JPS61270166A - Manufacture of protuberant form thermal head - Google Patents
Manufacture of protuberant form thermal headInfo
- Publication number
- JPS61270166A JPS61270166A JP60112029A JP11202985A JPS61270166A JP S61270166 A JPS61270166 A JP S61270166A JP 60112029 A JP60112029 A JP 60112029A JP 11202985 A JP11202985 A JP 11202985A JP S61270166 A JPS61270166 A JP S61270166A
- Authority
- JP
- Japan
- Prior art keywords
- parts
- layer
- film
- resist
- flexible film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
Landscapes
- Electronic Switches (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、感熱式プリンタに使用される凸形サーマル
ヘッドの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a convex thermal head used in a thermal printer.
（従来の技術）
従来、抵抗層の成膜方法に無電解めっきを用いた凸形サ
ーマルヘッドの製造方法として、可撓性フィルム上にサ
ーマルヘッドを形成し、それを凸状保持体に貼り付けて
凸形サーマルヘッドを作製する方法がある。(Conventional technology) Conventionally, as a method for manufacturing a convex thermal head using electroless plating as a method for forming a resistive layer, a thermal head is formed on a flexible film and then attached to a convex holder. There is a method of fabricating a convex thermal head.
（発明が解決しようとする問題点）
しかるに、このような方法では、可撓性フィルム上にあ
らかじめ抵抗層、配線層および保護膜を形成した後、そ
のフィルムを変形させるため、抵 ゛抗層の一部か
らなる発熱体およびその上の保Ｓ膜にマイクロクラック
などを生じやすく、信頼性を損ねる原因となっている。(Problems to be Solved by the Invention) However, in such a method, the resistance layer, the wiring layer, and the protective film are formed on the flexible film in advance, and then the film is deformed. Microcracks and the like are likely to occur in the heating element, which is a part of the heating element, and the S retaining film thereon, which impairs reliability.
（問題点を解決するための手段）
そこで、この発明では、可撓性フィルム上のめつき析出
のためのＰｄ （パラジウム）をパターン部以外レジス
トでカバーする工程まで実施した状態で、可撓性フィル
ムを凸形形状の保持体に貼り付け、その後、貼り付けた
状態で無電解めっきによる抵抗層の形成、さらには配線
層、保護膜の形成を行う。(Means for Solving the Problems) Therefore, in this invention, the process of covering Pd (palladium) for plating deposition on a flexible film with a resist other than the patterned portion is carried out, and the flexible film is The film is attached to a convex-shaped holder, and then, in the attached state, a resistance layer is formed by electroless plating, and further a wiring layer and a protective film are formed.
（作用）
このような方法によれば、可撓性フィルムを保持体に貼
り付けた後（変形させた後）、抵抗層。(Function) According to such a method, after the flexible film is attached to the holder (after being deformed), the resistance layer is formed.
配線層および保護膜の形成を行うので、発熱体および保
護膜にマイクロクラックが生じることはないＯ
（実施例）
以下この発明の一実施例を第１図を参照して説明する。Since the wiring layer and the protective film are formed, microcracks will not occur in the heating element and the protective film. (Embodiment) An embodiment of the present invention will be described below with reference to FIG. 1.
まず、第１図（ａ）に示す可撓性フィルム１上にめっき
析出に充・分な量のＰｄを付与する。次に、この可撓性
フィルムｌに対してホトリソグラフィを行い、パターン
部（配線部と発熱体部）以外のＰｄ上をレジストでカバ
ースル。First, an amount of Pd sufficient for plating precipitation is applied onto the flexible film 1 shown in FIG. 1(a). Next, photolithography is performed on this flexible film 1, and the Pd other than the pattern area (wiring area and heating element area) is covered with a resist.
しかる後、可撓性フィルムｌを第１図（ｂ）で示すよう
に凸形の保持体２に接着剤を用いて貼り付ける・
その後、無電解めっきを施す。すると、可撓性フィルム
ｌ上のＰｄの露出した部分つまシバターン部にめっき析
出が生じて、そこに第１図（ｃ）に示すように抵抗層３
が形成される。Thereafter, the flexible film 1 is attached to the convex holder 2 using an adhesive as shown in FIG. 1(b). Then, electroless plating is applied. Then, plating precipitation occurs on the exposed portion of Pd on the flexible film l, and the resistive layer 3 is deposited thereon as shown in FIG. 1(c).
is formed.
しかる後、前記抵抗層３の選択形成に用いたレジストを
除去した後、再度、Ｐｄのパターン部以外および抵抗層
３０発熱体となる部分を覆うように印刷あるいはめつき
テープのは）つけ等によシめつきレジストパターンを形
成する。そして、その上で、電気めっきを施すことによ
り、前記Ｎ１図（Ｃ）に示すように、抵抗層３上に発熱
体となる部分を除いて配線層４を形成する。After that, after removing the resist used for selectively forming the resistive layer 3, printing or applying plating tape is again applied so as to cover the part other than the Pd pattern part and the part that will become the heating element of the resistive layer 30. Form a shimmed resist pattern. Thereafter, electroplating is performed to form the wiring layer 4 on the resistance layer 3 except for the portion that will become the heating element, as shown in the above-mentioned diagram N1 (C).
しかる後、レジストを除去する。その後、前記Ｖシスト
除去によシ露出した抵抗層３の発熱体となる部分上に、
第１図（ｄ）に示すように保護膜５をスパッタなどによ
多形成する。この時、例えばマスク治具を用いることに
より、保！ｉ展５が抵抗層３の発熱体となる部分のみに
選択的に形成されるようにする。以上で凸形サーマルヘ
ッドが完成する。After that, the resist is removed. After that, on the portion of the resistance layer 3 exposed by the V cyst removal that will become the heating element,
As shown in FIG. 1(d), a protective film 5 is formed by sputtering or the like. At this time, for example, by using a mask jig, you can protect yourself! The i-extension 5 is selectively formed only in the portion of the resistance layer 3 that becomes a heating element. With the above steps, the convex thermal head is completed.
このような一実施例における各材料の具体例を以下に記
す。Specific examples of each material in such an example will be described below.
可撓性フィルム：東し製カプトンフィルム（商品名）厚
さ７５μｍ
接着剤：エポキシ系接着剤
抵抗層：無電解ＮをＰ皮膜０．３μｍ配線層：電気めっ
き皮膜（Ｎｉ ： ２ｐｍ 、 Ｃｕ ： ５ｐｍ。Flexible film: Toshi Kapton film (trade name) thickness 75 μm Adhesive: Epoxy adhesive Resistance layer: Electroless N to P film 0.3 μm Wiring layer: Electroplated film (Ni: 2 pm, Cu: 5 pm) .
Ａｕ：０，３μｍ）
保護膜： ｓｉｃ ｉｏμｍ
これよυ明らかなように、上記一実施例では、可撓性フ
ィルムＩとしてカプトンフィルムを用い、これにＰｄを
付与するが、予めＰｄを付与し九可撓性フィルム（例え
ば東レアディティ１用カプトンフィルム）を用いること
もできる。葦た、可撓性フィルム１の材質もポリイミド
の他、ポリプロピレン、ポリエチレン、ポリエステルな
どを使用可能でちゃ、Ｐｄ付与方法も、スパッタや蒸着
による方法の他、シエーリング社製アクテベータネオガ
ントプロセスなどの湿式のＰｄ付与によることも可能で
ある。また、抵抗層３の材料に関してもＮ１−Ｐの他、
Ｎ１−Ｂ、Ｎ１−Ｗ−Ｐなどの他の無電解めつ金被膜に
置き換えることができる。さらに、接着剤、配線層４．
保護膜５に関しても材料は限定されず、保持体２も金属
の他、ガラス、セラミクス。Au: 0.3 μm) Protective film: sic io μm As is clear, in the above embodiment, Kapton film is used as the flexible film I, and Pd is applied to it. A flexible film (eg Kapton film for Toray Adity 1) can also be used. In addition to polyimide, polypropylene, polyethylene, polyester, etc. can be used as the material for the reed and flexible film 1. Pd application methods include sputtering, vapor deposition, and Schering's Actevator Neogant process. It is also possible to apply wet Pd. In addition, regarding the material of the resistance layer 3, in addition to N1-P,
Other electroless plating films such as N1-B and N1-W-P can be substituted. Furthermore, adhesive, wiring layer 4.
The material for the protective film 5 is not limited either, and the holder 2 may also be made of metal, glass, or ceramics.
樹脂製などを用いることができる。また、配線層４およ
び保護Ｍ５の形成方法も他の方法とすることができる。A material made of resin or the like can be used. Further, the wiring layer 4 and the protection M5 may be formed using other methods.
（発明の効果）
以上のように、この発明の方法では、可撓性フィルムを
保持体に貼り付けた後（変形させた後）、抵抗層、配線
層および保護膜の形成を行ったので、発熱体および保護
膜に変形によるマイクロクランクが生じることはない。(Effects of the Invention) As described above, in the method of the present invention, the resistance layer, the wiring layer, and the protective film are formed after the flexible film is attached to the holder (deformed). Microcranks due to deformation do not occur in the heating element and protective film.
したがって、感熱紙との密着性に優れた凸形サーマルヘ
ッドを信頼性高く作ることができる。Therefore, a convex thermal head with excellent adhesion to thermal paper can be manufactured with high reliability.
（図面）
第１図はこの発明の凸形サーマルヘッドの製造方法の一
実施例を工程順に示す断面図である。
ｌ・・・可撓性フィルム、２・・・保持体、３・・・抵
抗層、４・・・配線層、５・・・保護膜。(Drawings) FIG. 1 is a sectional view showing an embodiment of the method for manufacturing a convex thermal head according to the present invention in the order of steps. 1... Flexible film, 2... Holder, 3... Resistance layer, 4... Wiring layer, 5... Protective film.
Claims (1)
トでカバーする工程と、 （ｂ）その後、可撓性フィルムを凸形形状の保持体に貼
り付ける工程と、 （ｃ）その貼り付けられた可撓性フイルム上のパターン
部の露出Ｐｄ上に無電解めつきにより抵抗層を形成する
工程と、 （ｄ）その抵抗層上に発熱体となる部分を除いて配線層
を形成し、さらに発熱体となる部分には保護膜を形成す
る工程とを具備してなる凸形サーマルヘッドの製造方法
。[Claims] (a) A step of covering the Pd on the flexible film with a resist except for the pattern portion; (b) Thereafter, a step of attaching the flexible film to a convex-shaped holder; ( c) Forming a resistive layer on the exposed Pd of the pattern portion on the pasted flexible film by electroless plating; (d) Wiring on the resistive layer except for the part that will become the heating element. A method for manufacturing a convex thermal head comprising the steps of forming a layer and further forming a protective film on a portion that will become a heating element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60112029A JPS61270166A (en) | 1985-05-27 | 1985-05-27 | Manufacture of protuberant form thermal head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60112029A JPS61270166A (en) | 1985-05-27 | 1985-05-27 | Manufacture of protuberant form thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61270166A true JPS61270166A (en) | 1986-11-29 |
| JPH0479308B2 JPH0479308B2 (en) | 1992-12-15 |
Family
ID=14576214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60112029A Granted JPS61270166A (en) | 1985-05-27 | 1985-05-27 | Manufacture of protuberant form thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61270166A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6268769A (en) * | 1985-09-20 | 1987-03-28 | Fuji Xerox Co Ltd | Curved surface type thermal head and manufacture thereof |
| JPH01119345U (en) * | 1988-02-08 | 1989-08-11 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5772874A (en) * | 1980-10-24 | 1982-05-07 | Mitsubishi Electric Corp | Thermal head and preparation thereof |
| JPS57185173A (en) * | 1981-05-11 | 1982-11-15 | Oki Electric Ind Co Ltd | Thermal head |
-
1985
- 1985-05-27 JP JP60112029A patent/JPS61270166A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5772874A (en) * | 1980-10-24 | 1982-05-07 | Mitsubishi Electric Corp | Thermal head and preparation thereof |
| JPS57185173A (en) * | 1981-05-11 | 1982-11-15 | Oki Electric Ind Co Ltd | Thermal head |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6268769A (en) * | 1985-09-20 | 1987-03-28 | Fuji Xerox Co Ltd | Curved surface type thermal head and manufacture thereof |
| JPH01119345U (en) * | 1988-02-08 | 1989-08-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0479308B2 (en) | 1992-12-15 |
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