JPS6127175Y2 - - Google Patents

Info

Publication number
JPS6127175Y2
JPS6127175Y2 JP17024778U JP17024778U JPS6127175Y2 JP S6127175 Y2 JPS6127175 Y2 JP S6127175Y2 JP 17024778 U JP17024778 U JP 17024778U JP 17024778 U JP17024778 U JP 17024778U JP S6127175 Y2 JPS6127175 Y2 JP S6127175Y2
Authority
JP
Japan
Prior art keywords
mask
wafer
lever
motor
vertical shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17024778U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5588239U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17024778U priority Critical patent/JPS6127175Y2/ja
Publication of JPS5588239U publication Critical patent/JPS5588239U/ja
Application granted granted Critical
Publication of JPS6127175Y2 publication Critical patent/JPS6127175Y2/ja
Expired legal-status Critical Current

Links

JP17024778U 1978-12-13 1978-12-13 Expired JPS6127175Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17024778U JPS6127175Y2 (enrdf_load_html_response) 1978-12-13 1978-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17024778U JPS6127175Y2 (enrdf_load_html_response) 1978-12-13 1978-12-13

Publications (2)

Publication Number Publication Date
JPS5588239U JPS5588239U (enrdf_load_html_response) 1980-06-18
JPS6127175Y2 true JPS6127175Y2 (enrdf_load_html_response) 1986-08-13

Family

ID=29173062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17024778U Expired JPS6127175Y2 (enrdf_load_html_response) 1978-12-13 1978-12-13

Country Status (1)

Country Link
JP (1) JPS6127175Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5588239U (enrdf_load_html_response) 1980-06-18

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