JPS61270719A - Microscope - Google Patents

Abstract

PURPOSE:To attain focusing highly accurately in a short period by providing a console for driving automatically a power selecting device, an automatic focusing device and a light adjusting device along a prescribed procedure on the basis of a magnifica tion selecting signal inputted and commanded prior to observation. CONSTITUTION:The microscope is provided with a driving mechanism 26 for rotating a revolver 16, the power selecting device 30 having a magnification selection control circuit 28 for automatically positioning a selected objective lens 18 to the optical axis of an expanding optical system and the automatic focusing device 36 having a slide glass moving device 34 for driving a slide glass 12 along the optical axis of the lens up to the focus position of the selected objective lens 18 by a driving mecha nism 34A on the basis of an output signal obtained from a focus detector 32 for identi fying the status of the expanded image of a body to be observed set up on an observ ing optical system. In addition, the light adjusting device 38 for adjusting the quantity of light emitted from a light source 14 and the console 40 for automatically driving the power selecting device 30, the automatic focusing device 36 and the light adjusting device 38 along the prescribed procedure on the basis of the magnification selecting signal.

Description

[Detailed description of the invention] [Industrial application field]

The present invention relates to a microscope, and more particularly to a microscope capable of automatically performing magnification selection, focusing, etc.

[Conventional technology]

Conventionally, well-known microscopes have required detailed adjustment work and skill in order to observe objects to be observed with clear images. For this reason, it is difficult to observe objects to be observed quickly and in large quantities in the industrial production process, and the emergence of a microscope that automatically performs the process from magnification selection to focusing has been awaited. Here, when automating the adjustment work of a microscope, especially when automating focusing, there is a problem in that the automatic focusing mechanism is not suitable for the microscope unless it is small and lightweight. For example, as an automatic focusing drive mechanism, the object to be observed is
! I! If a DC servo mechanism is used for the stage, it is large and requires a brake device to keep it in a stationary position, which runs counter to the need for compactness and light weight. In addition, if a structure in which the stage is driven by a stepping motor is adopted, in order to perform minute precision positioning,
The stepping motor must be connected to the drive shaft of the stage through a speed reducer, which increases the size of the device and causes problems with backlash.In addition, it generates significant heat during operation to ensure braking torque. There is a problem. Furthermore, the reduction ratio of the reduction gear must be set to 1/70 or more, and it is difficult to obtain such a reduction ratio. Further, although it is possible to complete the automatic focus adjustment of the objective lens in about a few seconds using conventionally known means, it takes a lot of time to rotate the reportr to select the objective lens as a preparatory work. In addition, if confirmation work is required to check the relationship between the objective lens and the magnification, it will be necessary to open the work for an additional 30 seconds or more. For this reason, the effectiveness of autofocus @Akane is diminished. Furthermore, when performing automatic focus adjustment of the objective lens, the time and accuracy of movement of the stage to reach the focal position of the objective lens pose problems. That is, in order to shorten the setup time of the microscope, it is desirable to move the stage at high speed, but when moving at high speed, it is difficult to keep the stage stationary at the optimal position, resulting in hunting, etc. This is particularly problematic because the movement stroke of the stage is generally relatively small in microscopes. On the other hand, if the stage is moved at a low speed, it becomes difficult to quickly set up the microscope. In addition, when automatically focusing an objective lens, the brightness of the object to be observed must be at least a certain amount due to the sensitivity characteristics of the focus detector, and this brightness varies depending on the magnification of the objective lens selected. On the other hand, unless it is possible to automatically adjust the brightness of the WlI object, the effectiveness of the automatic focus adjustment mechanism will be diminished.

[Problems to be solved by the invention]

The present invention has been made in view of the above, and automatically and quickly adjusts the focus of the stage to the selected objective lens based on the magnification setting of the objective lens, and the brightness of the object to be observed. The purpose of the present invention is to provide a microscope that can be easily set. In addition, this invention provides the following advantages: When the microscope is configured with automatic focus adjustment,
It is an object of the present invention to provide a microscope that enables selection and setting of an objective lens in a short time and quick setting. In addition, this invention provides the following advantages: When the microscope is configured with automatic focus adjustment,
To provide a microscope in which a moving device for a stage is lightweight and compact, and can be moved to 1IiNa and focused in a short time without causing hunting. A further object of the present invention is to provide a microscope that automatically switches the brightness of an object to be observed to an optimum level in accordance with the magnification selection setting of an objective lens.

[Means to solve the problem]

This invention is subject to Hw! The object includes a stage on which the body is placed, a light source for illuminating the object to be observed, and a plurality of objective lenses arranged in a reportr, and includes at least one of reflected light and transmitted light from the object to be observed. and an observation optical system including an eyepiece and for observing the image formed by the magnifying optical system: for rotating the reporter. and a magnification selection control circuit for automatically aligning the selected objective lens with the optical axis of the magnifying optical system. A focus detector faces the I-detection optical system and identifies the magnified image formation state of the object to be observed. Based on the output signal of this focus detector, the focus position of the selected objective lens is moved forward by a drive mechanism. an automatic focus adjustment device including a document table moving device that drives the document table along the lens optical axis; and a photometric adjustment device that adjusts the light emission amount of the light source based on a preset light amount setting value Two l! By providing an operation console for automatically operating the magnification selection device, the automatic focus adjustment device, and the light amount adjustment device according to a predetermined procedure based on a magnification selection signal inputted and commanded prior to inspection. This aims to achieve the above objectives. Further, the present invention moves the document table by moving a stepping motor directly connected to the document table and the position of a stable point of the static torque curve of the stepping motor step by step by minute angles. The above object is achieved by comprising an excitation switching device that changes the magnitude of each phase current of a plurality of excitation phases in steps for each input pulse to subdivide the angle. It is something. Further, in the present invention, the stepping motor has a four-phase basic structure with 1-2 phase excitation, and the excitation In switching KM is a substantially sinusoidal wave with a 90' phase shift between the first and second phases of the stepping motor. The above object is achieved by configuring the excitation fl flow to be switched stepwise to achieve a shape locus. Further, in the present invention, the magnification selection device includes a plurality of position sensors attached to the stationary side of the reportr in correspondence with the number of the plurality of objective lenses disposed on the reportr, and a plurality of position sensors attached to the rotating side of the reportr. two of the position sensors installed;
two objects to be detected simultaneously, and a rotation direction identification circuit that recognizes the current objective lens from the output signal of the position detection sensor and identifies the shortest rotation direction to the objective lens of the supported magnification. The above object is achieved by the above-mentioned configuration.

[Operation 1] In this invention, after issuing a command to select one of a plurality of objective lenses, the selected objective lens is set on the optical axis, and the selected objective lens on the stage is set. setting the focus position, and adjusting the brightness of the object to be observed.
Settings for adjustment corresponding to the selected magnification of the objective lens are automatically, quickly, and accurately performed. In addition, in this invention, the stage moving device for moving the stage to the focal position of the objective lens is directly driven by a stepping motor that directly drives the stage at finely divided step angles, so that the stage can be moved accurately and quickly. is focused on. Further, in the present invention, the stepping motor has an exciting current that flows through the first phase and the second phase of the stepping motor.
The phase is switched stepwise to obtain a nearly sinusoidal locus with a phase shift of 90°, and highly accurate step rotation can be obtained. Further, in this invention, when the magnification selection device receives the objective lens selection command signal and sets the selected objective lens, the reportr is rotated in the shortest rotation direction to select the objective lens. Reduce setup time. Embodiments Examples of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 to 3, this embodiment includes a stage 12 on which an object to be observed (not shown) is placed, a light source 14 for illuminating the object to be observed, and a reporter. 16, a magnifying optical system for receiving at least one of reflected light and transmitted light from the object to be observed and forming an enlarged image; and an eyepiece 22, the magnifying optical system A microscope 10 comprising: an observation optical system for observing an image formed by the optical system; a magnification selection device 30 comprising a magnification selection control circuit 28 for positioning the reporter; When facing the system, the said subject I12
a focus detector 32 for identifying the magnified imaging state of the object;
A stage moving device 34 is provided which drives the stage 12 along the lens optical axis by a drive mechanism 34A to the focal position of the selected objective lens 18 based on the output signal of the focus detector 32. Automatically fire all! ! ! a device 36; the light source 14 based on a preset value of light IIl;
A light intensity adjustment device that adjusts the amount of light emitted by the! ! F38 and: I! Based on the magnification selection signal inputted prior to *, the magnification selection wave @ 30, the automatic focus adjustment @ position 36 and the light 1
11! ! An operation console 40 for automatically operating @138 according to a predetermined procedure is provided. The document table moving device 34 includes a stepping motor 42 directly connected to the document table 12, and a stepping motor 42 directly connected to the document table 12.
In order to subdivide the step angle by moving the position of the stable point of the static torque curve step by step in steps of minute angles, the magnitude of each phase current of multiple excitation phases is changed step by step for each input pulse. Excitation switching device I! It consists of 44. Further, the stepping motor 42 has a 1-2 phase excitation.
It has a phase basic structure, and the excitation switching device fl! Reference numeral 44 is configured to switch the excitation mm flow stepwise so that the first and second phases of the stepping motor 42 have a substantially sinusoidal locus with a phase shift of 90 degrees. As shown in FIG.
Position sensors 46A to 460 are attached to the stationary side of the reportr 16, and 21 of the position sensors 46A to 46D are attached to the rotation side of the reportr 16, and can be simultaneously detected in accordance with the number of position sensors 46A to 460. Two detected objects 48.
50 and the current objective lens from the output signals of the position detection sensors 46A to 460. and a rotation direction specifying circuit (see FIG. 5) 28A for identifying the shortest rotation direction to the objective lens of the supported magnification. The symbol @62 in Fig. 4 is the click mechanism, and 64 is the click [1
162, the objective lens 1 is engaged with the reporter 16.
The same number of recesses as 8 and corresponding recesses are shown. Said magnification selection wave! ! The detected object 48.50 of the position detector 45 at 30 is a magnet, and the position sensor 4
6A to 46D are Hall ICs. The detected object 48.5o, which is the magnet, is mounted with the position sensors 46A to 46D'' slightly shifted from the interval.
In addition, when the click mechanism 62 is depressed into the recess 64, the two position sensors can detect both of the detected objects 48 and 50. The position of the objective lens 18 is determined by the position detector 45 using position sensors 46A to 46D, as shown in FIG.
Any two of them are performed by detecting the detected objects 48 and 50. That is, since the two position sensors detect the detected object 48 and 50, the current position can be determined by the logical product of the detected objects 48 and 50. The magnification selection control circuit 28 receives the output signal of the position detector 45 and the magnification selection command signal from the magnification setting device 82 provided on the operating vehicle 40, and also controls the reportr based on these signals. From the current position of 16,
Objective lens 1 specified by stationary magnification setting device 82
A rotational direction identification circuit 28A that outputs a signal indicating the rotational direction of the shortest distance to the position No. 8, and this rotational direction identification circuit 28A.
a memory 28B that stores the output signal of the magnification setting device 82, and a memory 28C that stores the selection setting signal from the magnification setting device 82.
and 'a stop judgment circuit 28D for comparing the output signal from the memory 28C and the output signal from the position detector 45 and outputting a stop signal when the two match, and the output of the memo 1 and 28B. It is comprised of a drive circuit 28E that drives the drive mechanism 26 in response to a signal and stops the drive mechanism 26 when a stop signal from a stop determination circuit 28D is input. Here, the magnification selection device! ! Drive mechanism 26 at 30
, the position detector 45, the focus detector 32 in the automatic focus adjustment device @36, the stage moving device M34, and the light source 14 are provided on the side of the microscope main body 10A. Further, the magnification selection device 30, the automatic focus adjustment device 36 other than the portion provided in the microscope main body 10A, and the light amount adjustment device @38 are provided in a control box 10B separate from the microscope main body 10A. ing. The microscope main body 10A further includes an X-direction motor 66 for driving the stage 12 in the X-axis direction and the Y-axis direction;
A Y-direction motor 68 and a position detector 70 for detecting the position of the stage 12 in the X and Y directions are provided. In addition to the above, the control box 10B is also provided with an XY drive device 72 for the stage 12. This xY drive system! ! 72 GE, central processing @I! ! 7
4. ! :, memory 76, the X-direction motor 66 and the Y-direction motor 66;
X-direction drive circuit 7 for driving and controlling the direction motor 68
8 and a Y-direction drive circuit 80. The drive mechanism 34A in the automatic focus adjustment device @36 is
As mentioned above, the stepping motor 42 and the dynamic magnetic switching device 44
As shown in FIG. 6, this excitation switching device 44 includes an oscillator 44A for generating a pulse signal.
and a ring counter 44B that counts the pulse train output from this oscillator 44A and creates 13-bit data that returns to zero at 256, and a ring counter 44B that outputs sin and cos values corresponding to the output signal from this ring counter 44B. The output signal from the ROM 440 and this ROM 44C is converted into a /A variation conversion excitation signal to be output to the drive circuit 44G. /A converter 44D. Further, the automatic focus adjustment device @36 includes the focus detector 32.
A video signal evaluation unit 36B receives a focus detection signal from the camera via an interface 36A, and detects the degree of deviation of this input signal from the focal position, that is, the sharpness of the image of the object to be observed. The output signal of the video signal evaluation unit 36B and the setting command signal from the magnification setting device @82 on the console 40 are sent to the interface 3.
6C and a central processing unit 36E to which a signal from a memory 36D is input and drives the excitation switching device @44 of the drive mechanism 34A. Here, a limit switch 34B is provided at the upper and lower limit positions of the stage moving device 34, and a signal is outputted by the stage 12 at the upper or lower limit position.
This signal is input to the central processing unit R36E via the interface 36G. Said central processing unit! '36E, as shown in Figure 7,
Excitation switching device 44 for the stepping motor 42
A high-speed drive command device I! that can output a high-speed feed pulse signal from an oscillator to cause the stepping motor 42 to move at high speed! 37A, and a quantitative drive command device 37B that outputs a signal to output a predetermined number of pulse signals smaller than the high-speed feed pulse signal as a unit based on the depth of focus of the objective lens 18 selected by the magnification setting device @32. When the video signal evaluation unit 36B detects from the detection output signal of the focus detector 32 that the focal depth range of the selected objective lens 18 has been approached, the high-speed drive command device 37A The signal input from the focus detector 32 via the video signal evaluation unit 36B and the selected objective object stored in advance in the memory 36D are switched to the m drive command device @37B, and for each unit pulse drive, the focus detector 32 is inputted via the video signal evaluation unit 36B. and a control circuit 37G for comparing the depth of focus of the lens 18 and repeatedly operating the quantitative drive command @@37B until the signal from the video signal evaluation unit 36B reaches within the range of the depth of focus. ing. Here, the stepping motor 42 in the drive mechanism 34A is 1-2 like a general stepping motor.
With phase excitation, each pulse rotates by 0.9 degrees, and one cycle is 8 pulses, or 7.2'', but the excitation switching device @44 divides the 7.2° into 256 equal parts to produce one pulse. Hit 0.02
It is designed to perform stepwise magnetic motion so as to advance by 8 degrees. Therefore, the pitch of the drive shaft of the stage moving device f34 is 2.
In the case of 4n, the movement amount of the stage 12 is 2.4×0.028″″/360″/0.19μ per pulse.
It is assumed that m. Here, excitation switching is performed based on signals output from the high-speed drive command device 37A and the constant drive command device 37B.
! ! The number of pulses per unit oscillated by the 44 oscillators 44A is based on the depth of focus corresponding to the magnification of the objective lens 18, which is stored in advance in the memory 36D, as shown in FIG. That is, when the depth of focus of the selected objective lens 18 is deep, the number of pulse signals per unit output based on the command from the quantitative drive command @@37F3 is large, and when it is shallow, the number of pulse signals is small. . Also, high-speed drive command system! ! The pulse signal for high-speed feeding based on the signal from F37A is 22000P/second,
sec, that is, the moving distance of the stage 12 per second is 4.18n.
/sea. As shown in FIG. 9, the relationship between the depth of focus and the number of unit pulses is such that the amount of feed of the stage 12 by the number n of pulses per unit is smaller than the depth of focus of the selected objective lens 18. It is being done. Here, the number of pulses per unit corresponding to the depth of focus and the number of pulses per unit in high-speed feed can be adjusted to increase or decrease. Further, the control circuit 37G is configured to output a command signal for a transient speed of 2500 P/sec to the excitation switching device M44 from the start to high-speed drive and when switching to constant drive after high-speed drive ends. ing. Said light I! ! Adjustment @! F38 stores the setting command signal from the light amount setting device 84 of operation $40, and also stores the setting command signal for the enlargement magnification @! A setting command signal of $182 is input via a decoder 38A, and a memory 38B is used to store the signal, and a light source lighting control device I! controls lighting of the light source 14 based on the output signal of this memory 38B. It has 1-38C. The light j114 is reflected light (i!) that illuminates the lamps 14A and 14B and the light emitted from the lamp 14A from above the object to be observed on the stage. 14C, and a transmitted light source 140 that illuminates the object to be observed on the stage 12 from below with light emitted from the lamp 14B. The memory 38B stores in advance the light amount of the lamps 14A and 14B corresponding to each magnification of the objective lens 18, and stores the light amount based on a command signal from a light amount setting device W184 provided on the console 40. Based on the selection setting signal from the magnification setting bag @8.2, which is configured to be changeable and is input via the decoder 38A, the light source outputs a light amount signal corresponding to the selected objective lens magnification. The light is output to the lighting control device If38C. This light source lighting 1111J control device l! 38C is memory 3
Lamp 14A and lamp 14 based on the signal from 8B.
The amount of B light is controlled. Here, switching between the lamps 14A and 14B, ie, switching between reflected illumination and transmitted illumination, is manually performed from outside. Next, the operation of the above embodiment will be explained. First, after setting an object to be observed on the stage 12 of the microscope fi 10, a desired magnification is selected using the magnification setting device 82 on the console 40. By the magnification setting 1 position 82, a magnification selection setting command signal is sent to the magnification selection control circuit 28, automatic focus adjustment @ position 36,
Light amount adjustment device fl! ! 38 and the XY drive device 72, respectively. Said magnification selection tiIl! The rotation direction specifying circuit 28A of the n circuit 28 compares the input selection setting command signal with the magnification of the objective lens 18 at the current position input from the position detector 45, and selects the objective lens 18 with the commanded magnification. The rotation direction with the shortest distance is selected and outputted to the drive circuit 28E via the memory 28B. On the other hand, the stop judgment circuit 28D compares the selection setting command signal from the magnification setting device 82 inputted via the memory 28G and the current position signal inputted from the position detector 45, and determines whether the two match. When this occurs, that is, when the objective lens 18 with the desired magnification coincides with the optical axis of the observation optical system, a stop signal is output to the drive circuit 28E. The drive circuit 28E rotates the drive mechanism 26 based on the rotation direction command signal input via the rotation direction specifying circuit 28A and the memory 28B until a stop signal is output from the stop determination circuit 28D. Here, the current position of the objective lens 18 is the 48th! With the click mechanism 62 shown in I falling into the recess 64, the two position sensors 46A and 46D detect the detected object 48, 50, which is a magnet, and the detected object is detected by the AND of the detection signals. Also, the reportr 16 is rotated by the drive mechanism 26, and the 2nd position corresponding to the designated position is a/2 in front of the designated position.
Two position sensors detect the detected object 48, 50, and the deviation of a/2 in this case is made to match the amount of deviation of the stop position caused by the influence of inertia, etc. Further, after the drive mechanism 26 is stopped, the position sensors 46A to 46
If the stop position is confirmed by the signal from one of the [), and only that one position sensor detects the detected object 48 or 50, the error will be detected due to the relationship with the two position sensors corresponding to the specified position. It is possible to judge and correct the direction in which the detection object occurs.In addition, since the object to be detected 48,50 consisting of two magnets is used, the width of the object to be detected can be easily adjusted. Enlargement magnification setting device fl! The selection setting command signal for the objective lens 18 from 82 is sent to the central processing unit ffi! in the automatic focus adjustment device @36. 36E via interface 36C. This central processing unit 36E calculates a constant J! for a given magnification based on information stored in the memory 36D in advance. Select the number n of driving pulses. Further, the rain amount signal obtained from the focus detector 32 is input to the video signal evaluation section 36B via the interface 36A, and the video signal evaluation section 36B converts the signal corresponding to the distance to the focal position of the stage 12 into the center. It is output to the processing device 36E. Central processing unit t! 36E outputs a drive signal to drive section 36F based on this signal. That is, a near depth of focus area set outside the depth of focus corresponding to the magnification of the selected objective lens 18 (see FIG. 8).
The control circuit 37C outputs a high-speed drive signal from the high-speed drive finger M37A to drive the drive mechanism 34A of the stage moving device 34 via the drive unit 36F.
to drive. The signal output from the drive unit 36F is sent to the oscillator 44A of the excitation switching device @44 in the drive mechanism 34A as a pulse signal for high-speed drive, that is, 22000P/
output the sea signal. When the signal from the video signal evaluation unit 36B becomes a signal indicating that the stage 10 has reached the near depth of focus region, the control circuit 37C outputs the signal to the drive unit 36F as shown in FIG. Fully equipped with high-speed driving fingers for signals! ! 37A to the quantitative drive command device 37B. As shown in FIG. 8, this quantitative drive finger @37B outputs a command signal to the oscillator 44A to output a unit pulse n corresponding to the magnification of the selected objective lens 18. Therefore, the stepping motor 42 is controlled by the quantitative drive command device 3.
Corresponding to the output from 7B, for example, when the selected magnification is 5 times, as shown in FIG. 8, pulses of unit pulse n-50 are intermittently output. This unit pulse 1) is 9.5 μm, which is smaller than the depth of focus (28 μm when the magnification is 5 times), so the feed amount of the stage 12 corresponding to this number of pulses is 9.5 μm. Depending on the pulse n, it will not go too far to the opposite side of the focused deep injection. Central processing unit! ! 36E captures the signal from the video signal evaluation section 36B for each oscillation of the unit pulse port via the quantitative drive command device 37B, and determines whether or not the stage 12 has entered the depth of focus range. Then, the above process is repeated until the depth of focus is within the range, and the stepping motor 42 is driven. Here, the automatic focus adjustment device F! 36 is the stage 12
Immediately after the objective lens 18 is selected and set from the current position by the magnification setting device M82, the objective lens 18 is
The stage 12 is driven toward the focal position of the stage 12. For example, the stage 12 is once driven to the upper limit or the lower limit, and the limit switch 34B is turned on. The stage 12 may be driven to a predetermined focus position based on the ON signal of the limit switch 34B. Here, the excitation switching device 4 of the stepping motor 42
4 steps the magnitude of each phase current of a plurality of corresponding excitation phases for each input pulse in order to subdivide the step angle by moving the stable point position of the stepping motor 42 step by step by minute angles. Since it is designed to change
A drive mechanism 34A directly connected to the stepping motor 42
This allows the stage 12 to be accurately driven minute by minute. The selection setting command signal for the objective lens 18 output by the magnification setting device W182 is transmitted to the optical 1ull adjusting device! through the decoder 38A. 38 memory 38B. This memory 38B stores in advance the amount of light corresponding to the magnification of the selected objective lens 18, and this is output to the light source lighting control device M38C to control the light source lighting II!
The F38C controls the lamp 14 based on the commanded light amount signal.
A and the light intensity of the lamp 14B are adjusted. Further, the light amount setting device 84 includes the automatic focus adjustment l!
The output signal of the central processing unit 36E in the device 36 is inputted via the interface 36C, and for example, when the signal from the video signal evaluation unit 36B indicates that the amount of light is too much or too little, the 5llllll signal of the decrease and increase of the amount of light is stored in the memory. 38B. Therefore, light i! l setting @M84 is automatic focus adjustment device 3
6 or operator adjustment, the memory 3
8B is activated to change the record. Therefore, in the above embodiment, when the magnification setting device 82 provided in the operation 11 [40 is used to select and set the magnification, the objective lens 18 is selected and set based on the command signal, and the object lens 18 is selected and set based on the command signal. The stand 12 automatically sets the object to be observed up to the focal position of the objective lens 18, and furthermore, the light amount of the light source 14 is automatically set in accordance with the set magnification. In addition, when setting the selection of the objective lens 18, the reporter 16 is rotated to the position of the objective lens selected in the shortest time from the objective lens of the magnification set before setting, and the selection setting of the objective lens 18 is made. Furthermore, the automatic focus adjustment device 36 allows the object to be observed to be moved to the focal position at high speed and accurately without causing any hunting on the stage 12. Therefore, as a whole system, the entire microscope 10 can be set efficiently and accurately in a short time. Here, the XY drive device provided in the control box 10B! Reference numeral 72 drives the stage 12 in the X and Y directions to move it to a predetermined position based on a command signal from the automatic observation setting device 86 provided on the console 40. That is, the central processing unit 74 of the XY drive device 72 compares the XY direction position signal of the stage 12 fed back from the position detector 7o based on the given command signal, and operates the XY direction drive circuit 78 and Via the Y-direction driving direction 8-0, an X-direction motor 66 consisting of a stepping motor
and drives the Y-direction motor 68. The memory 76 in the XY drive device 72 stores the magnification selection setting command signal from the enlargement magnification setting device @82 and outputs the contents to the central processing unit 74. In the above embodiment, the magnification of the objective lens 18 is selected and set by the magnification setting device 82 provided on the operation console 40.
0 is provided with an automatic observation setting 611286, and by operating this, the position of the stage in the X and Y directions and the magnification setting of the objective lens 18 can be selected fully automatically. In other words, an automatic observation setting device! ! 86 is used to set the microscope 10 fully automatically by not only setting the position of the stage 12 in the X and Y directions but also setting the enlargement magnification. Further, in the above embodiment, the position sensors 46A to 46D of the magnification selection device rI130 are the Hall ICs and the detected object 48.5.
0 are respectively constructed from magnets, but the present invention is not limited to this, and any structure that can detect the position of the objective lens 18 in the reportr 16 may be used. Further, the magnification selection control circuit 28 controls the position sensors 46A to 46A.
460 and the detected object 48 and 50, the shortest rotation direction of the objective lens 18 selected by the selection setting command signal is selected, and thereby the drive mechanism 26 Any device that can drive is fine. Further, the automatic focus adjustment device 36 includes a video signal evaluation section 3.
6B, and the signal from the focus detector 32 is evaluated by this video signal evaluation section 36B! Although the focus can be automatically detected based on the sharpness of the image, the present invention is not limited to this.
6 may be any device capable of detecting whether or not the position of the stage 12 is within the depth of focus range of the selected objective lens 18 and the range close to the depth of focus. [J! Effect of light 'J3 Since the present invention is configured as described above, it can be used for a short time.
This method has an excellent effect in that automatic settings of the microscope can be performed efficiently and accurately.

[Brief explanation of drawings]

Fig. 1 is a copper side view showing an embodiment of the microscope according to the present invention, the second factor is a front view of the same, the third factor is a block diagram showing the control circuit in the same embodiment, and Fig. 4 is the position in the same embodiment. FIG. 5 is a scale diagram showing the relationship between the output signal of the position sensor of the same position detector and the rotation angle of the reportr, and FIG. 6 is the drive mechanism of the stage moving device in the above embodiment. The block diagram shown in Figure 7 is Dotsutsu II! Block diagram showing the central processing unit in the automatic focus adjustment device of IF4, No. 8
The figure is a diagram showing the control process of the stage drive mechanism by the central processing unit of the automatic focus adjustment device in the same embodiment. 1o... Microscope, 10A... Microscope body, 12... Stage, 14... Light source, 16... Reporter, 18... Objective lens, 20... Magnifying optical system, 22. ... Eyepiece lens, 24... Observation optical cumulative total, 26... Drive mechanism, 28... Magnification selection control circuit, 30... Magnification selection@position, 32... Focus detector, 34... Stage moving device, 34A... Drive mechanism, 36... Automatic focus adjustment device, 38... Light amount adjustment device, 40... Operation console, 42... Stepping motor, 44... Excitation switching Device, 45... position M@output device, 46A to 46D... position sensor, 48.50... object to be detected, 60... rotation direction identification circuit. Agent Kei Matsuyama Ya Kantaka Theory Figure 5 Figure 6 Figure 7 Figure 8

Claims (4)

[Claims] (1) Includes a stage on which the object to be observed is placed, a light source for illuminating the object to be observed, and a plurality of objective lenses disposed in a reportr, and includes a stage for placing an object to be observed, a light source for illuminating the object to be observed, and a plurality of objective lenses disposed in a reportr, and the reflected light from the object to be observed and A microscope comprising: an enlarging optical system for receiving at least one of the transmitted light and forming an enlarged image; and an observation optical system including an eyepiece and for observing the image formed by the enlarging optical system; a magnification selection control circuit for automatically aligning the selected objective lens with the optical axis of the magnifying optical system; a focus detector for identifying the magnified imaging state of the object to be observed; based on the output signal of this focus detector, to the focal position of the selected objective lens;
an automatic focus adjustment device comprising: a stage moving device that drives the stage along the lens optical axis by a drive mechanism; and a light intensity adjustment that adjusts the amount of light emitted from the light source based on a preset light intensity setting value. an operation console for automatically operating the magnification selection device, the automatic focus adjustment device, and the light amount adjustment device according to a predetermined procedure based on a magnification selection signal input and commanded prior to observation; A microscope characterized by: (2) The object table moving device has a stepping motor directly connected to the object table, and the step angle is subdivided by moving the position of the stable point of the static torque curve of the stepping motor step by step by minute angles. 2. The microscope according to claim 1, further comprising an excitation switching device that changes stepwise the magnitude of each phase current of a plurality of excitation phases for each input pulse. (3) The stepping motor has a basic 4-phase structure with 1-2 phase excitation, and the excitation switching device has approximately s phase difference between the first and second phases of the stepping motor by 90 degrees.
3. The microscope according to claim 2, wherein the excitation current is switched stepwise to obtain an in-wave shape locus. (4) The magnification selection device includes a plurality of position sensors attached to the stationary side of the reportr in correspondence with the number of objective lenses disposed on the reportr, and a plurality of position sensors attached to the rotating side of the reportr, Two detected objects that can be simultaneously detected by two of the position sensors and the current objective lens are recognized from the output signal of the position detection sensor, and the shortest rotation direction to the objective lens of the supported magnification is specified. A microscope according to claim 1, 2, or 3, characterized in that it has a rotation direction specifying circuit.