JPS6130233U - 真空処理装置 - Google Patents

真空処理装置

Info

Publication number
JPS6130233U
JPS6130233U JP11444884U JP11444884U JPS6130233U JP S6130233 U JPS6130233 U JP S6130233U JP 11444884 U JP11444884 U JP 11444884U JP 11444884 U JP11444884 U JP 11444884U JP S6130233 U JPS6130233 U JP S6130233U
Authority
JP
Japan
Prior art keywords
vacuum processing
transfer device
load
processing equipment
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11444884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541546Y2 (https=
Inventor
義雄 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11444884U priority Critical patent/JPS6130233U/ja
Publication of JPS6130233U publication Critical patent/JPS6130233U/ja
Application granted granted Critical
Publication of JPH0541546Y2 publication Critical patent/JPH0541546Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP11444884U 1984-07-27 1984-07-27 真空処理装置 Granted JPS6130233U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11444884U JPS6130233U (ja) 1984-07-27 1984-07-27 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11444884U JPS6130233U (ja) 1984-07-27 1984-07-27 真空処理装置

Publications (2)

Publication Number Publication Date
JPS6130233U true JPS6130233U (ja) 1986-02-24
JPH0541546Y2 JPH0541546Y2 (https=) 1993-10-20

Family

ID=30673466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11444884U Granted JPS6130233U (ja) 1984-07-27 1984-07-27 真空処理装置

Country Status (1)

Country Link
JP (1) JPS6130233U (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016070552A (ja) * 2014-09-29 2016-05-09 日立金属株式会社 乾燥機およびそれを用いた磁石片の乾燥方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016070552A (ja) * 2014-09-29 2016-05-09 日立金属株式会社 乾燥機およびそれを用いた磁石片の乾燥方法

Also Published As

Publication number Publication date
JPH0541546Y2 (https=) 1993-10-20

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