JPH02297412A - Temperature regurating treatment method for film - Google Patents
Temperature regurating treatment method for filmInfo
- Publication number
- JPH02297412A JPH02297412A JP11897789A JP11897789A JPH02297412A JP H02297412 A JPH02297412 A JP H02297412A JP 11897789 A JP11897789 A JP 11897789A JP 11897789 A JP11897789 A JP 11897789A JP H02297412 A JPH02297412 A JP H02297412A
- Authority
- JP
- Japan
- Prior art keywords
- film
- width
- large diameter
- temperature
- free roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 229920006254 polymer film Polymers 0.000 claims description 3
- 230000037303 wrinkles Effects 0.000 abstract description 20
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 83
- 230000000694 effects Effects 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000007849 functional defect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、長尺フィルムを所要の温度に設定された円筒
状キャンの周面に接触させて走行させることによりフィ
ルムの加熱または冷却を連続的に行なうフィルムの温度
処理方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention provides continuous heating or cooling of a long film by running the film in contact with the circumferential surface of a cylindrical can set at a required temperature. The present invention relates to a method for temperature treatment of a film.
従来の技術
広幅長尺の高分子フィルムへ薄膜を形成して、コンデン
サや磁気記録テープ、透明導電性シート等の素材となる
機能性フィルムやまたは装飾用フィルムを作成するには
、例えば、薄膜ハンドブック（日本学術振興会、薄膜第
１３１委員会編、３編、４２、オーム社刊）に示されて
いるような巻取り式蒸着装置が用いられる。Conventional Techniques To create functional films or decorative films that can be used as materials for capacitors, magnetic recording tapes, transparent conductive sheets, etc. by forming thin films on wide and long polymer films, for example, the Thin Film Handbook is used. (Japan Society for the Promotion of Science, 131st Committee on Thin Films, ed. 3, 42, published by Ohmsha) is used.
その概要を第４図において説明する。この第４図は主要
部のみを示し、構造物を収納する真空チャンバ、中間ロ
ーラ等は省略しである。第４図において、広幅長尺の高
分子フィルム１（以後、フィルムと呼ぶ）は、供給ロー
ラ２から巻出されて、矢印１６の方向に回転す仝円筒状
キャン３に、フリーローラ４．５によって所要巻付は角
度θだけ巻き付けられ、キャン３にて駆動されて走行し
、巻取りローラ６に巻取られる。一方、るつぼ８に収容
された蒸着材料７は、公知の電子ビーム９等により加熱
されて蒸発し、その蒸気の一部はマスク１０の開口部を
通ってキャン３に巻き付けられたフィルム１に付着し、
薄膜を形成する。The outline will be explained in FIG. 4. This FIG. 4 shows only the main parts, and the vacuum chamber housing the structure, intermediate rollers, etc. are omitted. In FIG. 4, a wide and long polymer film 1 (hereinafter referred to as a film) is unwound from a supply roller 2, and is transferred to a cylindrical can 3 rotating in the direction of an arrow 16 by a free roller 4.5. Accordingly, the required winding angle is θ, the winding is driven by the can 3, travels, and is wound around the winding roller 6. On the other hand, the vapor deposition material 7 housed in the crucible 8 is heated and evaporated by a known electron beam 9 or the like, and a part of the vapor passes through the opening of the mask 10 and adheres to the film 1 wrapped around the can 3. death,
Forms a thin film.
以上の構成において、フィルム１の長手方向の張力は図
には示してないが、供給ローラ２と巻取りローラ６に取
り付けられたモータにより、公知の電流制御法などによ
り所望の値に制御されている。キャン３は公知の例えば
、熱媒体の循環による温度制御により所要の温度に制御
されている。In the above configuration, although the tension in the longitudinal direction of the film 1 is not shown in the figure, it is controlled to a desired value by the motors attached to the supply roller 2 and the take-up roller 6 using a known current control method or the like. There is. The temperature of the can 3 is controlled to a required temperature by known temperature control, for example, by circulating a heat medium.
この構成で、例えば、Ｃｏ−Ｃｒから成る垂直磁気記録
媒体をポリイミドフィルム１上に形成する場合、媒体を
垂直配向させるためにはフィルム１を加熱する必要があ
る。さらに、フィルム１中の水分などのガスを出させ、
磁気媒体の特性及びフィルム１との付着力を十分なもの
とするためにも、フィルム１を加熱する必要がある。こ
の方法として、加熱されたキャン３の周面に十分巻き付
けて接触して駆動させ走行させる方法が取られている。With this configuration, for example, when a perpendicular magnetic recording medium made of Co--Cr is formed on the polyimide film 1, it is necessary to heat the film 1 in order to orient the medium vertically. Furthermore, gas such as moisture in the film 1 is released,
It is also necessary to heat the film 1 in order to obtain sufficient properties of the magnetic medium and adhesion to the film 1. As a method for this, a method is used in which the can 3 is sufficiently wrapped around the circumferential surface of the heated can 3 and brought into contact with the can 3 to be driven and run.
また、金属膜からなる磁気記録媒体のような導電性の薄
膜を形成する場合は、蒸着時にフィルム１の受けた熱を
効率よくキャン３に逃すために、ブイシム１上に形成し
た薄膜に接触したフリーローラ５とキャン３との間に直
流電源１５により電位差を設け、薄膜とキャン３との間
に曇く静電引力で、フィルム１をキャン３に強く張り付
かせる方法が取られている。In addition, when forming a conductive thin film such as a magnetic recording medium made of a metal film, in order to efficiently release the heat received by the film 1 to the can 3 during vapor deposition, it is necessary to A method is used in which a potential difference is created between the free roller 5 and the can 3 by a DC power supply 15, and the film 1 is strongly stuck to the can 3 by the electrostatic attraction that is generated between the thin film and the can 3.
発明が解決しようとする課題
以上の従来例において、キャン上で加熱され蒸着膜を形
成されたフィルムがキャンからはなれる際、キャンと次
段のフリーローラとの間でフィルムに長手方向のしわが
生じ、このしわが残るという問題が生じていた。これは
、冷却膨張型のフィルムの場合は、キャン上で冷却され
ることによって長手方向のしわが生じる。Problems to be Solved by the Invention In the conventional examples described above, when the film that has been heated on the can to form a vapor deposition film is separated from the can, wrinkles occur in the longitudinal direction of the film between the can and the next free roller. A problem has arisen in that these wrinkles remain. In the case of a cooling expansion type film, wrinkles occur in the longitudinal direction as the film is cooled on the can.
ここで上記のしわの発生について第５図（ａ）、（ｂ）
を用いて説明する。キャン３上で加熱され蒸着膜を形成
されたフィルム１は円筒状のキャン３から離れ、キャン
３に近接して設置されキャン３より低温の次段のフリー
ローラ５を経て、図中の矢印１ｅの方向に走行する。フ
ィルム１に温度変化による伸縮がない場合には、第５図
（ａ）に示すように、フィルム１が、キャン３から離れ
てフリーローラ５に沿い走行しても、その幅ｄには変化
がない。しかし、熱作用により伸びを伴うフィルムの場
合には、第５図（ｂ）に示すようなしわ１３が、フィル
ム１にキャン３の離れぎわから生じる。これは、キャン
３上で加熱され蒸着膜を形成された（膜形成部分を製膜
部１８、非製膜部分を以後マージン部１７と呼ぶ）フィ
ルム１の幅すが前記幅ｄより大となった後、キャン３か
ら離れたことと、次段のフリーローラ５に接触したこと
で急激に冷却され、フィルム１が元の幅ｄに急激に縮む
ために起こるものである。このしわ１３が生じたままフ
ィルム１及びその上に形成された蒸着膜は冷却されるの
で、このしわ１３がフィルム１上に残ることとなる。Here, regarding the occurrence of the above wrinkles, see Figures 5(a) and (b).
Explain using. The film 1 that has been heated on the can 3 to form a vapor deposited film is separated from the cylindrical can 3, passes through the next free roller 5, which is installed close to the can 3, and has a lower temperature than the can 3, and passes through the arrow 1e in the figure. Drive in the direction of. If the film 1 does not expand or contract due to temperature changes, as shown in FIG. 5(a), even if the film 1 leaves the can 3 and runs along the free roller 5, its width d will not change. do not have. However, in the case of a film that stretches due to the action of heat, wrinkles 13 as shown in FIG. 5(b) occur on the film 1 from the separation of the cans 3. This is because the width of the film 1 that has been heated on the can 3 to form a vapor deposited film (the film forming part is referred to as the film forming part 18 and the non-film forming part is hereinafter referred to as the margin part 17) is larger than the width d. This occurs because the film 1 is rapidly cooled down after it leaves the can 3 and comes into contact with the next free roller 5, and the film 1 rapidly shrinks to its original width d. Since the film 1 and the deposited film formed thereon are cooled while the wrinkles 13 remain, the wrinkles 13 remain on the film 1.
このようなしわは、製品の外観を劣化させるばかりでな
く、磁気記録テープの場合には、テープとヘッドが良好
に密着しなくなるので、正常な記録ができなくなるとい
う重大な機能上の欠陥を生じさせるとともに、著しい歩
留りの低下を引き起こすものであった。Such wrinkles not only deteriorate the appearance of the product, but also cause serious functional defects in the case of magnetic recording tapes, such as the inability to properly record because the tape and head do not adhere well. This also caused a significant decrease in yield.
そこで、本発明は、上記の点に鑑み、キャン上のフィル
ムにしわを発生させることなく安定に加熱または冷却で
きるフィルムの温度処理方法を提供するものである。In view of the above-mentioned problems, the present invention provides a method for temperature-treating a film that can be stably heated or cooled without causing wrinkles in the film on the can.
課題を解決するための手段
本発明は、熱作用により伸びを伴う性質を有する長尺フ
ィルムを、所要の温度に設定された円筒状キャンの周面
に接触させて走行させる際に、前記フィルムの幅を前記
キャン」二のフィルムの幅と略等しく保ちながらキャン
から離すことを特徴とするものである。Means for Solving the Problems The present invention provides for a long film having the property of elongation due to the action of heat, when running the film in contact with the circumferential surface of a cylindrical can set at a required temperature. The film is separated from the can while keeping its width substantially equal to the width of the second film in the can.
作 用
本発明によれば、所要の温度に設定された円筒状キャン
から離れるフィルムの幅を、前記キャン上のフィルムの
幅と略等しく保ちながら、前記キャンから離すことで、
キャンの離れぎわて生じるフィルムのしわを防止するこ
とができる。According to the present invention, by separating the film from the cylindrical can set at a required temperature while keeping the width of the film substantially equal to the width of the film on the can,
Wrinkling of the film caused by separation of the can can be prevented.
即ち、前述のように、しわの発生原因は、キャンからは
なれた後の、急激な温度変化によるフィルムの幅の変化
であり、このしわが生じたまま蒸着膜が冷却されるので
、フィルムにしわが残るわけである。したがって、フィ
ルム上の蒸着膜が冷却される間、フィルムにしわが生じ
ないようフィルムに幅方向に張力を生じさせておくこと
で、このしわを防止することができる。That is, as mentioned above, the cause of wrinkles is the change in the width of the film due to a sudden temperature change after it has been separated from the can, and as the deposited film is cooled with these wrinkles still formed, the film becomes wrinkled. It remains. Therefore, while the vapor deposited film on the film is being cooled, the wrinkles can be prevented by creating tension in the width direction of the film so that the film does not wrinkle.
実施例
以下、本発明の第１実施例を第１図（ａ） （ｂ）を
用いて説明する。第１図（ａ）は、本実施例におけるフ
ィルムの湿度処理方法の主要工程部の斜視図、第１図（
ｂ）はそのフリーローラの側面図である。従来例と同一
の構成要素は、同一番号にて説明する。EXAMPLE A first example of the present invention will be described below with reference to FIGS. 1(a) and 1(b). FIG. 1(a) is a perspective view of the main process parts of the film humidity treatment method in this example, and FIG.
b) is a side view of the free roller. Components that are the same as those in the conventional example will be described using the same numbers.
製膜されたフィルム１（この時幅ｂ）は、所定の温度に
設定されたキャン３の周面に沿い矢印１６の方向に駆動
され走行する。フリーローラ５はその両端をアーム２１
にて支持され、スプリング２２によりキャン３に押圧さ
れており、このフリーローラ５の両端部に部分的に設け
られた大径部２０が、フィルム１の少なくともその幅方
向の両端部に設けられた蒸着膜の形成されないマージン
部１７をキャン３に押圧している。The formed film 1 (width b at this time) is driven and travels in the direction of an arrow 16 along the circumferential surface of the can 3 set at a predetermined temperature. The free roller 5 has both ends connected to the arm 21.
The film 1 is supported by a spring 22 and is pressed against the can 3 by a spring 22. Large diameter portions 20 are partially provided at both ends of the free roller 5. The margin portion 17 where the vapor deposited film is not formed is pressed against the can 3.
フィルム１は大径部２０とキャン３にその両側のマージ
ン部１７を挟まれつつキャン３から離れる。この時大径
部２０は両端のマージン部１７を保持されているため、
幅がｂから縮もうとしても縮めず、幅方向に張力を持つ
ことになる。したがって、この張力によりしわは生じな
い。The film 1 leaves the can 3 with the margin parts 17 on both sides thereof being sandwiched between the large diameter part 20 and the can 3. At this time, the large diameter portion 20 retains the margin portions 17 at both ends, so
Even if the width tries to shrink from b, it will not shrink and will have tension in the width direction. Therefore, this tension does not cause wrinkles.
しかし、キャン３からフィルム１が離れてからは、この
張力はフィルム１と大径部２０との摩擦力だけで保持さ
れているので、との摩擦力を大きくするために、なるだ
けフィルム１との摩擦係数が大きくなるようにしたほう
がよい。これには、大径部２０の表面に適度の凹凸を設
けることもを効である。また、キャン３やフリーローラ
５の心振れや、傷、ゴミ等が幾分ある場合でも、フィル
ム１をキャン３とで十分に挟み込むためにも、大径部２
０には、適度に弾性のあるもののほうが好ましい。However, after the film 1 is separated from the can 3, this tension is maintained only by the frictional force between the film 1 and the large diameter portion 20. It is better to increase the coefficient of friction. Providing appropriate unevenness on the surface of the large diameter portion 20 is also effective for this purpose. In addition, in order to sufficiently sandwich the film 1 between the can 3 and the can 3 even if the can 3 or the free roller 5 has some runout, scratches, dust, etc., the large diameter portion 2 is
0 is preferably one with moderate elasticity.
本実施例では、第１図（ｂ）に示すように、これらの条
件を満たすポリイミドの粘着テープを、フリーローラ５
の回転方向１６と同方向に所定の厚みに段差が生じない
ように、数回巻き付けることで大径部２０を構成し、こ
れにより十分な効果を得た。また図のように巻くと、粘
着テープでなくとも同様効果が得られる。In this example, as shown in FIG.
The large-diameter portion 20 was constructed by winding the material several times to a predetermined thickness in the same direction as the rotational direction 16, thereby obtaining a sufficient effect. Also, if you wrap it as shown in the diagram, you can get the same effect even if you are not using adhesive tape.
尚、本実施例では、フリーローラ５に大径部２０を設け
た＋１４造となっているが、第２図（ａ）に示すように
、大径部２０をキャン３側に設けても同様の効果が得ら
れる。In this embodiment, the free roller 5 is of +14 construction with the large diameter portion 20 provided, but the same effect can be achieved even if the large diameter portion 20 is provided on the can 3 side as shown in Fig. 2(a). The effect of this can be obtained.
又、第２図（ｂ）に示すように、キャン３のフリーロー
ラ５の大径部２０に対応する箇所に溝２３を設け、この
溝２３の底面にテープなどからなる前記大径部２０を押
圧するように構成すると、より確実にフィルム１の幅を
保持でき、より十分な効果が得られる。尚、逆にキャン
３に大径部２０、フリーローラ５に溝２３を設ける構成
にしてもよい。Further, as shown in FIG. 2(b), a groove 23 is provided at a location corresponding to the large diameter portion 20 of the free roller 5 of the can 3, and the large diameter portion 20 made of tape or the like is attached to the bottom surface of this groove 23. When configured to press, the width of the film 1 can be maintained more reliably, and a more sufficient effect can be obtained. Alternatively, the large diameter portion 20 may be provided on the can 3 and the groove 23 may be provided on the free roller 5.
次に、本発明の第２実施例を第３図を用いて説明する。Next, a second embodiment of the present invention will be described using FIG. 3.
上記第１実施例と同様に、従来例と同一の構成要素は、
同一番号にて説明する。Similar to the first embodiment, the same components as the conventional example are:
The same numbers will be used for explanation.
」二記第１実施例と異なるところは、フリーローラ５の
両端部に大径部２０の代わりに、フィルム１のマージン
部１７を突き刺すピン１１を設けたことである。2. The difference from the first embodiment is that pins 11 that pierce the margin section 17 of the film 1 are provided at both ends of the free roller 5 instead of the large diameter section 20.
第３図は本実施例の主要部の斜視図である。製膜された
フィルム１（この時幅ｂ）は、所定の温度に設定された
キャン３の周面に沿い矢印１６の方向に駆動され走行す
る。そしてフィルム１は、その両端のマージン部１７に
、フリーローラ５に設けられている複数のピン１１を突
き刺されなからキャン３から離れ、その後フリーローラ
５に沿いながらピン１１がフィルム１（この時までフィ
ルムの幅はｂ）から抜け、フィルムの幅はｄ（ｂより小
さい）となり矢印１６の方向に走行する。FIG. 3 is a perspective view of the main parts of this embodiment. The formed film 1 (width b at this time) is driven and travels in the direction of an arrow 16 along the circumferential surface of the can 3 set at a predetermined temperature. Then, the film 1 leaves the can 3 without being pierced by the plurality of pins 11 provided on the free roller 5 in the margin portions 17 at both ends thereof, and then, while following the free roller 5, the pins 11 move the film 1 (at this time Until then, the width of the film goes away from b), and the width of the film becomes d (smaller than b) and runs in the direction of arrow 16.
図に示すようキャン３には、フリーローラ５のピ° ン
１１を収容する溝１２が、ピン１１に対応する位置に設
けられている。As shown in the figure, a groove 12 for accommodating the pin 11 of the free roller 5 is provided in the can 3 at a position corresponding to the pin 11 .
キャン３から離れる前から、ピン１１をフィルム１の両
側のマージン部１７に刺すことにより、フィルム１の幅
はｂに保持されることとなる。その後、フィルム１がキ
ャン３から離れフリーローラ５に沿い冷却されても、ピ
ン１１がフィルム１から抜けるまで、フィルムの幅はｂ
のままで変化しない。したがって、上述のしわが発生す
ることはない。By pricking the pins 11 into the margin portions 17 on both sides of the film 1 before it is separated from the can 3, the width of the film 1 is maintained at b. After that, even if the film 1 is separated from the can 3 and cooled along the free roller 5, the width of the film remains b until the pin 11 comes out of the film 1.
It remains unchanged. Therefore, the wrinkles described above do not occur.
また、フィルム１のマージン部１７には、ピン１１′の
刺された跡１９が残るが、ピン１１の跡は小さくまたマ
ージン部自体製品とならない部分で、後に切り取られる
ので支障はない。In addition, a mark 19 from the pin 11' remains on the margin part 17 of the film 1, but the mark 19 from the pin 11 is small and does not pose a problem because the margin part itself is not part of the product and will be cut off later.
尚、図中に示すキャン３とフリーローラ５の隙間ε、ピ
ン１１の高さり、フィルム１の厚さｔは、本実施例の場
合ε＝０．５ｍｍ１ ｈ＝２ｍｍｔ ｔ＝１０μｍと
した。しかし、フィルム１が、キャン３からはなれる前
あるいは遅くともフリーローラ５に接触する前に、ピン
１１がフィルム１に刺されば、この値にこだわる必要が
ないのは、いうまでもない。In this example, the gap ε between the can 3 and the free roller 5, the height of the pin 11, and the thickness t of the film 1 shown in the figure were set to ε=0.5 mm, h=2 mm, and t=10 μm. However, it goes without saying that if the pin 11 is inserted into the film 1 before it leaves the can 3 or at the latest before it comes into contact with the free roller 5, there is no need to be particular about this value.
発明の効果
本発明によれば、所要の温度に設定された円筒状キャン
からはなれるフィルムの幅を、前記キャン上のフィルム
の幅と略等しく保ちながら、前記キャンから離すことで
、キャンの離れぎわで生じるフィルムのしわの発生を防
止することができる。Effects of the Invention According to the present invention, the width of the film that can be removed from a cylindrical can set at a required temperature is kept approximately equal to the width of the film on the can, and the can is separated from the can. It is possible to prevent wrinkles in the film that occur at the edges.
従って、長尺にわたってしわの生じない安定なフィルム
の温度処理を連続的に行なうことが可能となり、著しい
歩留りの向上を実現できるものである。Therefore, it is possible to continuously perform temperature treatment on a stable film without wrinkles over a long length, and a significant improvement in yield can be realized.
第１図（ａ）は本発明の第１実施例におけるフィルムの
湿度処理方法の主要工程部の斜視図、第１図（ｂ）は同
工程部におけるフリーローラの側面図、第２図（ａ）（
ｂ）は各々同実施例の変形例における主要工程部の正面
図、第３図は本発明の第２実施例におけるフィルム湿度
処理方法の主要工程部の斜視図、第４図は従来例におけ
る真空蒸着装置の内部構造を示す概略構成図、第５図（
ａ）（ｂ）は従来例におけるしわ発生の説明図である。
１１１．フィルム、 ３．、、キャン、５．、、フリー
ローラ、 １１．、、ピン、 ２０ 、、、大径部、２
１ 、、、レバー、２２ 、、、スプリング、 ２３．
、、溝。
代理人の氏名 弁理士 粟野重孝 はか１名１／−一−
ピン
第３図
第４区・FIG. 1(a) is a perspective view of the main process section of the film humidity treatment method in the first embodiment of the present invention, FIG. 1(b) is a side view of the free roller in the same process section, and FIG. )(
b) is a front view of the main process section in a modified example of the same embodiment, FIG. 3 is a perspective view of the main process section of the film humidity treatment method in the second embodiment of the present invention, and FIG. 4 is a vacuum diagram in the conventional example. A schematic configuration diagram showing the internal structure of the vapor deposition apparatus, Figure 5 (
a) and (b) are explanatory diagrams of the occurrence of wrinkles in the conventional example. 111. Film, 3. ,,Can,5. ,,free roller,11. ,,Pin, 20 ,,Large diameter part, 2
1. Lever, 22. Spring, 23.
,,groove. Name of agent: Patent attorney Shigetaka Awano Haka 1 person 1/-1-
Pin Figure 3 District 4
Claims (5)
ムを、所要の温度に設定された円筒状キャンの周面に接
触させて走行させる際に、前記フィルムをその幅が前記
キャン上のフィルムの幅と略等しくなるように保ちなが
らキャンから離すことを特徴とするフィルムの温度処理
方法。(1) When a long film, which has the property of elongating due to thermal action, is run in contact with the circumferential surface of a cylindrical can set at a required temperature, the width of the film is the same as that of the film on the can. A film temperature treatment method characterized by separating the film from the can while keeping the width approximately equal to the width of the can.
て前記キャンに押圧してフィルムの幅を保つことを特徴
とする請求項１記載のフィルムの温度処理方法。(2) The method for temperature treatment of a film according to claim 1, characterized in that the width of the film is maintained by pressing at least both ends of the film in the width direction against the can with rollers.
フィルムの幅方向の両端部を押圧することを特徴とする
請求項２記載のフィルムの温度処理方法。(3) The method for temperature treatment of a film according to claim 2, characterized in that both ends of the film in the width direction are pressed by a heat-resistant polymer film wound around a roller.
部と、他方に設けた突条部によりフィルムの幅方向の両
端部を押圧することを特徴とする請求項２記載のフィル
ムの温度処理方法。(4) The method for temperature treatment of a film according to claim 2, characterized in that both ends of the film in the width direction are pressed by a groove provided on one of the can or the roller and a protrusion provided on the other.
に設けた複数のピンを刺してフィルムの幅を保つことを
特徴とする請求項１記載のフィルムの温度処理方法。(5) The temperature treatment method for a film according to claim 1, characterized in that the width of the film is maintained by pricking at least both ends of the film in the width direction with a plurality of pins provided on a roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1118977A JPH082536B2 (en) | 1989-05-12 | 1989-05-12 | Film temperature treatment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1118977A JPH082536B2 (en) | 1989-05-12 | 1989-05-12 | Film temperature treatment method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02297412A true JPH02297412A (en) | 1990-12-07 |
| JPH082536B2 JPH082536B2 (en) | 1996-01-17 |
Family
ID=14749965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1118977A Expired - Fee Related JPH082536B2 (en) | 1989-05-12 | 1989-05-12 | Film temperature treatment method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH082536B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008139834A1 (en) * | 2007-05-14 | 2008-11-20 | Ulvac, Inc. | Film conveying device and winding-type vacuum film-forming method |
| EP2085496A1 (en) * | 2008-01-31 | 2009-08-05 | FUJIFILM Corporation | Method for producing functional film |
| CN102978580A (en) * | 2012-10-30 | 2013-03-20 | 无锡鸿声铝业有限公司 | Control mechanism for main roller of vacuum aluminizing machine |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60104313A (en) * | 1983-10-04 | 1985-06-08 | Toray Ind Inc | Stretching method of film |
| JPS61121922A (en) * | 1984-11-19 | 1986-06-09 | Mitsubishi Heavy Ind Ltd | Film forming device |
| JPS61261479A (en) * | 1985-05-13 | 1986-11-19 | Anelva Corp | Thin film forming device |
-
1989
- 1989-05-12 JP JP1118977A patent/JPH082536B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60104313A (en) * | 1983-10-04 | 1985-06-08 | Toray Ind Inc | Stretching method of film |
| JPS61121922A (en) * | 1984-11-19 | 1986-06-09 | Mitsubishi Heavy Ind Ltd | Film forming device |
| JPS61261479A (en) * | 1985-05-13 | 1986-11-19 | Anelva Corp | Thin film forming device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008139834A1 (en) * | 2007-05-14 | 2008-11-20 | Ulvac, Inc. | Film conveying device and winding-type vacuum film-forming method |
| JP5024972B2 (en) * | 2007-05-14 | 2012-09-12 | 株式会社アルバック | Film conveying apparatus and winding type vacuum film forming method |
| EP2085496A1 (en) * | 2008-01-31 | 2009-08-05 | FUJIFILM Corporation | Method for producing functional film |
| US8133533B2 (en) | 2008-01-31 | 2012-03-13 | Fujifilm Corporation | Method for producing functional film |
| CN102978580A (en) * | 2012-10-30 | 2013-03-20 | 无锡鸿声铝业有限公司 | Control mechanism for main roller of vacuum aluminizing machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH082536B2 (en) | 1996-01-17 |
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