JPS61270519A - 気体軸受の保護装置 - Google Patents

気体軸受の保護装置

Info

Publication number
JPS61270519A
JPS61270519A JP11368685A JP11368685A JPS61270519A JP S61270519 A JPS61270519 A JP S61270519A JP 11368685 A JP11368685 A JP 11368685A JP 11368685 A JP11368685 A JP 11368685A JP S61270519 A JPS61270519 A JP S61270519A
Authority
JP
Japan
Prior art keywords
gas
gas bearing
lubricating oil
bearing
protection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11368685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0242128B2 (enExample
Inventor
Teruhiro Nakamura
彰宏 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP11368685A priority Critical patent/JPS61270519A/ja
Publication of JPS61270519A publication Critical patent/JPS61270519A/ja
Publication of JPH0242128B2 publication Critical patent/JPH0242128B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP11368685A 1985-05-27 1985-05-27 気体軸受の保護装置 Granted JPS61270519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11368685A JPS61270519A (ja) 1985-05-27 1985-05-27 気体軸受の保護装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11368685A JPS61270519A (ja) 1985-05-27 1985-05-27 気体軸受の保護装置

Publications (2)

Publication Number Publication Date
JPS61270519A true JPS61270519A (ja) 1986-11-29
JPH0242128B2 JPH0242128B2 (enExample) 1990-09-20

Family

ID=14618608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11368685A Granted JPS61270519A (ja) 1985-05-27 1985-05-27 気体軸受の保護装置

Country Status (1)

Country Link
JP (1) JPS61270519A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008238144A (ja) * 2007-03-29 2008-10-09 Toray Eng Co Ltd 塗布装置及び塗布方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008238144A (ja) * 2007-03-29 2008-10-09 Toray Eng Co Ltd 塗布装置及び塗布方法

Also Published As

Publication number Publication date
JPH0242128B2 (enExample) 1990-09-20

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