JPS6127179Y2 - - Google Patents

Info

Publication number
JPS6127179Y2
JPS6127179Y2 JP1981082376U JP8237681U JPS6127179Y2 JP S6127179 Y2 JPS6127179 Y2 JP S6127179Y2 JP 1981082376 U JP1981082376 U JP 1981082376U JP 8237681 U JP8237681 U JP 8237681U JP S6127179 Y2 JPS6127179 Y2 JP S6127179Y2
Authority
JP
Japan
Prior art keywords
insertion grooves
supports
semiconductor wafers
stopper
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981082376U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60103837U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8237681U priority Critical patent/JPS60103837U/ja
Publication of JPS60103837U publication Critical patent/JPS60103837U/ja
Application granted granted Critical
Publication of JPS6127179Y2 publication Critical patent/JPS6127179Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
JP8237681U 1981-06-04 1981-06-04 半導体ウエフア用カセツト Granted JPS60103837U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8237681U JPS60103837U (ja) 1981-06-04 1981-06-04 半導体ウエフア用カセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8237681U JPS60103837U (ja) 1981-06-04 1981-06-04 半導体ウエフア用カセツト

Publications (2)

Publication Number Publication Date
JPS60103837U JPS60103837U (ja) 1985-07-15
JPS6127179Y2 true JPS6127179Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-13

Family

ID=30212326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8237681U Granted JPS60103837U (ja) 1981-06-04 1981-06-04 半導体ウエフア用カセツト

Country Status (1)

Country Link
JP (1) JPS60103837U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5238906Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-04-26 1977-09-03
JPS5598822A (en) * 1979-01-24 1980-07-28 Hitachi Ltd Wafer holding jig

Also Published As

Publication number Publication date
JPS60103837U (ja) 1985-07-15

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