region while taking advantage of the advantages of the perpendicular recording method in the short wavelength region.

免1立11 本発明の金属薄膜型磁気記録媒体は、このような目的を
達成するために開発されたものであり、より詳しくは、
非磁性支持体上に、Co−pt合金磁性層およびCo−
Cr合金磁性層を、この順序で形成してなり、該Co−
pt層は、5原子%以上のptを含み且つ面内方向の保
磁力が300Oe以上であること、ならびにCo−Cr
層が20〜22原子%のCrを含み且つ垂直方向の保磁
力が400 Oe以上であることを特徴とするものであ
る。
11 The metal thin film magnetic recording medium of the present invention was developed to achieve the above objectives, and more specifically,
Co-pt alloy magnetic layer and Co-
The Cr alloy magnetic layer is formed in this order, and the Co-
The pt layer contains 5 at% or more of pt, has an in-plane coercive force of 300 Oe or more, and is made of Co-Cr.
It is characterized in that the layer contains 20 to 22 atom % of Cr and has a perpendicular coercive force of 400 Oe or more.

すなわち、本発明者等の研究によれば、5原子%以」二
のptを含むCo−pt合金層は、C軸が充分に膜面に
対して垂直に配向したhcp構造を有していながら、そ
れ自体で高い面内方向保磁力を有する面内磁気記録層を
形成する。したがって、その上に薄膜堆積法により良好
な垂直磁気記録特性を有するCo−Cr層の形成を可能
にするとともに、Co−Cr垂直磁気記録媒体の長波長
領域の出力を改善することができる。またこのようにC
軸が膜面に垂直に配向したCo−pt面内磁化膜は、C
o−Ni系合金のような斜め蒸着による面内磁化膜とは
異なり、膜面内では磁気的に等方性であるため、方向性
の存在の好ましくないディスク状の媒体にも好ましく適
用できる。
That is, according to the research conducted by the present inventors, a Co-pt alloy layer containing 5 at. , itself forms an in-plane magnetic recording layer having a high in-plane coercive force. Therefore, it is possible to form a Co--Cr layer having good perpendicular magnetic recording characteristics thereon by a thin film deposition method, and it is also possible to improve the output in the long wavelength region of the Co--Cr perpendicular magnetic recording medium. Also like this C
A Co-pt in-plane magnetized film with the axis oriented perpendicular to the film surface is C
Unlike an in-plane magnetized film formed by oblique deposition such as an o-Ni alloy, the film is magnetically isotropic within the film plane, so it can be preferably applied to disk-shaped media where the presence of directionality is undesirable.

の     ・ 醤 第1図は、本発明の一実施例にかかる磁気記録媒体の厚
さ方向模式断面図であり、この磁気記録媒体は、例えば
ポリエチレンテレフタレート、ポリイミド等のプラスチ
ック、ガラス等からなる支持体l上に、Co−pt合金
磁性層2およびC0−Cr合金磁性層3を、それぞれ薄
膜堆積法により順次に形成してなる。
Figure 1 is a schematic cross-sectional view in the thickness direction of a magnetic recording medium according to an embodiment of the present invention, and this magnetic recording medium is made of a support made of plastic such as polyethylene terephthalate or polyimide, glass, etc. 1, a Co-pt alloy magnetic layer 2 and a C0-Cr alloy magnetic layer 3 are sequentially formed by a thin film deposition method.

Co−pt合金磁性層2の磁気特性は、Co−Cr層3
への記録が防げられないように選ばれる。すなわちその
保磁力が小さすぎると、ヘッドからのモレ磁束がCo−
pt層に吸収されて拡かってしまい、Co−Cr層への
記録が不十分になってしまうので、面内方向の保磁力は
300Oe以上が必要である。ptの濃度は、hcp構
造が保たれ、所望の保磁力が得られる範囲に選らばれ、
好ましい濃度は5原子%以上である。すなわち、5原子
%未満では、300 Oe以上の面内方向保磁力を得る
のが困難である。但し、ptが多くなるにつれて残留磁
束密度は低下し、また、PLは高価でもあるので、あま
り多くすることは意味がない。また、ptが多くなると
C軸の配向が乱れる傾向がある。一般に、15原子%以
下であることが好ましい。Co−pt膜2の厚さは、0
.15−0.31Lm程度が適当である。
The magnetic properties of the Co-pt alloy magnetic layer 2 are as follows:
selected so that recording to is not prevented. In other words, if the coercive force is too small, the leakage magnetic flux from the head becomes Co-
The coercive force in the in-plane direction needs to be 300 Oe or more because it is absorbed by the PT layer and spreads, resulting in insufficient recording in the Co--Cr layer. The concentration of pt is selected within a range that maintains the hcp structure and obtains the desired coercive force,
A preferred concentration is 5 atomic % or more. That is, if it is less than 5 at %, it is difficult to obtain an in-plane coercive force of 300 Oe or more. However, as pt increases, the residual magnetic flux density decreases, and PL is also expensive, so there is no point in increasing it too much. Furthermore, as pt increases, the orientation of the C-axis tends to be disordered. In general, it is preferably 15 atom % or less. The thickness of the Co-pt film 2 is 0
.. Approximately 15-0.31 Lm is appropriate.

Co−Cr層3は、C軸が十分に膜面に対して垂直に配
向し、磁化が膜面に対して垂直方向を向くように組成比
ならびに成膜条件を選んで形成する。特に、記録波長が
短いほど自己減磁による損失が小さくなるという垂直記
録方式の特性に従い、短波長領域において高い再生出力
を示すようにする。またCo−Cr層3は、ある程度長
波長側の領域でも、再生出力が落ちないように選ばれ、
垂直方向の保磁力が400 Oe以上であることが必要
である。このような垂直磁化特性を得るために、Co−
Cr層3中ty)Cr5度は、20〜22原子%が好ま
しく採用される。Crが、20%未満では、基板温度を
150℃以上の高温としなければ400 Oe以上のH
eを得ることが困難であり、22%を越えると残留磁束
密度が低下し、再生出力が劣化する。
The Co--Cr layer 3 is formed by selecting the composition ratio and film forming conditions so that the C-axis is sufficiently oriented perpendicular to the film surface and the magnetization is directed perpendicular to the film surface. In particular, in accordance with the characteristic of the perpendicular recording method that the shorter the recording wavelength, the smaller the loss due to self-demagnetization, the reproduction output is high in the short wavelength region. In addition, the Co-Cr layer 3 is selected so that the reproduction output does not drop even in the long wavelength region to a certain extent.
It is necessary that the coercive force in the vertical direction be 400 Oe or more. In order to obtain such perpendicular magnetization characteristics, Co-
The Cr5 degree in the Cr layer 3 is preferably 20 to 22 atomic %. If Cr is less than 20%, the substrate temperature must be raised to 150°C or higher, otherwise H
It is difficult to obtain e, and if it exceeds 22%, the residual magnetic flux density decreases and the reproduction output deteriorates.

Co−Cr層3の厚さは、0.3−0.571.mであ
ることが好ましい。
The thickness of the Co-Cr layer 3 is 0.3-0.571. It is preferable that it is m.

以下、本発明の磁気記録媒体を、実際の製造例ならびに
比較例により更に具体的に説明する。
The magnetic recording medium of the present invention will be explained in more detail below using actual manufacturing examples and comparative examples.

九土二」 ポリイミド樹脂からなる厚さ7pmのテープ状フィルム
上に、スパッタリングにより、まず基板温度 25℃、
スパッタ電力 IKW、アルゴンガス圧 0.5Paの
条件で厚さ0.20gmのCo−pt膜を、次いでスパ
ッタ電力 IKW、アルゴンガス圧 0.5Paを一定
とし、基板温度をそれぞれ80℃(例1)、60℃(例
2)、100℃(例3)、25℃(例4)として厚さ0
.45gmのCo−Cr膜を形成した。
``Kuto 2'' was first sputtered onto a 7 pm thick tape-shaped film made of polyimide resin at a substrate temperature of 25°C.
A Co-pt film with a thickness of 0.20 gm was formed under the conditions of sputtering power IKW and argon gas pressure 0.5 Pa, then sputtering power IKW and argon gas pressure 0.5 Pa were kept constant, and the substrate temperature was 80°C (Example 1). , 60°C (Example 2), 100°C (Example 3), 25°C (Example 4) and the thickness is 0.
.. A 45 gm Co-Cr film was formed.

この際、下層Co−pt膜中のpt含量は、COツタ−
ゲット上配置したptペレットの面積の変更により4〜
7原子%の範囲で変化させ、上層Co−Cr膜中のCr
含量は20原子%で一定とした。
At this time, the pt content in the lower Co-pt film is
By changing the area of the PT pellet placed on the get,
Cr in the upper Co-Cr film was varied in the range of 7 at%.
The content was kept constant at 20 at%.

」二記例において、下層Co−pt膜の代りに。” In the second example, instead of the underlying Co-pt film.

厚さ0.15gmのCo−Ni膜を斜め蒸着法により形
成した。
A Co--Ni film with a thickness of 0.15 gm was formed by an oblique evaporation method.

上記例1〜4の上層に相当する厚さ0.45川mのCo
−Cr膜のみを有する磁気記録媒体を得た。
Co with a thickness of 0.45 meters corresponding to the upper layer of Examples 1 to 4 above
A magnetic recording medium having only a -Cr film was obtained.

〔 上記例5の下層に相当する厚さ0.15pmのCo−N
i膜のみを有する磁気記録媒体を得た。
[Co-N with a thickness of 0.15 pm corresponding to the lower layer of Example 5 above
A magnetic recording medium having only an i-film was obtained.

上記で得られた各磁気記録媒体試料の、」二層における
垂直方向保磁力、および下層の面内方向保磁力を、各層
の組成(いずれも残部はCo)とともに次表に示す。
The perpendicular coercive force in the two layers and the in-plane coercive force in the lower layer of each magnetic recording medium sample obtained above are shown in the following table along with the composition of each layer (the remainder is Co).

表 また、上記各磁気記録媒体について、ギャップ長は0.
3gmのセンダスト製リング型磁気ヘツドを用い、ヘッ
ド−媒体の相対速度3.8m/秒で記録再生を行なった
The table also shows that for each of the above magnetic recording media, the gap length is 0.
Recording and reproduction were performed using a 3 gm Sendust ring type magnetic head at a head-medium relative speed of 3.8 m/sec.

その結果、各磁気記録媒体について得られた、再生出力
の記録波長依存性の測定結果を、第2図および第3図に
示す。図中、曲線に付した数字は、例の番号を示す。
As a result, the measurement results of the recording wavelength dependence of the reproduction output obtained for each magnetic recording medium are shown in FIGS. 2 and 3. In the figure, the numbers attached to the curves indicate the example numbers.

第2図および第3図を見ると明らかなように、本発明の
実施例に相当する媒体l及び2は、はぼ同程度の性能を
示し、他の比較例の場合よりも広い記録波長の領域で総
合的に優れた特性を示している。
As is clear from FIGS. 2 and 3, media 1 and 2 corresponding to the examples of the present invention exhibit approximately the same performance and have a wider range of recording wavelengths than the other comparative examples. It shows overall excellent characteristics in the area.

発JL例」L里 以上述べたように、本発明によれば、Co−pt面内記
録層を下層とし、Co−Cr垂直記録層を上層とする二
層構成とすることにより、広い記録波長の領域で総合的
に再生出力の高い媒体が、容易に得られるようになった
As described above, according to the present invention, a wide recording wavelength can be achieved by using a two-layer structure with a Co-pt longitudinal recording layer as a lower layer and a Co-Cr perpendicular recording layer as an upper layer. Media with overall high playback output in this area can now be easily obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の磁気記録媒体の厚さ方向模
式断面図、 第2図及び第3図は、本発明の実施例にかかる例1およ
び2の媒体ならびに比較例4〜7の媒体の再生出力の記
録波長依存性を示す。
FIG. 1 is a schematic cross-sectional view in the thickness direction of a magnetic recording medium according to an embodiment of the present invention, and FIGS. 2 and 3 are media of Examples 1 and 2 according to an embodiment of the present invention and Comparative Examples 4 to 7. This shows the recording wavelength dependence of the reproduction output of the medium.

Claims (1)

【特許請求の範囲】[Claims] 非磁性支持体上に、Co−pt合金磁性層およびCo−
Cr合金磁性層を、この順序で形成してなり、該Co−
pt層は、5原子%以上のptを含み且つ面内方向の保
磁力が300Oe以上であること、ならびにCo−Cr
層が20〜22原子%のCrを含み且つ垂直方向の保磁
力が400Oe以上であることを特徴とする金属薄膜型
磁気記録媒体。
Co-pt alloy magnetic layer and Co-
The Cr alloy magnetic layer is formed in this order, and the Co-
The pt layer contains 5 at% or more of pt, has an in-plane coercive force of 300 Oe or more, and is made of Co-Cr.
1. A metal thin film magnetic recording medium characterized in that the layer contains 20 to 22 atom % of Cr and has a perpendicular coercive force of 400 Oe or more.
JP15304584A 1984-07-25 1984-07-25 Magnetic recording medium Pending JPS6134721A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15304584A JPS6134721A (en) 1984-07-25 1984-07-25 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15304584A JPS6134721A (en) 1984-07-25 1984-07-25 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS6134721A true JPS6134721A (en) 1986-02-19

Family

ID=15553763

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15304584A Pending JPS6134721A (en) 1984-07-25 1984-07-25 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS6134721A (en)

Similar Documents

Publication Publication Date Title
JPH10228620A (en) Perpendicular magnetic recording medium
JPS60239916A (en) Vertical magnetic recording medium
JPH056738B2 (en)
US5496620A (en) Magnetic recording medium
JPS61194625A (en) Magnetic recording medium
JPS6134721A (en) Magnetic recording medium
JP2988188B2 (en) Magnetic recording medium and method of manufacturing the same
JP3520751B2 (en) Perpendicular magnetic recording medium, method of manufacturing the same, and storage device using the same
JP2508711B2 (en) Perpendicular magnetic recording media
JPH06103555A (en) Perpendicular magnetic recording medium
JPH0380445A (en) Magneto-optical recording medium
JPS5941821A (en) Amorphous magnetic multilayer thin-film
JP2003331411A (en) Magnetic recording medium and method for manufacturing the same
JPS58133627A (en) Magnetic recording medium
JPH071535B2 (en) Magnetic recording medium
JPH0570205B2 (en)
JPS6124011A (en) Vertical magentic recording medium
JPS60251509A (en) Magnetic recording medium
JPS5975428A (en) Vertically magnetized magnetic recording medium
JPS61113121A (en) Vertical magnetic recording medium
JPS58171717A (en) Magnetic recording medium
JPS6095720A (en) Medium for vertical magnetic recording
JPH07122931B2 (en) Perpendicular magnetic recording medium
JPH01130320A (en) Perpendicular magnetic recording medium
JPH0512646A (en) Perpendicular magnetic recording medium