CN2393097Y - 无基片高分子薄膜湿敏元件 - Google Patents
无基片高分子薄膜湿敏元件 Download PDFInfo
- Publication number
- CN2393097Y CN2393097Y CN 99248663 CN99248663U CN2393097Y CN 2393097 Y CN2393097 Y CN 2393097Y CN 99248663 CN99248663 CN 99248663 CN 99248663 U CN99248663 U CN 99248663U CN 2393097 Y CN2393097 Y CN 2393097Y
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- CN
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- Prior art keywords
- humidity
- pin
- sensitive
- substrate
- sensitive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000002120 nanofilm Substances 0.000 title abstract 2
- 230000001681 protective effect Effects 0.000 claims abstract description 12
- 239000002985 plastic film Substances 0.000 claims abstract description 4
- 239000000853 adhesive Substances 0.000 claims abstract description 3
- 230000001070 adhesive effect Effects 0.000 claims abstract description 3
- 239000000758 substrate Substances 0.000 claims description 18
- 229920002521 macromolecule Polymers 0.000 claims description 16
- 238000009738 saturating Methods 0.000 claims description 15
- 239000012528 membrane Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229920002678 cellulose Polymers 0.000 claims description 3
- 239000001913 cellulose Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 230000010354 integration Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 108091027981 Response element Proteins 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 99248663 CN2393097Y (zh) | 1999-09-28 | 1999-09-28 | 无基片高分子薄膜湿敏元件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 99248663 CN2393097Y (zh) | 1999-09-28 | 1999-09-28 | 无基片高分子薄膜湿敏元件 |
Publications (1)
Publication Number | Publication Date |
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CN2393097Y true CN2393097Y (zh) | 2000-08-23 |
Family
ID=34033795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 99248663 Expired - Lifetime CN2393097Y (zh) | 1999-09-28 | 1999-09-28 | 无基片高分子薄膜湿敏元件 |
Country Status (1)
Country | Link |
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CN (1) | CN2393097Y (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105866594A (zh) * | 2016-05-20 | 2016-08-17 | 爱普科斯科技(无锡)有限公司 | 一种湿敏电子器件的耐高温治具 |
CN108398466A (zh) * | 2018-06-05 | 2018-08-14 | 广州九思科技有限公司 | 一种薄膜电容湿度传感器及其制备方法 |
-
1999
- 1999-09-28 CN CN 99248663 patent/CN2393097Y/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105866594A (zh) * | 2016-05-20 | 2016-08-17 | 爱普科斯科技(无锡)有限公司 | 一种湿敏电子器件的耐高温治具 |
CN105866594B (zh) * | 2016-05-20 | 2019-03-01 | 全讯射频科技(无锡)有限公司 | 一种湿敏电子器件的耐高温治具 |
CN108398466A (zh) * | 2018-06-05 | 2018-08-14 | 广州九思科技有限公司 | 一种薄膜电容湿度传感器及其制备方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: NO.2907,BLOCK A,QINGHUATONGFANG SCIENCE PLAZA,BEIJ Free format text: FORMER NAME OR ADDRESS: ROOM 212, MAILBOX 2670, BEIJING CITY, 100084 |
|
CP03 | Change of name, title or address |
Patentee address after: Beijing Tsinghua Tongfang science and Technology Square, block A, 2907 Patentee address before: 212 room 2670, box 100084, Beijing City |
|
C56 | Change in the name or address of the patentee |
Owner name: TONGFANG CO., LTD. Free format text: FORMER NAME OR ADDRESS: TSINGHUA TONGFANG CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: 100083 A, block 2907, Tongfang science and Technology Plaza, Beijing Patentee after: Tongfang Co.,Ltd. Address before: 100083 A, block 2907, Tongfang science and Technology Plaza, Beijing Patentee before: Tsinghua Tongfang Co.,Ltd. |
|
C17 | Cessation of patent right | ||
CX01 | Expiry of patent term |