JPS58133627A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS58133627A
JPS58133627A JP57014630A JP1463082A JPS58133627A JP S58133627 A JPS58133627 A JP S58133627A JP 57014630 A JP57014630 A JP 57014630A JP 1463082 A JP1463082 A JP 1463082A JP S58133627 A JPS58133627 A JP S58133627A
Authority
JP
Japan
Prior art keywords
thin film
boron nitride
film
cobalt chromium
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57014630A
Other languages
Japanese (ja)
Other versions
JPH053050B2 (en
Inventor
Akihiko Kawachi
河内 明彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP57014630A priority Critical patent/JPS58133627A/en
Publication of JPS58133627A publication Critical patent/JPS58133627A/en
Publication of JPH053050B2 publication Critical patent/JPH053050B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/72Protective coatings, e.g. anti-static or antifriction

Landscapes

  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To provide a recording medium which is hardly flawed and has high reliability by forming a thin film of boron nitride which is oriented perpendicularly to the surface of a thin film magnetic recording medium of cobalt chromium. CONSTITUTION:A ''Permalloy '' film 2 and a cobalt chromium alloy film 3 are the same as the films of the basic structure in the prior art and further, a thin film 9 of boron nitride BN is formed as an abrasion-resistant lubricating layer thereon. According as the thickness of the boron nitride BN9 is increased, reliability is improved, but the output of the reproduced signal decreases. The thickness at which troubles such as increased noises arise is determined by taking the characteristics of the perpendicularly magnetized recording film 2 and heads into consideration. The crystalline structure of the boron nitride BN is the hcp structure which is exactly the same as the structure of the thin film of cobalt chromium; besides, the shortest distances among the atoms of the axis (a) of both are virtually equal. Thus, it is possible to grow the thin film of boron nitride epitaxially on the film of cobalt chromium. In other words, the thin film of boron nitride is oriented perpendicularly to the surface of the thin film of cobalt chromium. Lubricity and abrasion resistance are thus improved.

Description

【発明の詳細な説明】 本発明はコバルト々ロミウム薄111−気配録媒体表面
に対し垂直に配向し六審什ボロン薄膜を形成?艶記録媒
体に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention forms a thin film of cobalt, argonium, and boron oriented perpendicularly to the surface of a recording medium. Regarding glossy recording media.

近年VT!’lの発展及びコンピューターの木象什に伴
ない磁気記録テープ、磁気記録ディスクの高密廖イ1が
急速にlI展している0中でも最も注目さ負ているのは
垂Wi11什1録と呼げjる磁気P知力・式である・垂
直礎f「P録方丈に用いられるlc’[i体は第1図に
示す如(P1eT@のフレキシブルあるいはアルミニウ
ム叫のI+リジッド基1f!j15にパーマロイ$2を
約5oooXの厚みにヤbyシ*にその上に々ロミウム
)20アトミツクバー七ント含有したコバルトクロミウ
ム合金p5が形成されているも最上部にか放されている
コバルト々ロミウム合金験3は基板1に対し9て垂直に
昏什しやすい特性を有している・この新しい記録媒体へ
の1録再生は幼しいlll造の磁気ヘッドが用いられる
0その徽*f第2図に示す、コバルトクロオウム合金配
録媒体40上部に主S極5と称するタンザク状パターン
のパーマロイ膜が構成きれ、その反対側には袖助礎極6
と称する棒状のフエらイトにコイルを巻きつけた磁極が
配f11される。この構造の磁気ヘッドによりコバルト
クロミウム合金紀ktljk体への配録再生が行なわれ
る。
In recent years VT! With the development of computer technology and the growth of computers, the high-density development of magnetic recording tapes and magnetic recording disks is rapidly expanding. The vertical foundation f is used for the P-recording hojo, and the i body is as shown in Fig. A cobalt chromium alloy p5 containing 20 atoms of chromium is formed on top of the coconut to a thickness of about 500X. It has the characteristic of being easily perpendicular to the substrate 1. For recording and reproducing on this new recording medium, a magnetic head of a young design is used, as shown in Figure 2. A permalloy film with a tanzak pattern called the main S pole 5 is formed on the top of the cobalt chromium alloy recording medium 40, and on the opposite side there is a supporting base pole 6.
A magnetic pole made of a rod-shaped ferrite with a coil wound around it is arranged f11. A magnetic head having this structure performs recording and reproduction on a cobalt chromium alloy body.

コバルトクロミウム合金はその結晶構造は六万最容構造
であり、それてα01テo r rQ度のアルゴン圧力
でスパッタ法によ抄薄膜を%l−威すると基1#面に対
し垂直に立った円柱状の構造となり、垂直−気異方性が
生じる・その様子を第5図に示す・C軸方向に長い円柱
状微結晶7が111185に立っている・このC軸がi
vの垂直方向に沿っているほど一気異方性が°高(1録
も客易で再生出力も高い・この垂直方向からのずれはX
線同様により測定することがf!10ッキングカーブと
称されΔθ50なる特性で呼ばれている−即ち第4図に
7jl−す如(ロッキングカーブで通常コバルト々ロミ
ウム薄膜けΔθ50け5度却下となる・即ち円柱状微1
界の#乃とんどがそのC軸の1榎垂直方向からの#3′
fIが591内に揃っていることになる・通常FFT基
鈑もしくはアルミニウム1橡上にスパッタ法で刑威しi
コバルトクロミウム合金薄膜の場合にけt、050け3
fJR下になる・通常は更にコバルト々ロミウム合金薄
膜の下に抗を力の小なる伊性謄、―Iえはパーマロイ勢
の薄膜を形成して高密111″配←を可能とし、低ノイ
ズ高再生出力を実籾している・従って通常−えばI’m
eT勢のフレキシブルな1蓼の上にパーマロイ、コバル
ト々ロミウム合金の薄膜が約5000オングストローム
づつ形成された形となってお抄、配鈴許体のI!面は金
属表面がむき出しのままとなっている・この様な構造と
なっている為に従来のrl・mol 管用いた磁気配働
謀体の表面とは全く異なった現象を示す・特に表面を配
f#貴生ヘッドが摺かしていった場合に従来の磁気配給
媒体よりも傷がつき易く、長期信籾性に不安がある0本
発明はこの欠点を除去し信頼性の高い密1s気配置lt
h媒体を完成したものである・ 本発明の目的は信頼性の高い磁気紀録媒体を提供するこ
とにある・ 本発明の他の目的は1録密度の高い磁気に鉗謀体を提供
することにある・ 以下に図について本発−fa明する・ 絡5図は本発明は基本を説明する図である・1徐1の上
に小抗磁力磁性膜なるパーマロイl12及び垂[afビ
配録膜なるコバルト々ロミウム合金換3が形成されてい
ることは従来の基本構造2同−であるが、本発明は更に
その上に耐摩耗憫滑層として彎f1ボロンBNlllI
9?ヤWし、信勅性を飛躍的に向上せしめt・即ち窒什
ボロンBNの薄膜を1000オングストローム&fν成
し大だけで同一ト→ツタ上100万パスリ上の信l!I
I性を伴保することができ斤・基@1はアル電ニウムの
様な11ジツドの場合でも、PETやボ11イミドの様
なフレキシブルな場合”14同様Kg!什ボロン薄験形
bνの効果があつt−記*許体の両側には主磁極5と祉
肋Wt極6がチタバll岬の材質によるスライダー10
によ抄固定されて1針#:値との摺かを滑らかなものと
する構成となっている・窒fビポロンBN9の胛みは厚
くする1信11性は向上するが、珈〈なりすぎると垂直
−f1紀録膜2と主磁極5の先端との距離が遠くなり、
貴生傷舟田力が小さくたり、ノイズが多くするーのト%
プルが発生するので9f?′ボロンBNの厚みは垂直砕
f?配録i12とヘッドの特性を溝層して決定ざわる・
第5図においてヘッドは主磁極5、補助磁極6が相対す
る構成の基本タイプについて示したが本発明けこの基本
タイプを改良し*5ieIlのヘッドやIIソングイプ
のヘッドに対しても同様の効果を発揮することはいうま
〒もない。
The crystal structure of the cobalt chromium alloy is a 60,000-dimensional structure, and when a thin film is sputtered by sputtering under an argon pressure of α01 degrees, it stands perpendicular to the base 1# plane. It becomes a columnar structure and vertical-gas anisotropy occurs.The situation is shown in Fig. 5.The columnar microcrystal 7, which is long in the C-axis direction, stands at 111185.This C-axis is i.
The further along the vertical direction of v, the higher the anisotropy at once (the first record is easy to use and the playback output is also high.The deviation from this vertical direction is
f! can be measured by the same line as f! It is called a rocking curve and has a characteristic of Δθ50, as shown in Figure 4.
The #notondo of the world is #3' from the vertical direction of the C axis.
This means that the fI is within 591. Normally, it is sputtered onto an FFT board or an aluminum plate.
In the case of cobalt chromium alloy thin film, ket, 050ke3
Normally, a permalloy thin film is formed under the cobalt-tarromium alloy thin film to enable high-density 111" arrangement, resulting in low noise and high I'm actually outputting the playback output, so it's normal - for example, I'm
A thin film of permalloy and a cobalt-aluminum alloy of approximately 5,000 angstroms each was formed on a flexible base of the eT group. The metal surface is left exposed. - Because of this structure, it exhibits a phenomenon that is completely different from the surface of a magnetic alignment body using conventional rl/mol tubes. - In particular, the surface is When the f# Takao head is scratched, it is more easily scratched than conventional magnetic distribution media, and there are concerns about long-term reliability.The present invention eliminates this drawback and provides a highly reliable dense 1s arrangement. lt
The object of the present invention is to provide a highly reliable magnetic recording medium.Another object of the present invention is to provide a magnetic recording medium with high recording density. The present invention will be explained with reference to the figures below. Figure 5 is a diagram explaining the basics of the present invention. On top of 1 x 1, there is a permalloy l12 which is a small coercive force magnetic film and a vertical [AF vinyl film] The basic structure 2 is the same as that of the conventional structure 2, in which a cobalt-tharium alloy 3 is formed.
9? By forming a thin film of nitrogen and boron BN with a thickness of 1000 angstroms and fν, it is possible to achieve a reliability of 1,000,000 passes on the same material! I
The I property can be maintained even in the case of 11 diodes such as aluminum, and in the case of flexible materials such as PET and boron imide. Effective t-note * On both sides of the body, the main magnetic pole 5 and the safety pole Wt pole 6 are sliders 10 made of Chitaba II Misaki material.
1 stitch is fixed and has a structure that makes the friction with the value smooth ・Nitrogen f biporon BN9 has a thicker grip 11 Reliability is improved, but it becomes too sharp and perpendicular - the distance between the f1 recording film 2 and the tip of the main magnetic pole 5 becomes longer,
Takao Funada force is small or there is a lot of noise -%
9f because a pull occurs? 'Is the thickness of boron BN vertically fractured f? The characteristics of the recording i12 and the head are determined by groove layering.
In Fig. 5, the basic type of the head is shown in which the main magnetic pole 5 and the auxiliary magnetic pole 6 are opposed to each other, but the basic type of the present invention has been improved and the same effect can be obtained for the *5ieIl head and the II song type head. Needless to say, there is a lot to show for it.

窪仕ボロンBNはその結晶構造は先に第5図、第4図で
示し大コバルトクロξウム**の結晶構造と全く同じh
ap構造であり、しかもa軸の最短原子間距離はコバル
トタロミウム合金SSが2−52オングストロームであ
るのに対し、窒fビlロンBN薄膜の最短原子間距離は
2.5オングストロームではとんど勢しい・従って1[
ヒポロンaSシ成の条件を制御することによりコバルト
クロきラム膜の上にエピタキシャル成長させることが可
能である・即ち窒fビボロン薄膜がコバルトクロンラム
薄膜I!面に対して垂直に配向する。その時のΔθ50
はコバルトクロンラム**のそれと同様の値となる・こ
の様な配向性のある窒什ボロンBN@膜f形欣すること
により潤滑性及び耐摩耗性が良くなり、配向性のない場
合の倍以上のgM軸性を確保することができ大表面の動
摩擦係数はα1幻下となっt・これらの窪什ボロン薄膜
のνFlvはイ肴ンブレー予イング、プラズマOVD、
マグネトロンスパッタにより行なわれるが、配向性C)
よい膜はマグネトロンスパッタにより得られた。
The crystal structure of dimpled boron BN is exactly the same as that of large cobalt chromium ** shown in Figs. 5 and 4 above.
It has an ap structure, and the shortest interatomic distance on the a-axis is 2-52 angstroms for the cobalt-thallium alloy SS, while the shortest interatomic distance for the nitride-f-bilon BN thin film is 2.5 angstroms. Vigorous, therefore 1 [
By controlling the conditions for the formation of Hypolon aS, it is possible to grow epitaxially on a cobalt chromium laminate film. That is, a nitride f-biboron thin film can be epitaxially grown on a cobalt chromium laminate thin film I! Orient perpendicular to the plane. Δθ50 at that time
is the same value as that of cobalt chromium**. By using such an oriented Nitrogen/Boron BN@ film f type, the lubricity and wear resistance are improved, and the lubricity and wear resistance are twice as high as those without orientation. The above gM axis property can be ensured, and the coefficient of dynamic friction on the large surface becomes less than α1.
Although it is performed by magnetron sputtering, the orientation C)
Good films were obtained by magnetron sputtering.

1[’*#体において小抗磁カ参性体膜はパーマロイ膜
タ(の材質でも本発明の効Ji1.け萱らず、全くパー
マロイ≠の薄膜のない場合でも同様である自重下にi発
−について貌−する― 賽−一11 50ミクロン厚のPIC丁基軟上にパーマロイ膜50D
Oオ/ゲストローム、コバルトクロミウム合金膜500
0オングストローム?彫成し、更にボロンターゲットの
下に永久礎石を配し大マグネトロンスパッタにより、ア
ルゴン分圧5x10″14 70 r r %窒素分圧2X10  Torrにより
窒fPボロン薄農を500オングストローム形成した。
1['*# In the body, the effect of the present invention is not the same even when the material is a permalloy film, and the same is true even when there is no thin film of permalloy≠. About the development - Sai-ichi 11 Permalloy film 50D on 50 micron thick PIC base material
O/Gestrom, cobalt chromium alloy film 500
0 angstrom? After engraving, a permanent foundation stone was placed under the boron target, and 500 angstroms of nitrogen fP boron thin film was formed by large magnetron sputtering at an argon partial pressure of 5 x 10''1470 r r % and a nitrogen partial pressure of 2 x 10 Torr.

窒(VボロンのΔθ50は5度であったかこの記録諺偉
でヘッドを蒸着したところ通常10万パス位で信号出力
が低下するところを300万バスを越えても信号出力の
低下は認められなかっに・
The Δθ50 of nitrogen (V-boron) was 5 degrees. When a head was vapor-deposited using this record, the signal output normally decreased after about 100,000 passes, but no decrease in signal output was observed even after 3 million passes.・

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の垂直ζ気IP録媒体を貌−する図である
・第2図は主−極と補助S極を有する磁気ヘッドを説明
する図である一@Sシ1はコバルトタロミウム合金薄膜
の結晶構造t11$2甲するVである0第4図はロッキ
ングカーブを説、明する図である・第5図は本発甲を説
明する図である・ 1・・・1蓼 2・・・パーマロイ膜 3・・・垂直磁イビ膜 4・・・磁気記録媒体 5・・・主S極 6・・・補助−極 7・・・円柱状微結晶 8・・・1蓼 9・・・窒f?ボロッ 10・・・スライダー 以上 斉II¥1 1J2ω 第3田 ′IJ+ω ′III;ω
Figure 1 is a diagram showing a conventional vertical ζ-IP recording medium. Figure 2 is a diagram explaining a magnetic head having a main pole and an auxiliary S pole. Crystal structure of alloy thin film t11$2 A is a V 0 Figure 4 is a diagram to explain the rocking curve. Figure 5 is a diagram to explain the present invention. 1...1 2 ...Permalloy film 3...Perpendicular magnetic Ibi film 4...Magnetic recording medium 5...Main S pole 6...Auxiliary pole 7...Cylindrical microcrystal 8...1 Pole 9... ...Nitrogen f? Borot 10...slider or more Qi II ¥1 1J2ω 3rd field'IJ+ω'III;ω

Claims (2)

【特許請求の範囲】[Claims] (1)コバルトとクロミウムの合金を主体とする薄層P
シ1録謝体においてIコバルト々ロミウム薄膜の表面に
窒化ボロン薄膜をν成し六ことを特徴とする一気配針媒
体・
(1) Thin layer P mainly composed of an alloy of cobalt and chromium
A one-shot needle arrangement medium characterized by forming a thin film of boron nitride on the surface of a thin film of I-cobalt arthromium in the recording body.
(2)窒化ポロン薄膜の結4.のO軸方向がコバルト々
ロミウム合金轡*表面に対し垂直に配向していることを
特徴とする特許請求の範囲第1項IC載の磁気F録媒体
(2) Formation of poron nitride thin film 4. 1. A magnetic F recording medium mounted on an IC as claimed in claim 1, wherein the O-axis direction of the magnetic recording medium is oriented perpendicularly to the surface of the cobalt-tarromium alloy layer.
JP57014630A 1982-02-01 1982-02-01 Magnetic recording medium Granted JPS58133627A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57014630A JPS58133627A (en) 1982-02-01 1982-02-01 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57014630A JPS58133627A (en) 1982-02-01 1982-02-01 Magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS58133627A true JPS58133627A (en) 1983-08-09
JPH053050B2 JPH053050B2 (en) 1993-01-13

Family

ID=11866514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57014630A Granted JPS58133627A (en) 1982-02-01 1982-02-01 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS58133627A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4729924A (en) * 1984-12-21 1988-03-08 Minnesota Mining And Manufacturing Company Metallic thin film magnetic recording medium having a hard protective layer
US4803130A (en) * 1984-12-21 1989-02-07 Minnesota Mining And Manufacturing Company Reactive sputtering process for recording media

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57181428A (en) * 1981-04-30 1982-11-08 Hitachi Maxell Ltd Magnetic recording medium and its manufacture

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57181428A (en) * 1981-04-30 1982-11-08 Hitachi Maxell Ltd Magnetic recording medium and its manufacture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4729924A (en) * 1984-12-21 1988-03-08 Minnesota Mining And Manufacturing Company Metallic thin film magnetic recording medium having a hard protective layer
US4803130A (en) * 1984-12-21 1989-02-07 Minnesota Mining And Manufacturing Company Reactive sputtering process for recording media

Also Published As

Publication number Publication date
JPH053050B2 (en) 1993-01-13

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