JPS6129666B2 - - Google Patents

Info

Publication number
JPS6129666B2
JPS6129666B2 JP54009797A JP979779A JPS6129666B2 JP S6129666 B2 JPS6129666 B2 JP S6129666B2 JP 54009797 A JP54009797 A JP 54009797A JP 979779 A JP979779 A JP 979779A JP S6129666 B2 JPS6129666 B2 JP S6129666B2
Authority
JP
Japan
Prior art keywords
fet
electrode
plasma
film
reference electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54009797A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55101853A (en
Inventor
Michihiko Asai
Masao Suda
Kanji Sasaki
Makoto Yano
Kyoo Shimada
Kyoichiro Shibatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP979779A priority Critical patent/JPS55101853A/ja
Publication of JPS55101853A publication Critical patent/JPS55101853A/ja
Publication of JPS6129666B2 publication Critical patent/JPS6129666B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP979779A 1979-01-30 1979-01-30 Method of fabricating comparison electrode with fet Granted JPS55101853A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP979779A JPS55101853A (en) 1979-01-30 1979-01-30 Method of fabricating comparison electrode with fet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP979779A JPS55101853A (en) 1979-01-30 1979-01-30 Method of fabricating comparison electrode with fet

Publications (2)

Publication Number Publication Date
JPS55101853A JPS55101853A (en) 1980-08-04
JPS6129666B2 true JPS6129666B2 (enrdf_load_stackoverflow) 1986-07-08

Family

ID=11730180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP979779A Granted JPS55101853A (en) 1979-01-30 1979-01-30 Method of fabricating comparison electrode with fet

Country Status (1)

Country Link
JP (1) JPS55101853A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7399668B2 (en) 2004-09-30 2008-07-15 3M Innovative Properties Company Method for making electronic devices having a dielectric layer surface treatment

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834352A (ja) * 1981-08-24 1983-02-28 Shimadzu Corp ソリッドステートレファレンス電極
EP0068025B1 (en) * 1980-11-17 1987-11-04 Shimadzu Corporation Reference electrode
JPS58103658A (ja) * 1981-12-16 1983-06-20 Shimadzu Corp レフアレンス電極
JPH01116443A (ja) * 1987-10-30 1989-05-09 Shindengen Electric Mfg Co Ltd 電気化学測定法
CN109668647A (zh) * 2017-10-17 2019-04-23 中国石油化工股份有限公司 快速测试可燃气体点火温度的装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825221B2 (ja) * 1977-12-12 1983-05-26 株式会社クラレ Ｆｅｔ比較電極

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7399668B2 (en) 2004-09-30 2008-07-15 3M Innovative Properties Company Method for making electronic devices having a dielectric layer surface treatment

Also Published As

Publication number Publication date
JPS55101853A (en) 1980-08-04

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