JPS61276242A - 半導体モジユ−ル - Google Patents

半導体モジユ−ル

Info

Publication number
JPS61276242A
JPS61276242A JP60117368A JP11736885A JPS61276242A JP S61276242 A JPS61276242 A JP S61276242A JP 60117368 A JP60117368 A JP 60117368A JP 11736885 A JP11736885 A JP 11736885A JP S61276242 A JPS61276242 A JP S61276242A
Authority
JP
Japan
Prior art keywords
water
humidity sensor
semiconductor
metal oxide
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60117368A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332223B2 (enExample
Inventor
Ryoichi Kajiwara
良一 梶原
Takao Funamoto
舟本 孝雄
Mitsuo Kato
光雄 加藤
Tomohiko Shida
志田 朝彦
Kyo Matsuzaka
松坂 矯
Hiroshi Wachi
和知 弘
Kazuya Takahashi
和弥 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60117368A priority Critical patent/JPS61276242A/ja
Publication of JPS61276242A publication Critical patent/JPS61276242A/ja
Publication of JPH0332223B2 publication Critical patent/JPH0332223B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/70Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
    • H10W40/77Auxiliary members characterised by their shape
    • H10W40/776Arrangements for jet impingement, e.g. for spraying
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/877Bump connectors and die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP60117368A 1985-05-30 1985-05-30 半導体モジユ−ル Granted JPS61276242A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60117368A JPS61276242A (ja) 1985-05-30 1985-05-30 半導体モジユ−ル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60117368A JPS61276242A (ja) 1985-05-30 1985-05-30 半導体モジユ−ル

Publications (2)

Publication Number Publication Date
JPS61276242A true JPS61276242A (ja) 1986-12-06
JPH0332223B2 JPH0332223B2 (enExample) 1991-05-10

Family

ID=14709929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60117368A Granted JPS61276242A (ja) 1985-05-30 1985-05-30 半導体モジユ−ル

Country Status (1)

Country Link
JP (1) JPS61276242A (enExample)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4945980A (en) * 1988-09-09 1990-08-07 Nec Corporation Cooling unit
US4975766A (en) * 1988-08-26 1990-12-04 Nec Corporation Structure for temperature detection in a package
US5014777A (en) * 1988-09-20 1991-05-14 Nec Corporation Cooling structure
US5023695A (en) * 1988-05-09 1991-06-11 Nec Corporation Flat cooling structure of integrated circuit
US5036384A (en) * 1987-12-07 1991-07-30 Nec Corporation Cooling system for IC package
JPH04240753A (ja) * 1991-01-24 1992-08-28 Nec Corp 集積回路パッケージの温度検出構造および温度センサキャリア
US5329419A (en) * 1991-10-21 1994-07-12 Nec Corporation Integrated circuit package having a cooling mechanism
US5360993A (en) * 1991-10-21 1994-11-01 Nec Corporation Cooling unit capable of speedily cooling an integrated circuit chip

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5036384A (en) * 1987-12-07 1991-07-30 Nec Corporation Cooling system for IC package
US5023695A (en) * 1988-05-09 1991-06-11 Nec Corporation Flat cooling structure of integrated circuit
US4975766A (en) * 1988-08-26 1990-12-04 Nec Corporation Structure for temperature detection in a package
US4945980A (en) * 1988-09-09 1990-08-07 Nec Corporation Cooling unit
US5014777A (en) * 1988-09-20 1991-05-14 Nec Corporation Cooling structure
JPH04240753A (ja) * 1991-01-24 1992-08-28 Nec Corp 集積回路パッケージの温度検出構造および温度センサキャリア
US5329419A (en) * 1991-10-21 1994-07-12 Nec Corporation Integrated circuit package having a cooling mechanism
US5360993A (en) * 1991-10-21 1994-11-01 Nec Corporation Cooling unit capable of speedily cooling an integrated circuit chip

Also Published As

Publication number Publication date
JPH0332223B2 (enExample) 1991-05-10

Similar Documents

Publication Publication Date Title
US5737171A (en) Switched management of thermal impedence to reduce temperature excursions
US7511957B2 (en) Methods for fabricating a cooled electronic module employing a thermally conductive return manifold structure sealed to the periphery of a surface to be cooled
CA1249063A (en) Evaporation cooling module for semiconductor devices
US4327399A (en) Heat pipe cooling arrangement for integrated circuit chips
JPS59200495A (ja) マルチチツプ・モジユ−ル
JP3287470B2 (ja) 局所湿度調節システム、電子デバイス・アセンブリ及びその製造方法
TW200301825A (en) Test systems for semiconductor devices
US11612081B2 (en) Two phase containment system having controlled air flow
JPS61276242A (ja) 半導体モジユ−ル
JP3494188B2 (ja) 集積回路素子用冷却装置
US11778791B2 (en) Two phase containment system for servers
US5323293A (en) Arrangement for placing central processors and memory in a cryo cooled chamber
EP0411119A1 (en) Semiconductor module, its cooling system and computer using the cooling system
JP4350884B2 (ja) 熱交換装置
WO2025179902A1 (zh) 除湿器、储能柜和储能装置
JPH0732217B2 (ja) 集積回路パッケージの温度検出構造
CN216484743U (zh) 一种带封装台的结露系统及露点仪
CN119447050A (zh) 半导体封装结构及集成电路封装件
CN218482229U (zh) 一种散热效果好的集成电路芯片
JPS61171157A (ja) 集積回路パツケ−ジ
JPH02184061A (ja) 集積回路パッケージの温度検出構造
JPH0325420Y2 (enExample)
JPH0145982B2 (enExample)
JP2927975B2 (ja) 集積回路パッケージの温度検出構造および温度センサキャリア
JP2613285B2 (ja) 半導体モジュールとその冷却システム及びそれを用いたコンピュータ