JPS61261479A - Thin film forming device - Google Patents

Abstract

PURPOSE:To prevent the formation of the wrinkle to be generated when a film is transversely elongated by thermal expansion by forming annular grooves to both ends of a rotating roll which moves the long-sized film so that both ends of the film can be pressed to the grooves. CONSTITUTION:Both ends of the long-sized film 3 are intruded into the grooves 11, 12 formed at both ends of the rotating roll 1 by an endless belt 17 when the film 3 progresses to the position where the film faces an evaporating source 4. The tension is thereby exerted to the film 3 in addition to the tension exerted to the film in the traveling direction thereof. The expansion of the film 3 which is generated by the radiant heat from the evaporating source 4, etc., is thus offset by the above-mentioned tension and the formation of the wrinkle is prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a thin film forming apparatus for forming a thin film on a long film using sputtering, vacuum deposition, or the like.

(Prior Art) Conventionally, a thin film forming apparatus runs a long film 53 using a rotating roll 51 and an auxiliary roll 52 as shown in FIG.
Particles 55 ejected from the adhesion prevention plate 58 are made to fly through the window 57 of the adhesion prevention plate 58 to form a thin film.

(Problems to be Solved by the Present Invention) However, due to discharge generated near the evaporation source 54, radiant heat from the evaporation source 54, etc., the film 53 traveling to the window 57 is heated and expanded. Since tension is applied to the film 53 in the running direction by each roll 51, 52, there is no problem with elongation in the running direction due to expansion, but since no tension is applied to the film 53 in the width direction, A major drawback was that wrinkles appeared due to stretching.

An object of the present invention is to provide a thin film forming apparatus that can eliminate the above-mentioned drawbacks.

(Means for Solving the Problems) In order to achieve the above object, the present invention forms annular grooves along the circumferential surface at both ends of a rotating roll, and runs the roll in a position facing the evaporation source. A pressing means is provided for pressing both ends of the long film, which has been removed, into the groove.

(Action of the present invention) Since both ends of the long film are pushed into the groove by the pressing means, tension is applied in the width direction of the long film.

(Effects of the present invention) As mentioned above, since tension is applied to the long film in the width direction, wrinkles caused by stretching in the width direction due to thermal expansion are forcibly stretched out by the tension.
There are no wrinkles.

(Embodiment of the present invention) In Figure 1.2, l is a rotating roll, 2 is an auxiliary roll, 3 is a long film run by each roll 1.2, and 4 is, for example, sputtering, ion blasting, or vacuum evaporation. An evaporation source 5 is a window of an adhesion prevention plate 7 through which particles 6 ejected from the evaporation source 4 fly onto a predetermined portion of the film 3.

An annular groove 1 is provided along the circumference at both ends of the rotating roll l.
1.12 is formed, and the side surface 11a of this groove 11.12,
12a is tapered, and the peripheral surfaces 13a, 14a between the end surfaces 13, 14 of the rotary roll 1 and the grooves 11 are roughened to increase friction with the film 3.

On the other hand, as shown in FIG. 1, four rollers 18a, b, c, and d are arranged so as to surround the evaporation source 4 and the adhesion prevention plate 7, and an endless belt is placed between these rollers 18a, b, c, and d. 17
is wound. An endless belt 17 is caused to run at the same speed as the film 3 by a motor (not shown), and both ends of the film 3 are formed into grooves 11, ! by an endless belt 17 between the rollers 16a and 16b. 2 (see FIG. 2), and the surface of the endless belt 17 is roughened to increase the frictional resistance with the film 3.

Although not shown in FIG. 2, the rollers lea, b, c, and d and the endless belt 17 shown in FIG. 1 are provided symmetrically.

With the above configuration, the long film 3 and the endless belt 17 run at the same speed, and the film 3 runs at the roller 1.
When traveling to a position between f3a and f3b, both ends of the film 3 enter the groove 11.12 by the endless bell) 17, and in addition to the tension applied to the film 3 in the running direction by each roll 1.2, the film 3 is also subjected to tension in the width direction. Tension is applied to the Therefore, even if the film 3 expands due to discharge generated near the evaporation source 4 or radiant heat from the evaporation source 4, tension is applied in each direction.

The elongation in each direction due to expansion is caused by each tension. Therefore, wrinkles do not occur.

Although an endless belt is used in the above embodiment, the present invention is not limited to this, and it goes without saying that both ends of the long film may be inserted into the grooves using rollers, for example.

[Brief explanation of the drawing]

FIG. 1 is a schematic front view of an embodiment of the invention, and FIG. 2 is a schematic front view of an embodiment of the invention.
Side view of figure 1. FIG. 3 is an explanatory diagram of a conventional thin film forming apparatus. l... Rotating roll 3... Long film 4... Evaporation source 11.12... Groove 17... Endless belt

Claims (5)

[Claims] (1) In a device that creates a thin film by causing particles ejected from an evaporation source to fly onto the long film while feeding the long film with a rotating roll in a vacuum chamber,
Annular grooves are formed along the circumferential surface at both ends of the rotating roll, and pressing means are provided for pressing both ends of the long film fed to a position facing the evaporation source into the grooves. Characteristic thin film production equipment. (2) The thin film forming apparatus according to claim 1, wherein the groove has a tapered corner. (3) The thin film forming apparatus according to claim 1, wherein the peripheral surface between both end surfaces of the rotary roll and the groove is roughened. (4) The thin film forming apparatus according to claim 1, wherein the pressing means is constituted by an endless belt. (5) The thin film forming apparatus according to claim 4, wherein the surface of the endless belt is roughened.