JPH0326377A - Production of thin film - Google Patents

Abstract

PURPOSE:To prevent the wrinkling of a polymer substrate due to sudden thermal deformation by pressing both edges of the substrate against a heating roll at the outlet side of the roll when a thin layer is formed on the substrate and the substrate is travelled along the heating roll to produce a thin film. CONSTITUTION:When decorative packing paper obtd. by forming an Al layer on a polymer substrate, e.g. by vacuum deposition is annealed in an atmosphere having an oxygen content equal to or higher than that of the air, a nip roll 7 for pressing only both edges of a film against a heating roll 5 is used at the outlet side of the roll 5. Since the slipping of the substrate from the roll 5 is prevented, the substrate is held without reducing the mobility at the inlet side of the roll 5 and the tension of the substrate at the outlet side of the roll 5 is increased, so the wrinkling of the substrate at the outlet side of the roll 5 is prevented.

Description

[Detailed description of the invention] Industrial applications The present invention relates to a method of manufacturing a thin film.

Conventional Technology Thin film technology plays a wide variety of roles in modern society. Thin film substrate materials can be classified into flexible substrates such as polymer films and non-flexible substrates such as glass plates based on their mechanical properties, and thin film manufacturing methods that match the mechanical properties of the substrates are used. When using a flexible substrate such as a polymer film, a continuous winding method can be used as a mass production method for thin films. After forming a thin film on a substrate using a plating method, sputtering method, vacuum evaporation method, etc., it is wound onto a take-up roll.This method is considered suitable for mass production.The thin film formed in this way is used for decorative packaging. It is used in a wide range of fields including industrial films and magnetic recording media.

In the thin film form or method, the internal stress relaxation and
A heat treatment called annealing is sometimes performed to improve surface hardness. This process Ui2 can be achieved by using a winding and running system to run the polymer substrate on which the thin film has been formed along a temperature rising roller in the atmosphere, for example.

Problem to be Solved by the Invention However, when the substrate is thin, wrinkles tend to form due to thermal deformation of the substrate by the heating roller. To prevent wrinkles on the entry side of the heating roller, the substrate tension on the entry side of the heating roller should be relatively low to increase the mobility of the film on the roller during forming. is valid. However, if the tension at the exit side of the heating roller is low, the way the film is peeled off from the roller will not be uniform in the film width direction, so wrinkles as shown in Figure 4 will easily appear. In order to prevent wrinkles, it is effective to make the tension relatively high on the exit side of the heating roller. (If the film tension on both sides of the roller is different, slipping will occur between the roller and the film, causing the tension on the roller entry side.・It is difficult to maintain the tension difference on the exit side, and at the same time, sliding scratches may occur on the film, so L1 is preferable.Also, in order to prevent slippage between the roller and the film, for example, in the case of a metal thin film, voltage is applied between the film and the roller. When electrostatic attraction is generated by applying an electrostatic force, the mobility of the film on the roller entry side decreases and wrinkles are likely to occur. purpose.

Means for Solving the Problems The present invention involves forming a thin film layer on a polymer substrate directly or via an underlayer, and then applying the polymer substrate to a heating roller in the atmosphere or an atmosphere containing an equivalent or higher amount of oxygen. The thin film manufacturing method is characterized in that both ends of the polymer substrate are pressed against the temperature raising roller on the exit side of the temperature raising roller.

According to the present invention, it is possible to prevent slippage between the temperature raising roller and the polymer substrate on which the thin film is formed, so it is possible to ensure the film's mobility on the entry side of the temperature raising roller without reducing it. Since the tension on the exit side of the temperature raising roller can be increased, it is possible to prevent wrinkles caused by rapid thermal deformation of the polymer substrate during annealing treatment.

EXAMPLES Below, examples of the present invention will be described with reference to the drawings.

Fig. 1 shows an embodiment of the present invention, and Fig. 2 shows a conventional example.
The difference from the figure is that the exit side of the temperature raising roller 5 is a nip roller 7. A film with a thickness of 30 nm was deposited on a polyethylene terephthalate substrate with a thickness of 8 μm and a width of 50 cm using a vacuum evaporation method.
In an annealing treatment for the purpose of flattening (removal of curls) decorative wrapping paper provided with an Al layer of m, the temperature of the heating roller was 90 t, the film running speed was 10 m/min, and the nip roller 7 was not used. It is not possible to create a large tension difference between the entrance and exit sides of the temperature-raising roller, and wrinkles occur in the film on the temperature-raising roller.By using the nip roller 7, wrinkles in the film can be prevented. ，
FIG. 3 is a diagram showing an example of the nip roller 7 used in the present invention. If a commonly used nip roller 7 is used, the entire surface of the film is pressed down, which may reduce the surface properties of the film or even cause wrinkles. Therefore, a nip roller 7 as shown in FIG.
Since only both ends of the film are pressed when using the nip roller 7, the above-mentioned disadvantages caused by using the nip roller 7 can be suppressed to only both ends of the film.

Also, if you only want to obtain a tension difference between the roller entry and exit sides, the nip roller 7 can be positioned anywhere on the heating roller for good force transfer.In order to eliminate wrinkles, the substrate should be in contact with the heating roller for as long as possible with low tension. Since it is necessary to complete the thermal deformation without wrinkles, the optimum position for nipping is on the exit side of the heating roller. Thickness 10μ Width 20
A film with a thickness of 25 cm was deposited on a polyimide substrate with a thickness of 25 cm.
In the annealing treatment for the purpose of surface oxidation of a perpendicular magnetic recording medium provided with a CoCr layer of 0 nm, the temperature of the heating roller is 320°C and the film running speed is 1m/min. As described above, the thin film manufacturing method of the present invention can effectively prevent wrinkles that occur during aggregation processing. I can do it.

[Brief explanation of drawings]

FIG. 1 is a schematic front view showing an example of an annealing process in a thin film manufacturing method according to an embodiment of the present invention. FIG. 2 is a front view showing a conventional example of an annealing process. FIG. 4, a perspective view showing an example of the nip roller used in the thin film manufacturing method of the embodiment, is a plan view showing wrinkles generated on the exit side of the temperature raising roller. l...Rotation direction 2...Rotation start, 3...
・Polymer substrate on which a thin film is formed, 4... Guide roller, 5... Temperature raising roller, 6... Winding opening nok 7... Nip roller, 8... Defeat

Claims (1)

[Claims] In the method for producing a thin film, the thin film layer is formed directly or via a base layer on a polymer substrate, and then the polymer substrate is run along a temperature rising roller in the atmosphere or an atmosphere containing oxygen of equal or higher concentration. A method for producing a thin film, comprising pressing both ends of the polymer substrate against the temperature-raising roller on the exit side of the temperature-raising roller.