JPS6127235U - Semiconductor device manufacturing equipment - Google Patents
Semiconductor device manufacturing equipmentInfo
- Publication number
- JPS6127235U JPS6127235U JP10804784U JP10804784U JPS6127235U JP S6127235 U JPS6127235 U JP S6127235U JP 10804784 U JP10804784 U JP 10804784U JP 10804784 U JP10804784 U JP 10804784U JP S6127235 U JPS6127235 U JP S6127235U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- device manufacturing
- manufacturing equipment
- cap
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のサセブタとキャップとの関係を示す断面
図であり、
１・・・・・・ウエハーガイド部、２・・・・・・付着
物、３・・・・・・キャップ、４・・・・・・サセブタ
を示している。
第２図と第３図はそれぞれ本考案の実施例のサセブタと
キャップを示す断面図であり、゜これらの図において、
１３，２３・・・・・・キャップ、５，６・・・・・・
突起を示している。FIG. 1 is a cross-sectional view showing the relationship between a conventional susceptor and a cap, in which: 1... Wafer guide part, 2... Deposit, 3... Cap, 4・・・・・・It shows a sage pig. 2 and 3 are cross-sectional views showing the susceptor and cap of the embodiment of the present invention, respectively. In these figures, 13, 23... Cap, 5, 6...・
It shows a protrusion.
Claims (1)
於いて、半導体ウエハーガイドにキャップ全面が接触せ
ず、該半導体ウエハーガイドとキャップ間に空間を有す
ることを特徴とする半導体装置の製造装置。1. An apparatus for manufacturing a semiconductor device in a Phase Town type CVD or dry etching apparatus, characterized in that the entire surface of the cap does not come into contact with the semiconductor wafer guide and there is a space between the semiconductor wafer guide and the cap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10804784U JPS6127235U (en) | 1984-07-17 | 1984-07-17 | Semiconductor device manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10804784U JPS6127235U (en) | 1984-07-17 | 1984-07-17 | Semiconductor device manufacturing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6127235U true JPS6127235U (en) | 1986-02-18 |
Family
ID=30667264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10804784U Pending JPS6127235U (en) | 1984-07-17 | 1984-07-17 | Semiconductor device manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6127235U (en) |
-
1984
- 1984-07-17 JP JP10804784U patent/JPS6127235U/en active Pending
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