JPS61296799A - Multilayer printed wiring board - Google Patents

Multilayer printed wiring board

Info

Publication number
JPS61296799A
JPS61296799A JP13870785A JP13870785A JPS61296799A JP S61296799 A JPS61296799 A JP S61296799A JP 13870785 A JP13870785 A JP 13870785A JP 13870785 A JP13870785 A JP 13870785A JP S61296799 A JPS61296799 A JP S61296799A
Authority
JP
Japan
Prior art keywords
printed wiring
wiring board
multilayer printed
inner layer
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13870785A
Other languages
Japanese (ja)
Inventor
浅野 智明
大貫 秀文
安井 直
松本 正重
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP13870785A priority Critical patent/JPS61296799A/en
Publication of JPS61296799A publication Critical patent/JPS61296799A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は多層印刷配線板に係わシ、特に多層印刷配線板
の内層に用いる絶縁樹脂の組成に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a multilayer printed wiring board, and more particularly to the composition of an insulating resin used in the inner layer of a multilayer printed wiring board.

〔従来の技術〕[Conventional technology]

近年、印刷配線板に搭載されるIC,LSI等電子部品
の高機能化高密度実装化に伴ない、これら電子部品の電
力を安定に供給するかが問題になっている。このため多
層印刷配線板の内層導体層の厚さを従来35〜70μm
であったものを100μm以上に厚く設計することで電
力の安定供給を計ろうとしている。この場合通常用いら
れる銅張積層板で銅箔をエツチングして回路パターンを
形成する工法では、オーバーハングが犬きくなシ、回路
パターンの形成精度が悪化するため特願昭59−680
03号公報のごとく、銅箔のみの単体を上下両面よシ同
時にエツチングしたものを内層導体層に用いる例が発案
されている。以下第1図(8)〜■によシこの種の多層
印刷配線板を説明する。
In recent years, as electronic components such as ICs and LSIs mounted on printed wiring boards have become more sophisticated and more densely packaged, it has become a problem to stably supply power to these electronic components. For this reason, the thickness of the inner conductor layer of a multilayer printed wiring board is conventionally 35 to 70 μm.
The company is trying to ensure a stable supply of electricity by designing the thickness of the existing material to be more than 100 μm. In this case, the method of forming a circuit pattern by etching the copper foil on a copper-clad laminate, which is commonly used, has a large overhang and deteriorates the accuracy of forming the circuit pattern.
As in Japanese Patent No. 03, an example has been proposed in which a single piece of copper foil is simultaneously etched on both the upper and lower surfaces and is used as the inner conductor layer. This type of multilayer printed wiring board will be explained below with reference to FIGS. 1(8) to 1).

まず第1図(5)、@に示すように金属箔1,2を準備
する。金属箔1,2には、厚さ100μm以上の銅箔を
用いる。
First, metal foils 1 and 2 are prepared as shown in FIG. 1 (5) @. For the metal foils 1 and 2, copper foil with a thickness of 100 μm or more is used.

次に第1図(Q (Llに示すように、金属箔1,2の
両面上にホトレジスト3.4および5,6を被着形成し
ホトマスク7.8および9.1(l介して露光する。
Next, as shown in FIG. .

次に第1図(ト)、(ト)に示すように未露光部分を溶
解・除去しエツチングレジスト被膜11.12および1
3.14を形成する。
Next, as shown in FIGS.
Form 3.14.

次に第1図n、nに示すように金属箔1.2の上下両面
からエツチングレジスト被膜11.12および13.1
4に覆れていない部分をエツチングする。
Next, as shown in FIG.
Etch the parts not covered in step 4.

次いで第1図(I)、(J)に示すように、エツチング
レジスト被膜11.12および13.14を除去する。
Then, as shown in FIGS. 1(I) and 1(J), the etching resist films 11.12 and 13.14 are removed.

次に第1図Nに示すようにエツチングを施した金属箔1
,2をプリプレグ15’li−介して上下に配置し第1
図(ト)に示すように、ホットプレスで熱圧着させると
、内層板16が形成できる。
Next, as shown in FIG. 1N, the etched metal foil 1
, 2 are arranged above and below through the prepreg 15'li-.
As shown in Figure (G), an inner layer plate 16 can be formed by thermocompression bonding using a hot press.

次に第1図(財)に示すように内層板16の表裏にスク
リーン印刷又はロールコート等の方法によって絶縁樹脂
層17を被着形成し、絶縁樹脂コート内層板18を形成
する。
Next, as shown in FIG. 1, an insulating resin layer 17 is formed on the front and back surfaces of the inner layer board 16 by a method such as screen printing or roll coating to form an insulating resin coated inner layer board 18.

次に、第1図(へ)に示すように絶縁樹脂コート内層板
18および外層導体層20をプリプレグ19を介して配
置し、第1図0に示すようにホットプレスによシ熱圧着
させて、多層化基板21を形成する。
Next, as shown in FIG. 1 (f), the insulating resin coated inner layer plate 18 and the outer conductor layer 20 are placed through the prepreg 19, and as shown in FIG. , a multilayer substrate 21 is formed.

次に貫通孔22を形成し、貫通孔22の内壁面にスルホ
ールめっき23を形成させた後、テンティング法によシ
外層回路24を形成して、第1図ηに示すような多層印
刷配線板25が得られる。
Next, a through hole 22 is formed, and after forming through hole plating 23 on the inner wall surface of the through hole 22, an outer layer circuit 24 is formed by a tenting method to form a multilayer printed wiring as shown in FIG. A plate 25 is obtained.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、上述した従来の多層印刷配線板では内層板16
のクリアランス部分が樹脂分のみで埋め込まれてお9、
樹脂と金属箔1.2の熱膨張係数が大きく異なるため熱
圧着後の状態では樹脂に残留応力が生じ、さらに樹脂の
機械的強度が金属箔やガラスクロスに比して弱いため、
貫通孔22切削時の切削応力が樹脂に集中するため、こ
こにクラックを発生し液体処理工程の際の残渣がクラッ
クに残留し絶縁不良の原因となっていた。
However, in the conventional multilayer printed wiring board described above, the inner layer board 16
The clearance part is filled with resin only 9,
Because the thermal expansion coefficients of the resin and metal foil are significantly different (1.2), residual stress occurs in the resin after thermocompression bonding, and the mechanical strength of the resin is weaker than that of metal foil or glass cloth.
Since cutting stress during cutting of the through hole 22 is concentrated on the resin, cracks are generated there, and residues from the liquid treatment process remain in the cracks, causing insulation failure.

本発明の目的はかかる従来の多層印刷配線板の欠点を解
決し絶縁不良の発生のない多層印刷配線板を提供するこ
とにある。
An object of the present invention is to solve the drawbacks of the conventional multilayer printed wiring board and to provide a multilayer printed wiring board that is free from insulation defects.

〔問題点を解決するための手段〕[Means for solving problems]

すなわち本発明によれば導体層の表裏面に所望形状のエ
ツチングレジスト被膜を形成し所望位置に表裏面から化
学的エツチングを施す工程と、上記エツチングを施した
導体層をプリプレグの上下に配置し熱圧着し内層板を形
成する工程と、上記内層板の表面に絶縁樹脂を塗布し絶
縁層を形成する工程と、上記絶縁層を形成させた内層板
を一層以上内層に配置し、プリプレグを介して外層導体
層を熱圧着させ多層化基板を形成する工程と、上記多層
化基板の所望位置に貫通孔を形成しスルホールめっきを
施す工程と、上記外層導体層に外層回路を形成する工程
によって得られる多層印刷配線板において、上記内層板
の表面に塗布する絶縁樹脂の組成が熱硬化性樹脂であっ
て、かつ絶縁樹脂の固捜分1ooi−i部に対してフィ
ラー分5〜50重量部を含むとともに上記フィラーが水
酸化アルミニウム、シリカ、三酸化アンチモン等無機物
からなることを特徴とする多層印刷配線板が得られる。
That is, according to the present invention, an etching resist film of a desired shape is formed on the front and back surfaces of a conductor layer, and chemical etching is performed at a desired position from the front and back surfaces, and the etched conductor layer is placed above and below a prepreg and heated. A step of crimping and forming an inner layer plate, a step of applying an insulating resin to the surface of the inner layer plate to form an insulating layer, and arranging one or more inner layer plates with the above insulating layer formed on the inner layer, and applying prepreg to the inner layer through prepreg. Obtained by a step of thermocompression bonding an outer conductor layer to form a multilayer substrate, a step of forming through holes at desired positions of the multilayer substrate and performing through-hole plating, and a step of forming an outer layer circuit on the outer conductor layer. In the multilayer printed wiring board, the composition of the insulating resin applied to the surface of the inner layer board is a thermosetting resin, and contains 5 to 50 parts by weight of filler per 100-i parts of the insulating resin. At the same time, a multilayer printed wiring board characterized in that the filler is made of an inorganic material such as aluminum hydroxide, silica, and antimony trioxide is obtained.

〔実施例〕〔Example〕

以下、本発明の実施例を従来例と比較して説明する。 Hereinafter, embodiments of the present invention will be described in comparison with conventional examples.

第1表 第1表の樹脂Aはエポキシを基本樹脂とするフィラーの
添加されていない従来例1である。樹脂Bは変性ポリイ
ミドを基本樹脂とするフィラーの添加されていない従来
例2である。これら従来例の樹脂に第1表に示す種類の
フィ2−を適宜添加し樹脂C−Iを調製し前述の製造方
法によシ多層印刷配線板を製造しスルホールめっき後の
状態でクラックの発生状況を調査した。その結果フィラ
ーの添加されていない従来例1、従来例2では高い頻度
でクラック発生が認められた。これに対し3重量部の水
酸化アルミニウム粉末をフィラーとして添加した樹脂E
ではクラック発生率が大幅に改善され、5重量部の水酸
化アルミニウム粉末を添加した樹脂Fではクラックの発
生が認められない。さらにフィラー分の増量を行ない、
40重量部の水酸化アルミニウム粉末を添加した樹脂D
、樹脂Hともにクラックの発生は認められず、これ以上
のフィラーの増量を行なってもクラック発生防止の効果
があることは容易に推定できる。しかしながらフィラー
添加量が50重量部を超える場合には、粘度上昇が著し
く増大し混練が困難になることが判明した。またシリカ
粉末を添加した樹脂Iについても同様にクラック発生防
止の効果が認められた。す々わち、樹脂に水酸化アルミ
ニウム、シリカのごとき無機質フィラーの添加を行なう
ことによりて樹脂と金属箔の熱膨張係数の相違を小さく
シ、硬化後の残留応力を小さくすることが可能である。
Resin A in Table 1 is Conventional Example 1, which uses epoxy as a basic resin and does not contain fillers. Resin B is Conventional Example 2, in which the basic resin is modified polyimide and no filler is added. Resin C-I was prepared by appropriately adding the type of fi-2- shown in Table 1 to these conventional resins, and a multilayer printed wiring board was manufactured by the above-mentioned manufacturing method, and cracks occurred after through-hole plating. We investigated the situation. As a result, in Conventional Examples 1 and 2 to which no filler was added, cracks were observed to occur frequently. Resin E to which 3 parts by weight of aluminum hydroxide powder was added as a filler
The crack generation rate was significantly improved, and no cracks were observed in resin F to which 5 parts by weight of aluminum hydroxide powder was added. Furthermore, the amount of filler is increased,
Resin D containing 40 parts by weight of aluminum hydroxide powder
No cracks were observed in either resin H, and it can be easily inferred that even if the amount of filler is increased beyond this level, there is an effect of preventing cracks. However, it has been found that when the amount of filler added exceeds 50 parts by weight, the increase in viscosity increases significantly and kneading becomes difficult. Similarly, the effect of preventing crack generation was also observed for Resin I to which silica powder was added. In other words, by adding an inorganic filler such as aluminum hydroxide or silica to the resin, it is possible to reduce the difference in thermal expansion coefficient between the resin and the metal foil and reduce the residual stress after curing. .

さらにフィラーの添加により機械的強度も向上し切削性
の向上が計れクラックが防止される。
Furthermore, the addition of filler improves mechanical strength, improves machinability, and prevents cracks.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によって内層板の表面に無機
材料フィラーを添加した絶縁樹脂を塗布することによっ
て多層印刷配線板の製造工程中、すなわち貫通孔形成時
に発生するクラックがなく絶縁不良のない多層印刷配線
板が得られる効果がある。
As explained above, by applying an insulating resin containing an inorganic filler to the surface of the inner layer board according to the present invention, there will be no cracks that occur during the manufacturing process of multilayer printed wiring boards, that is, when forming through holes, and there will be no insulation defects. There is an effect that a printed wiring board can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1表は従来例および本発明の第1から第7の実施例の
絶縁樹脂組成を示す表、第1図(8)〜0は従来例およ
び本発明の係る多層印刷配線板の製造方法を説明するた
めに工程順に示した断面図である。 1.2・・・・・・金属箔、3.4,5.6・・・・・
・ホトレジスト、7,8,9.10・・・・・・ホトマ
スク、11゜12.13.14・・・・・・エツチング
レジスト被膜、15.19・・・・・・プリプレグ、1
6・・・・・・内層板、17・・・・・・絶縁樹脂層、
18・・・・・・絶縁樹脂コート内層板、20・・・・
・・外層導体層、21・・・・・・多層化基板、22・
・・・・・J(A孔、23・・・・・・スルホールめっ
き、24・・・・・・外層回路、25・・・・・・多層
印刷配線板。 代理人 弁理士  内 原   El(、。 へ       へ      、     へ   
  へ(C叫     勢     − 茅 l 図 手続補正書(方式)  6 %式% 1、事件の表示   昭和60年特 許 願第1387
07号2、発明の名称 多層印刷配線板 3、補正をする者 事件との関係       出 願 人東京都港区芝五
丁目33番1号 4、代理人 〒108  東京都港区芝五丁目37番8号 住人三田
ビル■ 補正の対象 明細書の「図面の簡単な説明」の欄。 補正の内容 第8頁19行目から第9頁1行目の「第1表は従来例お
よび本発明の第1から第7の実施例の絶縁樹脂組成を示
す表、」を削除する。 代理人 弁理士  内 原   晋 、7.′、゛−′
り\1電゛、″
Table 1 is a table showing the insulating resin composition of the conventional example and the first to seventh embodiments of the present invention, and Figures 1 (8) to 0 show the manufacturing method of the multilayer printed wiring board according to the conventional example and the present invention. FIG. 4 is a cross-sectional view shown in order of steps for explanation. 1.2... Metal foil, 3.4, 5.6...
・Photoresist, 7,8,9.10...Photomask, 11゜12.13.14...Etching resist film, 15.19...Prepreg, 1
6... Inner layer plate, 17... Insulating resin layer,
18... Insulating resin coat inner layer plate, 20...
...Outer conductor layer, 21...Multilayer substrate, 22.
...J (A hole, 23...Through hole plating, 24...Outer layer circuit, 25...Multilayer printed wiring board. Agent: Patent attorney El Uchihara ,. to , to , to .
To (C cry force - Kaya l Drawing procedure amendment (method) 6% formula% 1, Indication of incident 1985 Patent Application No. 1387
No. 07 No. 2, Title of the invention: Multilayer printed wiring board 3, Relationship with the amended case: Applicant: 5-33-1-4, Shiba 5-chome, Minato-ku, Tokyo, Agent: 5-37 Shiba, Minato-ku, Tokyo, 108 No. 8 Resident Mita Building ■ "Brief explanation of drawings" column of the specification subject to amendment. Contents of the amendment: ``Table 1 is a table showing the insulating resin compositions of the conventional example and the first to seventh embodiments of the present invention'' from page 8, line 19 to page 9, line 1 will be deleted. Agent: Susumu Uchihara, patent attorney, 7. ′、゛−′
ri\1den゛,''

Claims (1)

【特許請求の範囲】[Claims]  導体層の表裏面に所望形状のエッチングレジスト被膜
を形成し所望位置に表裏面から化学的エッチングを施す
工程と、前記エッチングを施した導体層をプリプレグの
上下に配置し熱圧着し内層板を形成する工程と、前記内
層板の表面に絶縁樹脂を塗布し絶縁層を形成する工程と
、前記絶縁層を形成させた内層板を一層以上内層に配置
し、プリプレグを介して外層導体層を熱圧着させ多層化
基板を形成する工程と、前記多層化基板の所望位置に貫
通孔を形成しスルホールめっきを施す工程と、前記外層
導体層に外層回路を形成する工程によって得られる多層
印刷配線板において、前記内層板の表面に塗布する絶縁
樹脂の組成が熱硬化性樹脂であって、かつ前記絶縁樹脂
の固型分100重量部に対してフィラー分5〜50重量
部を含むとともに前記フィラーが水酸化アルミニウム、
シリカ、三酸化アンチモン等無機物からなることを特徴
とする多層印刷配線板。
A step of forming an etching resist film in a desired shape on the front and back surfaces of the conductor layer and chemically etching it at the desired position from the front and back surfaces, and placing the etched conductor layer above and below the prepreg and thermocompression bonding to form an inner layer plate. a step of applying an insulating resin to the surface of the inner layer plate to form an insulating layer, arranging one or more inner layer plates with the insulating layer formed thereon, and thermocompression bonding an outer conductor layer via a prepreg. In a multilayer printed wiring board obtained by forming a multilayer board, forming through holes at desired positions of the multilayer board and performing through-hole plating, and forming an outer layer circuit on the outer conductor layer, The composition of the insulating resin applied to the surface of the inner layer plate is a thermosetting resin, and contains 5 to 50 parts by weight of filler based on 100 parts by weight of solid content of the insulating resin, and the filler is hydroxylated. aluminum,
A multilayer printed wiring board characterized by being made of inorganic materials such as silica and antimony trioxide.
JP13870785A 1985-06-25 1985-06-25 Multilayer printed wiring board Pending JPS61296799A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13870785A JPS61296799A (en) 1985-06-25 1985-06-25 Multilayer printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13870785A JPS61296799A (en) 1985-06-25 1985-06-25 Multilayer printed wiring board

Publications (1)

Publication Number Publication Date
JPS61296799A true JPS61296799A (en) 1986-12-27

Family

ID=15228245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13870785A Pending JPS61296799A (en) 1985-06-25 1985-06-25 Multilayer printed wiring board

Country Status (1)

Country Link
JP (1) JPS61296799A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0265193A (en) * 1988-08-30 1990-03-05 Fujitsu Ltd Multilayer printed board with built-in metal core
JPH02122699A (en) * 1988-11-01 1990-05-10 Nec Corp Manufacture of multilayer printed circuit board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0265193A (en) * 1988-08-30 1990-03-05 Fujitsu Ltd Multilayer printed board with built-in metal core
JPH02122699A (en) * 1988-11-01 1990-05-10 Nec Corp Manufacture of multilayer printed circuit board

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