JPS61296703A - Iron loss reduction method for single directional grain oriented silicon steel plate - Google Patents

Iron loss reduction method for single directional grain oriented silicon steel plate

Info

Publication number
JPS61296703A
JPS61296703A JP60137868A JP13786885A JPS61296703A JP S61296703 A JPS61296703 A JP S61296703A JP 60137868 A JP60137868 A JP 60137868A JP 13786885 A JP13786885 A JP 13786885A JP S61296703 A JPS61296703 A JP S61296703A
Authority
JP
Japan
Prior art keywords
steel plate
gas
silicon steel
coil
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60137868A
Other languages
Japanese (ja)
Other versions
JPH0374484B2 (en
Inventor
Masao Iguchi
征夫 井口
Hisanao Nakahara
中原 久直
Isao Ito
伊藤 庸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP60137868A priority Critical patent/JPS61296703A/en
Publication of JPS61296703A publication Critical patent/JPS61296703A/en
Publication of JPH0374484B2 publication Critical patent/JPH0374484B2/ja
Granted legal-status Critical Current

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Abstract

PURPOSE:To avoid loss of effect caused through high temperature hysteresis such as strain relief anneal by a method wherein a grain oriented silicon steel plate which is finished to have mirror surface is rolled into a loose coil in which the plate surfaces are separated from each other and subjected to a depressurized CVD process to form a very thin tension film on the steel plate surface. CONSTITUTION:A grain oriented silicon steel plate is rolled into a loose coil 9 and the coil 9 is inserted into a vacuum furnace 1 and the vacuum rate in the furnace is made to be 10<-2>-10<-4> Torr by the operation of a vacuum pump through a vacuum passage 8. After that, while H2 gas is being introduced through a gas introduction passage 4, in order to improve circulation of the gas in the furnace, the gas is extracted through a gas exhaust passage 10 and the inside of the furnace is always under the depressurized condition (normal operating pressure is 1-500 Torr) and the gas flow through the gaps between the steel plates of the loose coil 9 is kept smooth. Then, after a heater 3 is operated and the coil temperature reaches 600 deg.C-1,000 deg.C and kept at that, a mixture gas such as TiCl4 and N2, TiCl4 and CH4 or TiCl4 and CH4 and N2 is introduced through the gas introduction passage 4 and a very thin tension film is formed on the steel plate surface by a depressurized CVD method in 5min-100hr.

Description

【発明の詳細な説明】 (産業上の利用分野) 方向性珪素鋼板の鉄損低減方法に関してこの明細書では
、減圧CvD処理の有利な適用についての開発研究の成
果を提案する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) Regarding the method for reducing iron loss in grain-oriented silicon steel sheets, this specification proposes the results of research and development on the advantageous application of reduced pressure CvD treatment.

一方向形珪素鋼板の電気・磁気的特性の改善なかても鉄
損の低減に係わる極限的な要請を満たそうとする近年来
の目覚ましい開発努力は、逐次その実を挙げつつあるが
、その実施に伴う重大な弊害として、一方向形珪素鋼板
の使用に当たっての、加工、組立てを経たのち、いわゆ
るひずみ取り焼鈍がほどこされた場合に(特性劣化の随
伴を不可避に生じて、使途についての制限を受ける不利
が指摘される。
Remarkable development efforts in recent years to meet the extreme demands of improving the electrical and magnetic properties of unidirectional silicon steel sheets and reducing core loss are gradually bearing fruit. A serious problem associated with this is that when using unidirectional silicon steel sheets, if so-called strain relief annealing is applied after processing and assembly (this inevitably causes deterioration of properties and limits the use of the sheets). Disadvantages are pointed out.

ひずみ取り焼鈍のような高温熱履歴を経ると否とに拘わ
らず、上記要請を充足することが重要である。
It is important to satisfy the above requirements regardless of whether or not the material undergoes a high temperature thermal history such as strain relief annealing.

さて一方向形珪素鋼板はよく知られているとおり製品の
2次再結晶粒(110)  (001)すなわちゴス(
Gass)方位に、高度に集積させたもので、主として
変圧器その他の電気機器の鉄心として使用され電気・磁
気的特性として製品の磁束密度(Boo値で代表される
)が高く、鉄損(WI7150値で代表される)の低い
ことが望まれる。
As is well known, unidirectional silicon steel sheets have secondary recrystallized grains (110) (001), or Goss (
It is mainly used as the iron core of transformers and other electrical equipment, and its electrical and magnetic properties include high magnetic flux density (represented by the Boo value) and iron loss (WI7150). (represented by the value) is desirable.

この一方向形珪素鋼板は複雑多岐にわたる工程を経て製
造されるが、今までにおびただしい発明、改善が加えら
れ、今日では板厚0.30mmの製品の磁気特性がB+
o1.90T以上、W+、/S。1.05讐/kg以下
、また板厚0.23mmの製品の磁気特性がB、。1.
89T以上、Lt/s。0.90 W/kg以下の超低
鉄損一方向形珪素鋼板が製造されるようになって来てい
る。
This unidirectional silicon steel plate is manufactured through a wide variety of complicated processes, but numerous inventions and improvements have been made so far, and today a product with a thickness of 0.30 mm has magnetic properties of B+
o1.90T or more, W+, /S. The magnetic properties of a product with a weight of less than 1.05 kg/kg and a plate thickness of 0.23 mm are B. 1.
89T or more, Lt/s. Unidirectional silicon steel sheets with ultra-low core loss of 0.90 W/kg or less are being manufactured.

特に最近では省エネの見地から電力損失の低減を特徴と
する請が著しく強まり、欧米では損失の少ない変圧器を
作る場合に鉄損の減少分を金額にして換算して変圧器価
格に上積みする「ロス・エバリユエーション」 (鉄損
評価)制度が普及している。
In particular, recently there has been a marked increase in demand for features that reduce power loss from the perspective of energy conservation, and in Europe and America, when creating a transformer with low loss, the reduction in iron loss is converted into a monetary amount and added to the transformer price. The "loss evaluation" (iron loss evaluation) system is becoming widespread.

(従来の技術) このような状況下において最近、一方向形珪素鋼板の仕
上焼鈍後の鋼板表面に圧延方向にほぼ直角方向でのレー
ザー照射により局部微少ひずみを導入して磁区を細分化
し、もって鉄損を低下させることが提案された(特開昭
57−2252号、特公昭57−53419号、特公昭
58−26405号及び特公昭58−26406号各公
報参照)。
(Prior art) Under these circumstances, recently, the surface of a unidirectional silicon steel plate after finish annealing is irradiated with a laser in a direction approximately perpendicular to the rolling direction to introduce local microstrain to subdivide the magnetic domains. It has been proposed to reduce iron loss (see Japanese Patent Application Laid-open No. 57-2252, Japanese Patent Publication No. 57-53419, Japanese Patent Publication No. 58-26405, and Japanese Patent Publication No. 58-26406).

この磁区細分化技術はひずみ取り焼鈍を施さない、積鉄
心向はトランス材料として効果的であるが、ひずみ取り
焼鈍を施す、主として巻鉄心トラ、ンス材料にあっては
レーザー照射によって折角に導入された局部微少ひずみ
が焼鈍処理により開放されて磁区幅が広くなるため、レ
ーザー照射効果が失われるという欠点がある。
This magnetic domain refining technology is effective for transformer materials that do not undergo strain relief annealing, but is difficult to introduce by laser irradiation for strain relief annealed materials, mainly wound core transformer materials. The disadvantage is that the laser irradiation effect is lost because the local microstrain is released by the annealing treatment and the magnetic domain width becomes wider.

(発明が解決しようとする問題点) 上記従来法に従う鉄損低域に伴われたミひすみ取り焼鈍
のような、高温熱履歴を経ることによる効果の喪失を来
すことのない、より有利な一方向形珪素鋼板の鉄損低減
方法を与えることがこの発明の目的である。
(Problems to be Solved by the Invention) A more advantageous method that does not cause loss of effectiveness due to high-temperature thermal history, such as the crack annealing that is accompanied by low iron loss according to the conventional method. It is an object of the present invention to provide a method for reducing iron loss in a unidirectional silicon steel plate.

(問題点を解決するための手段) この発明は仕上焼鈍を経て表面上の酸化物を除去しさら
に鏡面状態にした方向性珪素鋼板を板面が相互に離間し
たルーズコイルに巻取り該コイルに減圧CVD処理を施
して該鋼板表面上に極薄張力被膜を形成させることを特
徴とする一方向形珪素鋼板の鉄損低減方法である。
(Means for Solving the Problems) This invention involves winding a grain-oriented silicon steel plate, which has undergone finish annealing to remove oxides on the surface and make it mirror-like, into a loose coil with plate surfaces spaced apart from each other. This is a method for reducing iron loss of a unidirectional silicon steel sheet, which is characterized by forming an ultra-thin tension film on the surface of the steel sheet by performing a low-pressure CVD treatment.

まずCVD反応を行なうために鋼板と鋼板の間にスペー
サを挿入して間隙を作ってルーズコイルとした後に減圧
CVD処理を行なう。コイル間隙を作るためのスペーサ
はコイルの上端部又は下端部に挿入し、CvD反応後こ
の端部はトリミングによって切断する。
First, in order to perform a CVD reaction, a spacer is inserted between steel plates to create a gap to form a loose coil, and then a low pressure CVD process is performed. A spacer for creating a gap between the coils is inserted into the upper or lower end of the coil, and this end is cut off by trimming after the CvD reaction.

この減圧CVD処理は、 v 、 Nb 、 Ta 、 Cr 、 no 、 W
 + Mn 、Co 、 Ni +i、B及びStより
なる群から選んだ少なくとも1種の窒化物及び又は炭化
物並びに、 ^1  、 Ni 、 Cu 、 Itl 、 St及
びZnよりなる群から選んだ少なくとも1種の酸化物の
如き極薄張力被膜を上記ルーズコイルに形成させること
より、一方向形珪素鋼板の鉄損を著しく減じることがで
きる。
This low pressure CVD treatment is performed using v, Nb, Ta, Cr, no, W
+ at least one nitride and/or carbide selected from the group consisting of Mn, Co, Ni +i, B and St, and at least one selected from the group consisting of ^1, Ni, Cu, Itl, St and Zn By forming an extremely thin tensile coating such as an oxide on the loose coil, the core loss of the unidirectional silicon steel plate can be significantly reduced.

第1図にこの発明の実施に供するCVD装置の一例を断
面で示し、図中1は真空炉、2は均熱用上蓋、3は加熱
用ヒータ、4はガス導入路、5はバルブ、6はモーター
、7は強制ファン、8は真空路、9は所定の処理を行っ
た方向性珪素鋼板のルーズコイル、10は排ガス路であ
る。
FIG. 1 shows a cross section of an example of a CVD apparatus used for carrying out the present invention, in which 1 is a vacuum furnace, 2 is a soaking top cover, 3 is a heating heater, 4 is a gas introduction path, 5 is a valve, and 6 is a vacuum furnace. 1 is a motor, 7 is a forced fan, 8 is a vacuum path, 9 is a loose coil made of grain-oriented silicon steel plate subjected to a predetermined treatment, and 10 is an exhaust gas path.

ここに所定の処理というのは方向性珪素鋼板に施される
一連の工程を介した仕上焼鈍を経て、表面上の酸化物を
除去し、さらに鏡面状態にすることを指す。
The predetermined treatment here refers to finishing annealing performed on a grain-oriented silicon steel sheet through a series of steps to remove oxides on the surface and further make it mirror-like.

このルーズコイルに対し次のようにして鋼板表面に極薄
の張力被膜を形成させる。
An extremely thin tension film is formed on the surface of the steel plate using this loose coil as follows.

すなわちルーズコイル状に巻き取ったコイル9を真空炉
1内に挿入し、次に、真空ポンプを作動させることによ
り真空路8を通して炉内を10−2から10−’ )−
ルの真空度にする。
That is, the coil 9 wound into a loose coil shape is inserted into the vacuum furnace 1, and then the inside of the furnace is moved from 10-2 to 10-') through the vacuum path 8 by operating the vacuum pump.
the vacuum level.

その後ガス導入路4からH2ガスを導入すると同時に、
炉内ガスの流通を良(するため排ガス路10を通してガ
ス引きを行ない真空炉内を常に減圧(常用使用圧力は1
〜500トール)下にしてルーズコイル9の鋼板間隙に
おけるガスの流れを良くする。
After that, at the same time as introducing H2 gas from the gas introduction path 4,
To ensure good gas flow in the furnace, gas is drawn through the exhaust gas path 10 to constantly reduce the pressure inside the vacuum furnace (the normal operating pressure is 1
~500 torr) to improve the flow of gas in the gap between the steel plates of the loose coil 9.

次に加熱用ヒーター3を作動させコイルを600℃から
1000℃の温度に加熱保定した後、ガス導入路4より
例えば、TiC14とNz + TlCl4  とC1
1,又はTiCl4 とCH4とN2の混合ガスを導入
し、5分間〜100時間で鋼板表面上に減圧CVD法に
より極薄張力被膜を形成させる。
Next, the heating heater 3 is activated to heat and maintain the coil at a temperature of 600°C to 1000°C, and then, for example, TiC14, Nz + TlCl4, and C1 are introduced from the gas introduction path 4.
1 or a mixed gas of TiCl4, CH4, and N2 is introduced, and an ultra-thin tension film is formed on the surface of the steel plate by low pressure CVD for 5 minutes to 100 hours.

この際ルーズコイル9内を均一加熱するため均。At this time, in order to uniformly heat the inside of the loose coil 9.

熱用上蓋2を使用し、またコイルの層間隙雰囲気中のガ
スの流通を良くするためモーター6により強制ファン7
によりガスの流通均一化を促進する。
The heat cover 2 is used, and a forced fan 7 is operated by a motor 6 to improve the gas flow in the atmosphere between the layers of the coil.
This promotes uniform gas distribution.

このようにして、鋼板表面上に好ましくは0.1〜1.
0μm厚の極薄張力被膜を形成させることができ、この
被膜形成によって確実に一方向形珪素鋼板の超低鉄損化
が可能となる。
In this way, preferably 0.1 to 1.
An ultra-thin tensile coating with a thickness of 0 μm can be formed, and by forming this coating, it is possible to reliably achieve ultra-low iron loss in a unidirectional silicon steel plate.

(作用) この発明において減圧CVD法による極薄張力被膜の形
成を、とくに鏡面状態にした板面が相互に離間したルー
ズコイルに対して適用するのは主としてCVD反応によ
り鋼板表面上に上記の極薄張力被膜を形成させるためで
あり、ここに鏡面状態は、表面あらさの度合いにて、中
心線平均あらさ0.4μm以下で適合し、それというの
は、このような表面あらさの仕上げ鋼板面に対して鋼板
と密着性にすぐれた極薄張力被膜の形成が可能になる。
(Function) In this invention, the formation of an ultra-thin tension film by low-pressure CVD is applied to a loose coil whose mirror-finished plate surfaces are spaced apart from each other. This is to form a thin tensile film, and the mirror surface condition is suitable for the degree of surface roughness with a center line average roughness of 0.4 μm or less, which means that the finished steel plate surface with such surface roughness On the other hand, it becomes possible to form an ultra-thin tension coating with excellent adhesion to the steel plate.

TiCl4ガスを用いるTiN + TicおよびTi
 (CN)被膜形成反応は例えば次の通りである。
TiN + Tic and Ti using TiCl4 gas
The (CN) film forming reaction is, for example, as follows.

2TiC1a +4H2+N2→2TiN + 811
ClTiCl 4+ Clf、→TiC+41((J!
2Tic e a  + 2cH4,+ N2→2T 
i (CN)  + 8HC1前記のものを含めてこれ
らの鋼板表面上に形成させた被膜は地鉄との熱膨張の差
があるので、これによって導入される鋼板の張力が鉄損
め有効な低減に寄与するほか、ひずみ取り焼鈍の如き、
高温熱履歴に影響されないのである。
2TiC1a +4H2+N2→2TiN + 811
ClTiCl 4+ Clf, →TiC+41 ((J!
2Tic e a + 2cH4, + N2 → 2T
i (CN) + 8HC1 Since the coatings formed on the surfaces of these steel plates, including those mentioned above, have a difference in thermal expansion from the base steel, the tension of the steel plates introduced by this can effectively reduce iron loss. In addition to contributing to
It is not affected by high temperature thermal history.

大止開 仕上焼鈍済みの一方向形珪素鋼板(板厚0.2.3m5
)の表面を酸洗により酸化物を除去した後、電解研磨に
より鋼板表面を鏡面状態にした後、鋼板と鋼板の間に1
.5鰭φのスペーサを入れてルーズコイル9として、第
1図に示した真空炉1内に挿入した後、減圧CVDによ
りTiC1aとN2とN2の混合ガス雰囲気中で750
℃、20hrにわたり処理して鋼板表面上に0.7μm
厚のTiNを形成させた。
Unidirectional silicon steel plate with large stop annealing finish (plate thickness 0.2.3m5
) After removing oxides from the surface of the steel plate by pickling and making the steel plate surface mirror-like by electrolytic polishing,
.. After inserting a spacer of 5 fins φ to form a loose coil 9 and inserting it into the vacuum furnace 1 shown in FIG.
℃, 0.7 μm on the steel plate surface after treatment for 20 hr.
A thick TiN layer was formed.

その後りん酸塩とコロイダルシリカを主成分とするコー
ティング処理を行なった。かくして得られた製品の磁気
特性は 8+o = 1.927 、 Jtzso = 0.7
3 ’A/kgであった。
After that, a coating treatment containing phosphate and colloidal silica as the main ingredients was applied. The magnetic properties of the product thus obtained are 8+o = 1.927, Jtzso = 0.7
It was 3'A/kg.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はCVD装置の模式図である。 1・・・真空炉      2・・・均熱用上蓋3・・
・加熱用ヒーター  4・・・ガス導入路8・・・真空
路      9・・・コイル10・・・排ガス路
FIG. 1 is a schematic diagram of a CVD apparatus. 1...Vacuum furnace 2...Top lid for soaking 3...
・Heating heater 4... Gas introduction path 8... Vacuum path 9... Coil 10... Exhaust gas path

Claims (1)

【特許請求の範囲】[Claims] 1、仕上焼鈍を経て表面上の酸化物を除去しさらに鏡面
状態にした方向性珪素鋼板を板面が相互に離間したルー
ズコイルに巻取り該コイルに減圧CVD処理を施して該
鋼板表面上に極薄張力被膜を形成させることを特徴とす
る一方向形珪素鋼板の鉄損低減方法。
1. A grain-oriented silicon steel plate that has been subjected to final annealing to remove oxides on the surface and has a mirror finish is wound into a loose coil with plate surfaces spaced apart from each other, and the coil is subjected to low pressure CVD treatment to be coated on the surface of the steel plate. A method for reducing iron loss in a unidirectional silicon steel sheet, characterized by forming an ultra-thin tensile film.
JP60137868A 1985-06-26 1985-06-26 Iron loss reduction method for single directional grain oriented silicon steel plate Granted JPS61296703A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60137868A JPS61296703A (en) 1985-06-26 1985-06-26 Iron loss reduction method for single directional grain oriented silicon steel plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60137868A JPS61296703A (en) 1985-06-26 1985-06-26 Iron loss reduction method for single directional grain oriented silicon steel plate

Publications (2)

Publication Number Publication Date
JPS61296703A true JPS61296703A (en) 1986-12-27
JPH0374484B2 JPH0374484B2 (en) 1991-11-27

Family

ID=15208599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60137868A Granted JPS61296703A (en) 1985-06-26 1985-06-26 Iron loss reduction method for single directional grain oriented silicon steel plate

Country Status (1)

Country Link
JP (1) JPS61296703A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144419A (en) * 1977-05-23 1978-12-15 Kawasaki Steel Co Method of making one directional silicon steel plate with extremely low core loss
JPS5795608A (en) * 1980-12-04 1982-06-14 Kawasaki Steel Corp Method for forming film having excellent insulating property, tension imparting property, corrosion resistance, and bending adhesion in thin electromagnetic band

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144419A (en) * 1977-05-23 1978-12-15 Kawasaki Steel Co Method of making one directional silicon steel plate with extremely low core loss
JPS5795608A (en) * 1980-12-04 1982-06-14 Kawasaki Steel Corp Method for forming film having excellent insulating property, tension imparting property, corrosion resistance, and bending adhesion in thin electromagnetic band

Also Published As

Publication number Publication date
JPH0374484B2 (en) 1991-11-27

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