CN206557144U - 一种湿敏电容 - Google Patents
一种湿敏电容 Download PDFInfo
- Publication number
- CN206557144U CN206557144U CN201720129655.8U CN201720129655U CN206557144U CN 206557144 U CN206557144 U CN 206557144U CN 201720129655 U CN201720129655 U CN 201720129655U CN 206557144 U CN206557144 U CN 206557144U
- Authority
- CN
- China
- Prior art keywords
- humidity
- humicap
- sensitive film
- dielectric layer
- top electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 229920000620 organic polymer Polymers 0.000 claims abstract description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 229910000838 Al alloy Inorganic materials 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 241000218202 Coptis Species 0.000 claims description 4
- 235000002991 Coptis groenlandica Nutrition 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- ZXTFQUMXDQLMBY-UHFFFAOYSA-N alumane;molybdenum Chemical group [AlH3].[Mo] ZXTFQUMXDQLMBY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000009713 electroplating Methods 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 239000010955 niobium Substances 0.000 claims description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 2
- -1 Hydroxyl ethyl Chemical group 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 230000007774 longterm Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 32
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201720129655.8U CN206557144U (zh) | 2017-02-13 | 2017-02-13 | 一种湿敏电容 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201720129655.8U CN206557144U (zh) | 2017-02-13 | 2017-02-13 | 一种湿敏电容 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN206557144U true CN206557144U (zh) | 2017-10-13 |
Family
ID=60010183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201720129655.8U Active CN206557144U (zh) | 2017-02-13 | 2017-02-13 | 一种湿敏电容 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN206557144U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106680333A (zh) * | 2017-02-13 | 2017-05-17 | 广州奥松电子有限公司 | 一种湿敏电容及其制造方法 |
CN111812165A (zh) * | 2020-07-10 | 2020-10-23 | 中国航空工业集团公司北京长城航空测控技术研究所 | 一种耐腐蚀的油中水分湿敏电容 |
-
2017
- 2017-02-13 CN CN201720129655.8U patent/CN206557144U/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106680333A (zh) * | 2017-02-13 | 2017-05-17 | 广州奥松电子有限公司 | 一种湿敏电容及其制造方法 |
CN111812165A (zh) * | 2020-07-10 | 2020-10-23 | 中国航空工业集团公司北京长城航空测控技术研究所 | 一种耐腐蚀的油中水分湿敏电容 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1203312C (zh) | 电容式相对湿度传感器 | |
CN103630582B (zh) | 一种mems湿度传感器及制备方法 | |
CN105036059B (zh) | 一种电容式mems传感器的加工方法及传感器结构 | |
CN103487474B (zh) | 一种具有高灵敏度快速响应的mems电容式湿度传感器 | |
CN104634833B (zh) | Mems电容式相对湿度传感器及其制备方法 | |
CN106017751B (zh) | 一种高灵敏度压阻式压力传感器及其制备方法 | |
CN102253091A (zh) | 基于氧化石墨烯的电容式相对湿度传感器 | |
CN101620197A (zh) | 一种快速响应的cmos相对湿度传感器 | |
CN107064255B (zh) | 一种基于CMOS工艺的复合电极式pH传感器及其制备方法 | |
CN101750437A (zh) | 吸附式碳纳米管湿度传感器及其制作方法 | |
CN103018289A (zh) | 一种电容式湿度传感器 | |
CN106680333A (zh) | 一种湿敏电容及其制造方法 | |
CN206557144U (zh) | 一种湿敏电容 | |
US20040194546A1 (en) | Capacitive humidity-sensor and capacitive humidity-sensor manufacturing method | |
CN102243199A (zh) | 快速响应的微电子机械系统相对湿度传感器 | |
CN101307452A (zh) | 一种Ni/Si纳米线阵列的制备方法以及基于这种纳米线阵列的微纳湿度传感器 | |
CN203606311U (zh) | 一种加热式湿度传感器 | |
CN1016896B (zh) | 一种温湿双功能敏感薄膜元件及其制造方法 | |
CN202049130U (zh) | 基于氧化石墨烯的电容式相对湿度传感器 | |
CN201522471U (zh) | 电容式相对湿度传感器 | |
CN1210565C (zh) | 微型湿度传感器 | |
CN102590291A (zh) | 一种改进型湿度传感器的制作方法 | |
CN102243207A (zh) | 电极表面具有纳米凹凸结构的电化学传感器及其制备方法 | |
CN103196955A (zh) | 碳化硅纳米纸传感器及其制作方法和应用 | |
CN1037041C (zh) | 金属-氧化物-半导体结构电容式湿敏器件及其制造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 510470 No. 56, Da Ma Lu, Renhe Town, Guangzhou, Guangdong Patentee after: Guangzhou Aosong Electronics Co.,Ltd. Patentee after: Zhang Bin Address before: 510470 No. 56, Da Ma Lu, Renhe Town, Guangzhou, Guangdong Patentee before: AOSONG (GUANGZHOU) ELECTRONICS Co.,Ltd. Patentee before: Zhang Bin |
|
CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210906 Address after: 510530 building 3, No. 17, Yunjun Road, Huangpu District, Guangzhou City, Guangdong Province Patentee after: Guangzhou Aosong Electronics Co.,Ltd. Address before: 510470 No. 56, Da Ma Lu, Renhe Town, Guangzhou, Guangdong Patentee before: Guangzhou Aosong Electronics Co.,Ltd. Patentee before: Zhang Bin |
|
TR01 | Transfer of patent right |