JPS6128029B2 - - Google Patents
Info
- Publication number
- JPS6128029B2 JPS6128029B2 JP18381181A JP18381181A JPS6128029B2 JP S6128029 B2 JPS6128029 B2 JP S6128029B2 JP 18381181 A JP18381181 A JP 18381181A JP 18381181 A JP18381181 A JP 18381181A JP S6128029 B2 JPS6128029 B2 JP S6128029B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- magnetic
- target material
- shaped
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005284 excitation Effects 0.000 claims description 26
- 230000004907 flux Effects 0.000 claims description 24
- 238000004544 sputter deposition Methods 0.000 claims description 18
- 239000013077 target material Substances 0.000 description 33
- 238000009826 distribution Methods 0.000 description 30
- 239000000758 substrate Substances 0.000 description 25
- 239000010408 film Substances 0.000 description 18
- 239000010409 thin film Substances 0.000 description 13
- 230000003628 erosive effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000005477 sputtering target Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000002826 coolant Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
- H01J37/3408—Planar magnetron sputtering
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18381181A JPS5887270A (ja) | 1981-11-18 | 1981-11-18 | プレ−ナマグネトロン方式のスパッタリング電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18381181A JPS5887270A (ja) | 1981-11-18 | 1981-11-18 | プレ−ナマグネトロン方式のスパッタリング電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5887270A JPS5887270A (ja) | 1983-05-25 |
| JPS6128029B2 true JPS6128029B2 (US20110009641A1-20110113-C00116.png) | 1986-06-28 |
Family
ID=16142283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18381181A Granted JPS5887270A (ja) | 1981-11-18 | 1981-11-18 | プレ−ナマグネトロン方式のスパッタリング電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5887270A (US20110009641A1-20110113-C00116.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01180629U (US20110009641A1-20110113-C00116.png) * | 1988-05-30 | 1989-12-26 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1242989A (en) * | 1983-07-19 | 1988-10-11 | Donald R. Boys | Apparatus for and method of controlling sputter coating |
| NL8402012A (nl) * | 1983-07-19 | 1985-02-18 | Varian Associates | Magnetron spetter deklaag opbrengbron voor zowel magnetische als niet-magnetische trefplaatmaterialen. |
| JPS6067668A (ja) * | 1983-09-21 | 1985-04-18 | Fujitsu Ltd | スパッタリング装置 |
| US4606806A (en) * | 1984-05-17 | 1986-08-19 | Varian Associates, Inc. | Magnetron sputter device having planar and curved targets |
| JPH0726202B2 (ja) * | 1985-12-17 | 1995-03-22 | ローム株式会社 | マグネトロンスパッタにおける膜厚調整方法 |
| JPS63277756A (ja) * | 1987-05-09 | 1988-11-15 | Canon Inc | 対向タ−ゲット式スパッタ装置 |
| JP2638020B2 (ja) * | 1987-12-22 | 1997-08-06 | 住友金属工業株式会社 | 熱間鍛造用快削鋼 |
| KR101885123B1 (ko) * | 2017-03-31 | 2018-08-03 | 한국알박(주) | 마그네트론 스퍼터링 장치의 자석 제어 시스템 |
-
1981
- 1981-11-18 JP JP18381181A patent/JPS5887270A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01180629U (US20110009641A1-20110113-C00116.png) * | 1988-05-30 | 1989-12-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5887270A (ja) | 1983-05-25 |
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