JPS61277046A - 湿度素子 - Google Patents

湿度素子

Info

Publication number
JPS61277046A
JPS61277046A JP11856085A JP11856085A JPS61277046A JP S61277046 A JPS61277046 A JP S61277046A JP 11856085 A JP11856085 A JP 11856085A JP 11856085 A JP11856085 A JP 11856085A JP S61277046 A JPS61277046 A JP S61277046A
Authority
JP
Japan
Prior art keywords
layer
humidity
sensitive film
electrode
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11856085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449908B2 (enrdf_load_stackoverflow
Inventor
Kenichi Yamane
山根　賢一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP11856085A priority Critical patent/JPS61277046A/ja
Publication of JPS61277046A publication Critical patent/JPS61277046A/ja
Publication of JPH0449908B2 publication Critical patent/JPH0449908B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP11856085A 1985-05-31 1985-05-31 湿度素子 Granted JPS61277046A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11856085A JPS61277046A (ja) 1985-05-31 1985-05-31 湿度素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11856085A JPS61277046A (ja) 1985-05-31 1985-05-31 湿度素子

Publications (2)

Publication Number Publication Date
JPS61277046A true JPS61277046A (ja) 1986-12-08
JPH0449908B2 JPH0449908B2 (enrdf_load_stackoverflow) 1992-08-12

Family

ID=14739613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11856085A Granted JPS61277046A (ja) 1985-05-31 1985-05-31 湿度素子

Country Status (1)

Country Link
JP (1) JPS61277046A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0665303A1 (en) * 1994-01-18 1995-08-02 Vaisala Oy Method of producing a microporous, gas permeable electrode structure and a microporous, gas permeable electrode structure
JP2010230592A (ja) * 2009-03-27 2010-10-14 Horiba Ltd ガスセンサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0665303A1 (en) * 1994-01-18 1995-08-02 Vaisala Oy Method of producing a microporous, gas permeable electrode structure and a microporous, gas permeable electrode structure
JP2010230592A (ja) * 2009-03-27 2010-10-14 Horiba Ltd ガスセンサ

Also Published As

Publication number Publication date
JPH0449908B2 (enrdf_load_stackoverflow) 1992-08-12

Similar Documents

Publication Publication Date Title
US3523244A (en) Device for measurement of absolute humidity
US4164868A (en) Capacitive humidity transducer
JPH0365643A (ja) 静電容量型湿度センサー
JPH0464425B2 (enrdf_load_stackoverflow)
US4920451A (en) Moisture-sensitive element
JPS61277046A (ja) 湿度素子
JP2810779B2 (ja) 容量式薄膜湿度センサおよびその製造方法
JPH03251704A (ja) ストレインゲージの製造方法
JPH03167463A (ja) 感湿素子
JPS5967445A (ja) 湿度センサ−
JPH0523124U (ja) 静電容量式湿度センサ
JPH075065U (ja) 振動センサ
JPS6117945A (ja) 湿度素子
CN2393097Y (zh) 无基片高分子薄膜湿敏元件
JPH04372849A (ja) 水溶液中の溶質濃度測定センサ
JPH04244952A (ja) 湿度センサ
JPH01233360A (ja) 湿度センサ
JP3003522U (ja) 端子の接続構造
JPS6148861B2 (enrdf_load_stackoverflow)
JPS57139651A (en) Humidity sensor
JP2937497B2 (ja) 湿度センサ
JPS6063452A (ja) 感湿素子
JPH04244951A (ja) 結露センサー及びその製造方法
RU1770879C (ru) Емкостный датчик влажности
JPS6063453A (ja) 感湿素子