JPS6128604B2 - - Google Patents

Info

Publication number
JPS6128604B2
JPS6128604B2 JP4260578A JP4260578A JPS6128604B2 JP S6128604 B2 JPS6128604 B2 JP S6128604B2 JP 4260578 A JP4260578 A JP 4260578A JP 4260578 A JP4260578 A JP 4260578A JP S6128604 B2 JPS6128604 B2 JP S6128604B2
Authority
JP
Japan
Prior art keywords
silicon
producing high
hydrogen
preheated
purity silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4260578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54134024A (en
Inventor
Chaarusu Shuumachaa Josefu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JEI SHII SHUUMACHAA CO
Original Assignee
JEI SHII SHUUMACHAA CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JEI SHII SHUUMACHAA CO filed Critical JEI SHII SHUUMACHAA CO
Priority to JP4260578A priority Critical patent/JPS54134024A/ja
Publication of JPS54134024A publication Critical patent/JPS54134024A/ja
Publication of JPS6128604B2 publication Critical patent/JPS6128604B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP4260578A 1978-04-11 1978-04-11 Production of high purity silicon Granted JPS54134024A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4260578A JPS54134024A (en) 1978-04-11 1978-04-11 Production of high purity silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4260578A JPS54134024A (en) 1978-04-11 1978-04-11 Production of high purity silicon

Publications (2)

Publication Number Publication Date
JPS54134024A JPS54134024A (en) 1979-10-18
JPS6128604B2 true JPS6128604B2 (enrdf_load_stackoverflow) 1986-07-01

Family

ID=12640666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4260578A Granted JPS54134024A (en) 1978-04-11 1978-04-11 Production of high purity silicon

Country Status (1)

Country Link
JP (1) JPS54134024A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008153181A1 (ja) * 2007-06-15 2010-08-26 ソーラーシリコンテクノロジー株式会社 太陽電池用シリコン原料を製造するための反応装置
DE102008059408A1 (de) * 2008-11-27 2010-06-02 Schmid Silicon Technology Gmbh Verfahren und Vorrichtungen zur Herstellung von Reinstsilizium

Also Published As

Publication number Publication date
JPS54134024A (en) 1979-10-18

Similar Documents

Publication Publication Date Title
US4084024A (en) Process for the production of silicon of high purity
EP1437327B1 (en) Method for producing silicon
US6887448B2 (en) Method for production of high purity silicon
US4676967A (en) High purity silane and silicon production
CA1228220A (en) Process for the production of silicon
US4102765A (en) Arc heater production of silicon involving alkali or alkaline-earth metals
JPS6228083B2 (enrdf_load_stackoverflow)
JP3844856B2 (ja) 高純度シリコンの製造方法
EP2070871B1 (en) Process for production of multicrystal silicon and facility for production of multicrystal silicon
US8580205B2 (en) Method and apparatus for improving the efficiency of purification and deposition of polycrystalline silicon
US4318942A (en) Process for producing polycrystalline silicon
JP4038110B2 (ja) シリコンの製造方法
JP2013515673A (ja) 分配器の周縁開口部に導かれた四塩化ケイ素を用いてリアクター壁上のケイ素付着物を低減する方法
JPH0264006A (ja) 太陽のシリコンの製造方法
JPH0222004B2 (enrdf_load_stackoverflow)
JPS6128604B2 (enrdf_load_stackoverflow)
CN101186299A (zh) 一种流化床装置生产高纯度硅的新工艺
JPH02172811A (ja) トリクロロシランの製造方法
GB1568338A (en) Process for the production of silicon of high purity
JPS59121109A (ja) 高純度シリコンの製造方法
JPH0680412A (ja) 多結晶シリコンの製造方法
JPS5945916A (ja) 高純度シリコンの連続的製造方法
JPH0352408B2 (enrdf_load_stackoverflow)
JPS59156907A (ja) シランの製造方法
JPH0343204B2 (enrdf_load_stackoverflow)