JPS6130153Y2 - - Google Patents

Info

Publication number
JPS6130153Y2
JPS6130153Y2 JP1982194016U JP19401682U JPS6130153Y2 JP S6130153 Y2 JPS6130153 Y2 JP S6130153Y2 JP 1982194016 U JP1982194016 U JP 1982194016U JP 19401682 U JP19401682 U JP 19401682U JP S6130153 Y2 JPS6130153 Y2 JP S6130153Y2
Authority
JP
Japan
Prior art keywords
heater
sub
furnace
wafer
light irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982194016U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5998299U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982194016U priority Critical patent/JPS5998299U/ja
Publication of JPS5998299U publication Critical patent/JPS5998299U/ja
Application granted granted Critical
Publication of JPS6130153Y2 publication Critical patent/JPS6130153Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vertical, Hearth, Or Arc Furnaces (AREA)
  • Furnace Details (AREA)
JP1982194016U 1982-12-23 1982-12-23 光照射炉 Granted JPS5998299U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982194016U JPS5998299U (ja) 1982-12-23 1982-12-23 光照射炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982194016U JPS5998299U (ja) 1982-12-23 1982-12-23 光照射炉

Publications (2)

Publication Number Publication Date
JPS5998299U JPS5998299U (ja) 1984-07-03
JPS6130153Y2 true JPS6130153Y2 (enExample) 1986-09-04

Family

ID=30417145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982194016U Granted JPS5998299U (ja) 1982-12-23 1982-12-23 光照射炉

Country Status (1)

Country Link
JP (1) JPS5998299U (enExample)

Also Published As

Publication number Publication date
JPS5998299U (ja) 1984-07-03

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