JPS61292508A - 欠陥検査方法およびその装置 - Google Patents

欠陥検査方法およびその装置

Info

Publication number
JPS61292508A
JPS61292508A JP60134086A JP13408685A JPS61292508A JP S61292508 A JPS61292508 A JP S61292508A JP 60134086 A JP60134086 A JP 60134086A JP 13408685 A JP13408685 A JP 13408685A JP S61292508 A JPS61292508 A JP S61292508A
Authority
JP
Japan
Prior art keywords
filter
optical system
detection optical
detection
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60134086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0562684B2 (enrdf_load_stackoverflow
Inventor
Hideaki Doi
秀明 土井
Yasuhiko Hara
靖彦 原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60134086A priority Critical patent/JPS61292508A/ja
Publication of JPS61292508A publication Critical patent/JPS61292508A/ja
Publication of JPH0562684B2 publication Critical patent/JPH0562684B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60134086A 1985-06-21 1985-06-21 欠陥検査方法およびその装置 Granted JPS61292508A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60134086A JPS61292508A (ja) 1985-06-21 1985-06-21 欠陥検査方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60134086A JPS61292508A (ja) 1985-06-21 1985-06-21 欠陥検査方法およびその装置

Publications (2)

Publication Number Publication Date
JPS61292508A true JPS61292508A (ja) 1986-12-23
JPH0562684B2 JPH0562684B2 (enrdf_load_stackoverflow) 1993-09-09

Family

ID=15120085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60134086A Granted JPS61292508A (ja) 1985-06-21 1985-06-21 欠陥検査方法およびその装置

Country Status (1)

Country Link
JP (1) JPS61292508A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999046814A1 (en) * 1998-03-09 1999-09-16 Super Silicon Crystal Research Institute Corporation Optical instrument for measuring shape of wafer

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4278246B2 (ja) * 1999-10-12 2009-06-10 住友化学株式会社 光学透明フィルムの検査方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999046814A1 (en) * 1998-03-09 1999-09-16 Super Silicon Crystal Research Institute Corporation Optical instrument for measuring shape of wafer
US6504615B1 (en) 1998-03-09 2003-01-07 Super Silicon Crystal Research Institute Corporation Optical instrument for measuring shape of wafer

Also Published As

Publication number Publication date
JPH0562684B2 (enrdf_load_stackoverflow) 1993-09-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term