JPS61295636A - シリコン・エツチング法 - Google Patents

シリコン・エツチング法

Info

Publication number
JPS61295636A
JPS61295636A JP13859285A JP13859285A JPS61295636A JP S61295636 A JPS61295636 A JP S61295636A JP 13859285 A JP13859285 A JP 13859285A JP 13859285 A JP13859285 A JP 13859285A JP S61295636 A JPS61295636 A JP S61295636A
Authority
JP
Japan
Prior art keywords
layer
silicon wafer
voltage
etching
pulsating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13859285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413851B2 (enExample
Inventor
Kyoichi Ikeda
恭一 池田
Tetsuya Watanabe
哲也 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP13859285A priority Critical patent/JPS61295636A/ja
Publication of JPS61295636A publication Critical patent/JPS61295636A/ja
Publication of JPH0413851B2 publication Critical patent/JPH0413851B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP13859285A 1985-06-25 1985-06-25 シリコン・エツチング法 Granted JPS61295636A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13859285A JPS61295636A (ja) 1985-06-25 1985-06-25 シリコン・エツチング法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13859285A JPS61295636A (ja) 1985-06-25 1985-06-25 シリコン・エツチング法

Publications (2)

Publication Number Publication Date
JPS61295636A true JPS61295636A (ja) 1986-12-26
JPH0413851B2 JPH0413851B2 (enExample) 1992-03-11

Family

ID=15225699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13859285A Granted JPS61295636A (ja) 1985-06-25 1985-06-25 シリコン・エツチング法

Country Status (1)

Country Link
JP (1) JPS61295636A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5445718A (en) * 1994-01-24 1995-08-29 General Motors Corporation Electrochemical etch-stop on n-type silicon by injecting holes from a shallow p-type layer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5445718A (en) * 1994-01-24 1995-08-29 General Motors Corporation Electrochemical etch-stop on n-type silicon by injecting holes from a shallow p-type layer

Also Published As

Publication number Publication date
JPH0413851B2 (enExample) 1992-03-11

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