JPS6129454Y2 - - Google Patents

Info

Publication number
JPS6129454Y2
JPS6129454Y2 JP17651079U JP17651079U JPS6129454Y2 JP S6129454 Y2 JPS6129454 Y2 JP S6129454Y2 JP 17651079 U JP17651079 U JP 17651079U JP 17651079 U JP17651079 U JP 17651079U JP S6129454 Y2 JPS6129454 Y2 JP S6129454Y2
Authority
JP
Japan
Prior art keywords
recess
container
plate
gas
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17651079U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5695327U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17651079U priority Critical patent/JPS6129454Y2/ja
Publication of JPS5695327U publication Critical patent/JPS5695327U/ja
Application granted granted Critical
Publication of JPS6129454Y2 publication Critical patent/JPS6129454Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Compressor (AREA)
  • Details Of Heat-Exchange And Heat-Transfer (AREA)
  • Separating Particles In Gases By Inertia (AREA)
  • Drying Of Gases (AREA)
JP17651079U 1979-12-20 1979-12-20 Expired JPS6129454Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17651079U JPS6129454Y2 (ko) 1979-12-20 1979-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17651079U JPS6129454Y2 (ko) 1979-12-20 1979-12-20

Publications (2)

Publication Number Publication Date
JPS5695327U JPS5695327U (ko) 1981-07-29
JPS6129454Y2 true JPS6129454Y2 (ko) 1986-08-30

Family

ID=29687138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17651079U Expired JPS6129454Y2 (ko) 1979-12-20 1979-12-20

Country Status (1)

Country Link
JP (1) JPS6129454Y2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2913040B2 (ja) * 1988-08-26 1999-06-28 東京エレクトロン株式会社 トラップ装置
KR100683055B1 (ko) * 2004-07-13 2007-02-15 주식회사 티엠티엔지니어링 로터리형 열회수 환기장치
JP2022113360A (ja) * 2021-01-25 2022-08-04 コベルコ・コンプレッサ株式会社 ガスクーラ

Also Published As

Publication number Publication date
JPS5695327U (ko) 1981-07-29

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