JPS61285609A - チタン酸鉛強誘電体薄膜およびその製造方法 - Google Patents
チタン酸鉛強誘電体薄膜およびその製造方法Info
- Publication number
- JPS61285609A JPS61285609A JP12845685A JP12845685A JPS61285609A JP S61285609 A JPS61285609 A JP S61285609A JP 12845685 A JP12845685 A JP 12845685A JP 12845685 A JP12845685 A JP 12845685A JP S61285609 A JPS61285609 A JP S61285609A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- lead titanate
- present
- manufacture
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 47
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000203 mixture Substances 0.000 claims description 17
- 239000002243 precursor Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 238000000034 method Methods 0.000 description 17
- 238000010304 firing Methods 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- 230000007547 defect Effects 0.000 description 7
- 239000010408 film Substances 0.000 description 7
- 229910044991 metal oxide Inorganic materials 0.000 description 7
- 150000004706 metal oxides Chemical group 0.000 description 7
- 229910003781 PbTiO3 Inorganic materials 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- -1 Furthermore Chemical compound 0.000 description 1
- HYZQBNDRDQEWAN-LNTINUHCSA-N (z)-4-hydroxypent-3-en-2-one;manganese(3+) Chemical compound [Mn+3].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O HYZQBNDRDQEWAN-LNTINUHCSA-N 0.000 description 1
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- FPCJKVGGYOAWIZ-UHFFFAOYSA-N butan-1-ol;titanium Chemical compound [Ti].CCCCO.CCCCO.CCCCO.CCCCO FPCJKVGGYOAWIZ-UHFFFAOYSA-N 0.000 description 1
- 150000001734 carboxylic acid salts Chemical class 0.000 description 1
- 239000013522 chelant Chemical class 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- JLRJWBUSTKIQQH-UHFFFAOYSA-K lanthanum(3+);triacetate Chemical compound [La+3].CC([O-])=O.CC([O-])=O.CC([O-])=O JLRJWBUSTKIQQH-UHFFFAOYSA-K 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000007142 ring opening reaction Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Chemically Coating (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12845685A JPS61285609A (ja) | 1985-06-13 | 1985-06-13 | チタン酸鉛強誘電体薄膜およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12845685A JPS61285609A (ja) | 1985-06-13 | 1985-06-13 | チタン酸鉛強誘電体薄膜およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61285609A true JPS61285609A (ja) | 1986-12-16 |
| JPH0570242B2 JPH0570242B2 (enrdf_load_stackoverflow) | 1993-10-04 |
Family
ID=14985155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12845685A Granted JPS61285609A (ja) | 1985-06-13 | 1985-06-13 | チタン酸鉛強誘電体薄膜およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61285609A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63239150A (ja) * | 1987-03-27 | 1988-10-05 | Sumitomo Electric Ind Ltd | 超電導セラミツクス薄膜の製造方法 |
| JPH07211135A (ja) * | 1993-12-01 | 1995-08-11 | Matsushita Electric Ind Co Ltd | 強誘電体薄膜及びその製造方法 |
| US5571495A (en) * | 1994-08-11 | 1996-11-05 | Japan As Represented By Director General Of Agency Of Industrial Science And Technology | Dielectric thin film of substituted lead titanate |
| US5717157A (en) * | 1993-12-01 | 1998-02-10 | Matsushita Electric Industrial Co., Ltd. | Ferroelectric thin film and method of manufacturing the same |
| US6121647A (en) * | 1996-06-26 | 2000-09-19 | Tdk Corporation | Film structure, electronic device, recording medium, and process of preparing ferroelectric thin films |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59138004A (ja) * | 1983-01-27 | 1984-08-08 | 松下電器産業株式会社 | 強誘電体薄膜 |
| JPS59141427A (ja) * | 1983-02-01 | 1984-08-14 | Matsushita Electric Ind Co Ltd | 強誘電体薄膜 |
-
1985
- 1985-06-13 JP JP12845685A patent/JPS61285609A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59138004A (ja) * | 1983-01-27 | 1984-08-08 | 松下電器産業株式会社 | 強誘電体薄膜 |
| JPS59141427A (ja) * | 1983-02-01 | 1984-08-14 | Matsushita Electric Ind Co Ltd | 強誘電体薄膜 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63239150A (ja) * | 1987-03-27 | 1988-10-05 | Sumitomo Electric Ind Ltd | 超電導セラミツクス薄膜の製造方法 |
| JPH07211135A (ja) * | 1993-12-01 | 1995-08-11 | Matsushita Electric Ind Co Ltd | 強誘電体薄膜及びその製造方法 |
| US5717157A (en) * | 1993-12-01 | 1998-02-10 | Matsushita Electric Industrial Co., Ltd. | Ferroelectric thin film and method of manufacturing the same |
| US5989395A (en) * | 1993-12-01 | 1999-11-23 | Matsushita Electric Industrial Co., Ltd. | Ferroelectric thin film and method of manufacturing the same |
| US5571495A (en) * | 1994-08-11 | 1996-11-05 | Japan As Represented By Director General Of Agency Of Industrial Science And Technology | Dielectric thin film of substituted lead titanate |
| US6121647A (en) * | 1996-06-26 | 2000-09-19 | Tdk Corporation | Film structure, electronic device, recording medium, and process of preparing ferroelectric thin films |
| US6387712B1 (en) | 1996-06-26 | 2002-05-14 | Tdk Corporation | Process for preparing ferroelectric thin films |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0570242B2 (enrdf_load_stackoverflow) | 1993-10-04 |
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