JPS61267611A - Device for retaining disc member - Google Patents

Device for retaining disc member

Info

Publication number
JPS61267611A
JPS61267611A JP10598885A JP10598885A JPS61267611A JP S61267611 A JPS61267611 A JP S61267611A JP 10598885 A JP10598885 A JP 10598885A JP 10598885 A JP10598885 A JP 10598885A JP S61267611 A JPS61267611 A JP S61267611A
Authority
JP
Japan
Prior art keywords
disc
pair
shaped member
slide bases
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10598885A
Other languages
Japanese (ja)
Inventor
Tsutomu Hongo
本郷 勉
Tsunemi Fukushima
福島 常美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP10598885A priority Critical patent/JPS61267611A/en
Publication of JPS61267611A publication Critical patent/JPS61267611A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To support works different in diameter out of contact with the surface and back thereof by putting the work in an erect manner, and supporting the peripheral edge of the work at three points with V-grooved rollers which are urged by springs adapted to come up and separate from above and below in a device for retaining a magnetic disc or the like. CONSTITUTION:Cylinders 8a, 8b are contracted to separate V-grooved rollers 6a, 6b-1, 6b-2, and a disc member 2 is disposed among the V-grooved rollers 6 as shown in the drawing. Subsequently, the cylinders 8a, 8b are expanded to support the disc member among the rollers 6a, 6b by force of springs 7a, 7b. In this arrangement, even if a disc member has a different diameter, the disc member can be retained out of contact with the surface and back thereof.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、円板状の被搬送部材を1時的に保持する装置
に係シ、特に、別設の調節を要しないで径の異なる円板
状の被搬送部材を保持し得るように創作した保持装置に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a device for temporarily holding a disc-shaped member to be transported, and in particular to a device for temporarily holding a disc-shaped member to be transported, and in particular, a device for temporarily holding a disc-shaped member to be transported. This invention relates to a holding device created to hold a plate-shaped member to be transported.

〔発明の背景〕[Background of the invention]

例えば磁気ディスクの製造工程などの如く、中心孔を有
する円板状の部材をスピンドルで保持して搬送する場合
、該円板状の被搬送部材を1時的に保持しなければなら
ない場合が有る。
For example, when a disk-shaped member having a center hole is held and transported by a spindle, such as in the manufacturing process of a magnetic disk, it may be necessary to temporarily hold the disk-shaped member to be transported. .

第3図は1時的に保持する必要性の説明図である。FIG. 3 is an explanatory diagram of the necessity of temporary holding.

スピンドル(イ)iaの先端に設けた吸着手段によって
円板状部材2を保持した状態において、図示の面2rは
加工や検査が容易であるが、その反対側の面2Itは加
工や検査が困難であるため、これをスピンドルQ3)l
bによシ、仮想線で示した2′の如く保持し直さねばな
らない。
When the disc-shaped member 2 is held by the suction means provided at the tip of the spindle (A) ia, the illustrated surface 2r is easy to process and inspect, but the opposite surface 2It is difficult to process and inspect. Therefore, this is the spindle Q3)l
b, it must be held again as indicated by the phantom line 2'.

第4図は上記の保持変換操作の説明図である。FIG. 4 is an explanatory diagram of the above-mentioned holding and converting operation.

円板状部材2を保持しているスピンドル(A) l a
を矢印Cの如く前進させ、該円板状部材2を1時保持手
段3によって21位置に保持せしめた後、スピンドル(
A) l aは矢印d方向に後退させる。
Spindle (A) holding the disc-shaped member 2
is advanced in the direction of arrow C, and after holding the disc-shaped member 2 at the 21 position by the temporary holding means 3, the spindle (
A) l a is moved back in the direction of arrow d.

次いでスピンドル[F])1bを矢印eの如く前進せし
め、2′位置の円板状部材を吸着保持して矢印fの如く
後退させる。
Next, the spindle [F]) 1b is advanced as shown by the arrow e, and while the disc-shaped member at the 2' position is held by suction, it is moved back as shown by the arrow f.

こうした操作のため、円板状の被搬送物を1時的に、垂
直姿勢に保持する必要が有る。しかも、この円板状部材
を1時的に保持する手段3は、(1)円板状部材の表面
にも裏面にも触れないこと、(Ill  径を異にする
複数種類の円板状部材に対して別設の調節を要せずに適
合し得ること、が望まれる。
For such operations, it is necessary to temporarily hold the disk-shaped object in a vertical position. Moreover, the means 3 for temporarily holding the disc-shaped member requires (1) not touching the front or back surface of the disc-shaped member; It would be desirable to be able to adapt the system without requiring separate adjustments.

〔発明の目的〕[Purpose of the invention]

本発明は上述の要請に応えるべく為されたもので、円板
状の被搬送部材の表面にも裏面にも触れることなく1時
的に保持することができ、しかも該円板状部材の径が変
化しても直ちに順応することのできる保持装置を提供し
ようとするものである。
The present invention has been made in response to the above-mentioned demands, and is capable of temporarily holding a disk-shaped member to be transported without touching the front or back surface thereof, and furthermore, the present invention The purpose of the present invention is to provide a holding device that can immediately adapt to changes in the temperature.

〔発明の概要〕[Summary of the invention]

上記の目的を達成するため、本発明の円板保持装置は、
垂直に設置したガイド部材と、上記のガイド部材に案内
される上下1対のスライドベースと、上記1対のスライ
ドベースの内の上方のスライドベースに軸支した1個の
■溝ローラと、前記1対のスライドベースの内の下方の
スライドベースに軸支した2個のV溝ローラと、前記1
対のスライドベースを相互に接近せしめる方向に付勢す
るスプリング手段と、前記下方のスライドベースの上下
動をロックする手段と、前記1対のスライドベースを相
互に離間せしめる方向に駆動するシリンダ手段とを備え
、かつ、前記3個のV溝ローラはその中心軸を平行なら
しめて同一平面に沿って配設し、これら3個のV溝ロー
ラの溝底部によって前記円板状の被搬送部材を挾持し得
るように構成したことを特徴とする。
In order to achieve the above object, the disc holding device of the present invention includes:
A guide member installed vertically, a pair of upper and lower slide bases guided by the guide member, one groove roller pivotally supported on the upper slide base of the pair of slide bases, and the two V-groove rollers pivotally supported on the lower slide base of a pair of slide bases;
a spring means for biasing the pair of slide bases in a direction toward each other; a means for locking the vertical movement of the lower slide base; and a cylinder means for driving the pair of slide bases in a direction to move them apart from each other. and the three V-groove rollers are arranged along the same plane with their center axes parallel to each other, and the disk-shaped conveyed member is held between the groove bottoms of these three V-groove rollers. It is characterized by being configured so that it can be used.

〔発明の実施例〕[Embodiments of the invention]

次に1本発明の1実施例を第1図及び第2図について説
明する。
Next, one embodiment of the present invention will be described with reference to FIGS. 1 and 2.

第1図は本発明の1実施例を示す部分的断面図、第2図
は第1図のi−m断面図である。
FIG. 1 is a partial sectional view showing one embodiment of the present invention, and FIG. 2 is a sectional view taken along the line i-m in FIG.

第2図に示したx−x’は、円板状被搬送物2を保持ス
るスピンドル(本図において図示せず、第3図及び第4
図に示したla、 lb )の中心軸である。
xx′ shown in FIG. 2 is a spindle (not shown in this figure, but shown in FIGS.
This is the central axis of la, lb shown in the figure.

第1図に示した軸Y−Y’と軸Y−Y’の交点0に対し
て軸x−x’は垂直である。即ち、第1図において軸x
−x’は点Oを通シ、紙面に垂直である。
The axis x-x' is perpendicular to the intersection point 0 of the axes Y-Y' and Y-Y' shown in FIG. That is, in FIG.
-x' passes through point O and is perpendicular to the plane of the paper.

軸x−x’に対して垂直に、ガイド柱4を設置する。本
発明を実施する際、スピンドルの中心軸X−X′を水平
に設置すると共にガイド部材(本例におけるガイド柱4
)を地球に対して鉛直に設置すると好都合であるが、ス
ピンドルとガイド部材との垂直を保ったままで、これら
の部材を第1図の状態に比して回動させて設置しても良
い。本発明において、上方、下方とは、ガイド部材を地
球に対して鉛直に設置した場合の方向を表わす語である
A guide post 4 is installed perpendicular to the axis x-x'. When carrying out the present invention, the center axis X-X' of the spindle is installed horizontally, and the guide member (the guide column 4 in this example
) is conveniently installed perpendicular to the earth, but it is also possible to install the spindle and guide member by rotating them relative to the state shown in FIG. 1 while maintaining their perpendicularity. In the present invention, the terms "upward" and "downward" refer to directions when the guide member is installed perpendicularly to the earth.

前記のガイド部材4によって、上下1対のスライドベー
ス5a、5bを摺動自在に支承する。
The guide member 4 slidably supports a pair of upper and lower slide bases 5a and 5b.

上記のスライドベース5 a + 5 bには、それぞ
れローラ支承アーム5a−1,5b−1,および駆動ア
ーム5a−2,5b−2を固着しテアル。
Roller support arms 5a-1, 5b-1 and drive arms 5a-2, 5b-2 are fixed to the slide bases 5a+5b, respectively.

前記のローラ支承アーム5a−1によシv溝ローラ6a
を軸支し、ローラ支承アーム5b−1によ#)■溝ロー
ラ5b−1.同6b−2を軸支する。詳しくは、これら
3個のローラはX軸方向の軸により、Y−Z平面に揃え
て軸支する。
The V-groove roller 6a is attached to the roller support arm 5a-1.
#) grooved roller 5b-1. 6b-2 is pivotally supported. Specifically, these three rollers are supported by shafts in the X-axis direction aligned with the Y-Z plane.

前記のガイド柱4にアーム4a、4bを固着し、前記の
アーム4aとスライドベース5aとの間にスプリング7
aを圧縮介装すると共に、アーム4bとスライドベース
5bとの間にスプリング7bを圧縮介装して、双方のス
ライドベース5a、5bを相互に接近せしめる方向に付
勢する。
Arms 4a and 4b are fixed to the guide column 4, and a spring 7 is installed between the arm 4a and the slide base 5a.
A is compressed and interposed, and a spring 7b is compressed and interposed between the arm 4b and the slide base 5b to urge both slide bases 5a and 5b toward each other.

シリンダ8aはアーム5a−2を介してスライドベース
5aを上方に駆動し得る構造であり、シリンダ8bハア
ーム5b−2を介してスライドベース5bヲ下方に駆動
し得る構造である。本実施例はこのようにして1対のス
ライドベース5a、5bを相互に離間せしめる方向に駆
動するシリンダ手段を設けである。
The cylinder 8a has a structure capable of driving the slide base 5a upward via the arm 5a-2, and the cylinder 8b has a structure capable of driving the slide base 5b downward via the arm 5b-2. In this manner, the present embodiment is provided with cylinder means for driving the pair of slide bases 5a, 5b in the direction of separating them from each other.

第1図に仮想線で示し、第2図に断面を示したように、
スライドベース5bの2軸方向摺動をロックする手段を
設ける。
As shown by the imaginary line in Fig. 1 and the cross section shown in Fig. 2,
A means for locking the sliding movement of the slide base 5b in two axial directions is provided.

ブラケット9により、1対のシリンダ10a、10bを
アーム5b−1を介して対向設置する。上記1対のシリ
ンダ10a、10bそれぞれのシリンダロッドの先端に
押圧パッドlla、llbを固着し、双方のシリンII
” 10a 、 10bを伸長させると1対の抑圧パッ
ド11a。
A pair of cylinders 10a and 10b are installed facing each other by a bracket 9 via an arm 5b-1. Pressing pads lla and llb are fixed to the tips of the cylinder rods of the pair of cylinders 10a and 10b, and both cylinders II
” When 10a and 10b are extended, a pair of suppression pads 11a is formed.

11bがアーム5b−1を挟圧してその移動を制動する
ように構成する。
11b is configured to pinch the arm 5b-1 and brake its movement.

本実施例の装置によって円板状部材2を1時的に保持す
るには、シリンダf3a、 gbを収縮せしめてV溝ロ
ーラ6aを上方に、■溝ローラ5b−w、 5b−zを
下方にそれぞれ駆動しておき、円板状部材2を図示の位
置に支承し、(第1図、第2図の位置に、スピンドル(
第3図、第4図)によって支承し)、シリンダ8a、g
bを伸長させる。
In order to temporarily hold the disc-shaped member 2 with the device of this embodiment, the cylinders f3a and gb are contracted to move the V-groove roller 6a upward and the groove rollers 5b-w and 5b-z downward. The disc-shaped member 2 is supported at the position shown in the figure, and the spindle (
3, 4)), cylinders 8a, g
Stretch b.

すると、スライドベース5a、5bはそれぞれスプリン
グ7a、7bに付勢されて相互に接近し、これらのスラ
イドベースに軸支したV溝ローラ6aと同5b−1,5
b−2によって円板状部材2を挾持する。
Then, the slide bases 5a and 5b are biased by the springs 7a and 7b, respectively, and approach each other, and the V-groove rollers 6a and 5b-1 and 5b-1 and 5b, which are pivotally supported on these slide bases,
The disc-shaped member 2 is held between b-2.

上記のようにして円板状部材2を挾持すると、該円板状
部材2の径が若干変化しても3個のV*フローラa、 
6b−1,5b−2が順応して当接挾持することができ
る。この状態で1対のシリンダ10a。
When the disc-shaped member 2 is clamped as described above, even if the diameter of the disc-shaped member 2 changes slightly, three V* flora a,
6b-1 and 5b-2 can be adapted to abut and clamp. In this state, the pair of cylinders 10a.

10bを伸長させてアーム5b−1を挾持すると、スピ
ンドルによる円板状部材2の保持を解除しても、該円板
状部材2は図示の位置(第1図)に保持される。
When the arms 5b-1 are extended and the arms 5b-1 are clamped, the disc-shaped member 2 is held at the illustrated position (FIG. 1) even if the spindle releases the disc-shaped member 2 from being held by the spindle.

スピンドルによる円板状部材2の支持を持ち変えた後、
1対のシリンダ10allOb%及び、1対のシリンダ
8a、sbを収縮させると、3個のV溝ローラ6a、 
6b−1,5b−2が円板状部材2から離間して、その
保持を解除する。
After changing the support of the disc-shaped member 2 by the spindle,
When the pair of cylinders 10allOb% and the pair of cylinders 8a and sb are contracted, three V-groove rollers 6a,
6b-1 and 5b-2 are separated from the disc-shaped member 2 and release their holding.

〔発明の効果〕〔Effect of the invention〕

以上詳述したように、本発明の保持装置によれば、円板
状の被搬送部材の表面にも裏面にも触れることなく1時
的に保持することができ、しかも該円板状部材の径が変
化しても直ちに順応することができるという優れた実用
的効果を奏する。
As described in detail above, according to the holding device of the present invention, it is possible to temporarily hold a disc-shaped member to be transported without touching the front or back surface of the disc-shaped member. It has an excellent practical effect of being able to adapt immediately even if the diameter changes.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の円板状部材保持装置の1実施例を示す
部分断面図、第2図は第1図のll−1断面図である。 第3図及び第4図は円板状部材の搬送方法の説明図であ
る。 la・・・スピンドル(至)、lb・・・スピンドル[
F])、2…円板状被搬送物、3・・・1時保持手段、
4・・・ガイド柱、5a、5b・−スライドベース、5
a−1,5b−1−・−■溝ローラ支承用のアーム、 
5a−2,5b−2・・・駆動アー!、6 a、 6b
−x 、 5b−2−・・V溝ローラ、7a17b・・
・スプリング、ga、gb・・・シリンダ、9・・・ブ
ラケット、10a、10b・・・シリンダ、lla、 
llb・・・抑圧パッド。 特 許 出 願 人 日立電子エンジニアリング株式会
社代理人 弁理士 秋  本  正   実第1図 第2図 第3図
FIG. 1 is a partial cross-sectional view showing one embodiment of the disk-shaped member holding device of the present invention, and FIG. 2 is a cross-sectional view taken along line 11-1 in FIG. FIGS. 3 and 4 are explanatory diagrams of a method of transporting a disc-shaped member. la...spindle (to), lb...spindle [
F]), 2... Disc-shaped object to be transported, 3... 1 o'clock holding means,
4...Guide pillar, 5a, 5b...Slide base, 5
a-1, 5b-1-・-■ Arm for groove roller support,
5a-2, 5b-2... Drive ah! , 6a, 6b
-x, 5b-2-...V groove roller, 7a17b...
・Spring, ga, gb...Cylinder, 9...Bracket, 10a, 10b...Cylinder, lla,
llb... Suppression pad. Patent Applicant Hitachi Electronic Engineering Co., Ltd. Agent Patent Attorney Tadashi Akimoto Figure 1 Figure 2 Figure 3

Claims (1)

【特許請求の範囲】[Claims]  円板状の被搬送部材を1時的に保持する装置において
、垂直に設置したガイド部材と、上記のガイド部材に案
内される上下1対のスライドベースと、上記1対のスラ
イドベースの内の上方のスライドベースに軸支した1個
のV溝ローラと、前記1対のスライドベースの内の下方
のスライドベースに軸支した2個のV溝ローラと、前記
1対のスライドベースを相互に接近せしめる方向に付勢
するスプリング手段と、前記下方のスライドベースの上
下動をロツクする手段と、前記1対のスライドベースを
相互に離間せしめる方向に駆動するシリンダ手段とを備
え、かつ、前記3個のV溝ローラはその中心軸を平行な
らしめて同一平面に沿つて配設し、これら3個のV溝ロ
ーラの溝底部によつて前記円板状の被搬送部材を挾持し
得るように構成したことを特徴とする円板状部材の保持
装置。
A device for temporarily holding a disc-shaped member to be conveyed includes a vertically installed guide member, a pair of upper and lower slide bases guided by the guide member, and one of the pair of slide bases. One V-groove roller pivotally supported on the upper slide base, two V-groove rollers pivotally supported on the lower slide base of the pair of slide bases, and the pair of slide bases are mutually connected. a spring means for urging the slide bases toward each other; a means for locking the vertical movement of the lower slide base; and a cylinder means for driving the pair of slide bases in a direction to move them apart from each other; The three V-groove rollers are arranged along the same plane with their center axes parallel to each other, and the disc-shaped conveyed member can be held between the groove bottoms of these three V-groove rollers. A holding device for a disc-shaped member, characterized in that:
JP10598885A 1985-05-20 1985-05-20 Device for retaining disc member Pending JPS61267611A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10598885A JPS61267611A (en) 1985-05-20 1985-05-20 Device for retaining disc member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10598885A JPS61267611A (en) 1985-05-20 1985-05-20 Device for retaining disc member

Publications (1)

Publication Number Publication Date
JPS61267611A true JPS61267611A (en) 1986-11-27

Family

ID=14422108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10598885A Pending JPS61267611A (en) 1985-05-20 1985-05-20 Device for retaining disc member

Country Status (1)

Country Link
JP (1) JPS61267611A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6652216B1 (en) 1998-05-05 2003-11-25 Recif, S.A. Method and device for changing a semiconductor wafer position

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6652216B1 (en) 1998-05-05 2003-11-25 Recif, S.A. Method and device for changing a semiconductor wafer position
US7108476B2 (en) 1998-05-05 2006-09-19 Recif Technologies Sas Method and device for changing a semiconductor wafer position

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