JPS61270719A - 顕微鏡 - Google Patents
顕微鏡Info
- Publication number
- JPS61270719A JPS61270719A JP11353585A JP11353585A JPS61270719A JP S61270719 A JPS61270719 A JP S61270719A JP 11353585 A JP11353585 A JP 11353585A JP 11353585 A JP11353585 A JP 11353585A JP S61270719 A JPS61270719 A JP S61270719A
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- magnification
- stage
- light
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Lens Barrels (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11353585A JPS61270719A (ja) | 1985-05-27 | 1985-05-27 | 顕微鏡 |
US06/867,143 US4725720A (en) | 1985-05-27 | 1986-05-27 | Microscope with auto focus and light adjusting means |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11353585A JPS61270719A (ja) | 1985-05-27 | 1985-05-27 | 顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61270719A true JPS61270719A (ja) | 1986-12-01 |
JPH055328B2 JPH055328B2 (enrdf_load_stackoverflow) | 1993-01-22 |
Family
ID=14614783
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11353585A Granted JPS61270719A (ja) | 1985-05-27 | 1985-05-27 | 顕微鏡 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61270719A (enrdf_load_stackoverflow) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5029996A (en) * | 1987-09-17 | 1991-07-09 | Buxton Micrarium Limited | Microscope viewing arrangement |
JPH03213811A (ja) * | 1989-07-05 | 1991-09-19 | Mitsutoyo Corp | 顕微鏡及びその操作方法 |
US5648869A (en) * | 1994-08-05 | 1997-07-15 | Nikon Corporation | Microscope |
JP2002006226A (ja) * | 2000-06-19 | 2002-01-09 | Sony Corp | 検査装置 |
WO2013111662A1 (ja) * | 2012-01-24 | 2013-08-01 | 富士フイルム株式会社 | レンズ装置、駆動方法及び駆動プログラム、記録媒体、並びに撮像装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59177508A (ja) * | 1983-03-29 | 1984-10-08 | Olympus Optical Co Ltd | 自動焦点装置を備えた顕微鏡 |
JPS59182409A (ja) * | 1983-04-01 | 1984-10-17 | Hitachi Denshi Syst Service Kk | 顕微鏡自動合焦点装置 |
-
1985
- 1985-05-27 JP JP11353585A patent/JPS61270719A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59177508A (ja) * | 1983-03-29 | 1984-10-08 | Olympus Optical Co Ltd | 自動焦点装置を備えた顕微鏡 |
JPS59182409A (ja) * | 1983-04-01 | 1984-10-17 | Hitachi Denshi Syst Service Kk | 顕微鏡自動合焦点装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5029996A (en) * | 1987-09-17 | 1991-07-09 | Buxton Micrarium Limited | Microscope viewing arrangement |
JPH03213811A (ja) * | 1989-07-05 | 1991-09-19 | Mitsutoyo Corp | 顕微鏡及びその操作方法 |
US5648869A (en) * | 1994-08-05 | 1997-07-15 | Nikon Corporation | Microscope |
JP2002006226A (ja) * | 2000-06-19 | 2002-01-09 | Sony Corp | 検査装置 |
WO2013111662A1 (ja) * | 2012-01-24 | 2013-08-01 | 富士フイルム株式会社 | レンズ装置、駆動方法及び駆動プログラム、記録媒体、並びに撮像装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH055328B2 (enrdf_load_stackoverflow) | 1993-01-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4725720A (en) | Microscope with auto focus and light adjusting means | |
CN107346059B (zh) | 可变焦距成像系统 | |
JP6717692B2 (ja) | 倍率調整可能光学システムにおける可変焦点距離レンズの適応的な動作周波数の調整方法 | |
JP6839578B2 (ja) | 可変焦点距離レンズシステムにおける位相差較正 | |
US9830694B2 (en) | Multi-level image focus using a tunable lens in a machine vision inspection system | |
CN107598364A (zh) | 一种基于ccd成像的激光加工和定焦装置和方法 | |
JPS62168125A (ja) | ビジヨンシステム用の対象物照明装置 | |
CN104959730A (zh) | 旋转台式飞秒激光直写方法及装置 | |
JP7149700B2 (ja) | 高速可変焦点距離レンズを含む撮像システムにおける焦点探索範囲の拡大 | |
US4488804A (en) | Method and machine for automatic focusing in a projection system with continuously variable magnification | |
JPH10161034A (ja) | コンフォーカル顕微鏡及びコンフォーカル顕微鏡を用いた3次元画像の作成方法 | |
KR20170015369A (ko) | 평행-오프셋 유닛을 포함하는 레이저 재료 가공 장치 | |
CN111325785B (zh) | 高速tag透镜辅助3d计量和扩展景深成像 | |
JPS58181005A (ja) | 自動焦点位置合せ及び測定装置並びに方法 | |
JP2003098437A (ja) | 走査顕微鏡及び目標物を走査するための方法 | |
JPH1096848A (ja) | 自動焦点検出装置 | |
JPS61270719A (ja) | 顕微鏡 | |
JPS61270715A (ja) | 顕微鏡の載物台駆動装置 | |
JP4910382B2 (ja) | 顕微鏡 | |
JPS6266215A (ja) | 自動駆動型光学機器 | |
JP5278489B2 (ja) | 顕微鏡、顕微鏡の焦点調節制御方法 | |
US20250004263A1 (en) | Metrology system utilizing annular optical configuration | |
JPH0623578A (ja) | レーザ加工装置 | |
JP2637329B2 (ja) | 硬度測定装置 | |
KR850000015B1 (ko) | 항상 변하는 배율을 갖는 투영 시스템에 있어서 자동 촛점 조정을 하기 위한 방법 |