JPS6130039A - エツチングの方法 - Google Patents

エツチングの方法

Info

Publication number
JPS6130039A
JPS6130039A JP59152276A JP15227684A JPS6130039A JP S6130039 A JPS6130039 A JP S6130039A JP 59152276 A JP59152276 A JP 59152276A JP 15227684 A JP15227684 A JP 15227684A JP S6130039 A JPS6130039 A JP S6130039A
Authority
JP
Japan
Prior art keywords
layer
type
etching
conductive layer
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59152276A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527971B2 (enExample
Inventor
Masaki Hirata
平田　雅規
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP59152276A priority Critical patent/JPS6130039A/ja
Publication of JPS6130039A publication Critical patent/JPS6130039A/ja
Publication of JPH0527971B2 publication Critical patent/JPH0527971B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Pressure Sensors (AREA)
  • Weting (AREA)
JP59152276A 1984-07-23 1984-07-23 エツチングの方法 Granted JPS6130039A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59152276A JPS6130039A (ja) 1984-07-23 1984-07-23 エツチングの方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59152276A JPS6130039A (ja) 1984-07-23 1984-07-23 エツチングの方法

Publications (2)

Publication Number Publication Date
JPS6130039A true JPS6130039A (ja) 1986-02-12
JPH0527971B2 JPH0527971B2 (enExample) 1993-04-22

Family

ID=15536966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59152276A Granted JPS6130039A (ja) 1984-07-23 1984-07-23 エツチングの方法

Country Status (1)

Country Link
JP (1) JPS6130039A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61137329A (ja) * 1984-12-10 1986-06-25 Yokogawa Electric Corp 半導体の微細加工方法
JPH01145873A (ja) * 1987-12-02 1989-06-07 Yokogawa Electric Corp 半導体圧力センサの製造方法
US5525549A (en) * 1992-04-22 1996-06-11 Nippondenso Co., Ltd. Method for producing an acceleration sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61137329A (ja) * 1984-12-10 1986-06-25 Yokogawa Electric Corp 半導体の微細加工方法
JPH01145873A (ja) * 1987-12-02 1989-06-07 Yokogawa Electric Corp 半導体圧力センサの製造方法
US5525549A (en) * 1992-04-22 1996-06-11 Nippondenso Co., Ltd. Method for producing an acceleration sensor

Also Published As

Publication number Publication date
JPH0527971B2 (enExample) 1993-04-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term