JPH10172143A - Production of thin film medium and its producing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent roll-in of air between a thin film medium and heating rolls, to make the thin film medium tightly stick to heating rolls and to realize rapid and uniform heat transfer to the thin film medium by making the thin film medium travel in a reduced pressure in such a manner that the top and back surfaces of the medium are alternately brought into contact with heating rolls. SOLUTION: After a reduced pressure vacuum chamber 9 of a heating device 1 is evacuated to 10<-2> to 10<-4> Torr vacuum degree, a thin film medium 2 released from a supply roll 3 is brought into contact with a first heating roll 5. In this case, an energizing member 4a is used to hold the thin film medium 2 between the first heating roll 5 and a nip roll 4. Then the thin film medium 2 sent by the first heating roll 5 is brought into contact with a second heating roll 6. Further, the thin film medium 2 sent by the second heating roll 6 is brought into contact with a third heating roll 7. Then the thin film medium 2 sent by the third heating roll 7 is wound on a winding roll 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a thin film medium such as a metal thin film type magnetic recording tape and an apparatus for manufacturing the same.

[0002]

2. Description of the Related Art Metal thin-film magnetic recording tapes suitable for high-density recording are usually curled in many cases. Then, it is required to remove the curl because the curl deteriorates the contact with the magnetic head. Therefore,
In order to remove the curl, for example, an attempt has been made to remove the curl using a heating roll.

[0003] However, with such a heating means,
The generation of hot wrinkles has been observed more frequently than before, which has been a cause of deteriorating the quality of the thin film medium.

[0004]

The causes of the thermal wrinkles include, for example, uneven heating caused by air entrapment between the heating roll and the thin film medium, and the thin film medium being rapidly cooled on the exit side of the heating roll. Due to this, rapid shrinkage of the thin film medium is considered, and a perfect heating means has not been put to practical use. SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a method of manufacturing a thin-film medium in which generation of heat wrinkles is prevented and a manufacturing apparatus therefor.

[0005]

A first aspect of the present invention is a method of manufacturing a thin film medium comprising a thin film provided on a substrate, the method comprising: The method includes a heating step of running the thin-film medium with the back surface alternately attached. According to the method for manufacturing a thin film medium according to the first aspect, since the thin film medium travels while alternately contacting the front and back surfaces of the thin film medium with the heating roll in a reduced-pressure vacuum, air entrapment between the thin film medium and the heating roll is reduced. This prevents the thin-film medium from coming into intimate contact with the heating roll, so that heat can be quickly and uniformly transferred to the thin-film medium. Further, under reduced pressure vacuum, there is no escape of heat due to air from the thin film medium sent out from the heating roll, and it is possible to prevent rapid shrinkage due to rapid cooling of the thin film medium.

According to a second aspect of the present invention, there is provided an apparatus for manufacturing a thin film medium comprising a thin film provided on a substrate, a reduced-pressure vacuum tank, a plurality of continuous heating rolls disposed in the reduced-pressure vacuum tank, Running means for running the thin-film medium with the front and back surfaces alternately attached to the plurality of heating rolls. According to the apparatus for manufacturing a thin film medium according to claim 2, since the thin film medium travels while being alternately attached to the heating roll in a reduced pressure vacuum, air entrapment between the thin film medium and the heating roll is reduced. This prevents the thin-film medium from coming into intimate contact with the heating roll, so that heat can be quickly and uniformly transferred to the thin-film medium. Further, under reduced pressure vacuum, there is no escape of heat due to air from the thin film medium sent out from the heating roll, and it is possible to prevent rapid shrinkage due to rapid cooling of the thin film medium.

According to a third aspect of the present invention, there is provided an apparatus for manufacturing a thin film medium comprising a thin film provided on a substrate, a film forming means for providing a thin film on a substrate in vacuum to form a thin film medium, a reduced-pressure vacuum tank, A plurality of continuous heating rolls arranged in a reduced-pressure vacuum tank, and a traveling means for traveling the thin film medium by alternately adhering the front and back surfaces to the plurality of heating rolls, Is what you do.

According to the apparatus for manufacturing a thin film medium according to the third aspect, since the thin film medium travels while being alternately attached to the heating roll in a reduced pressure vacuum, the air flowing between the thin film medium and the heating roll is reduced. Biting is prevented, the thin-film medium comes into close contact with the heating roll, and heat is transferred to the thin-film medium quickly and uniformly. Further, under reduced pressure vacuum, there is no escape of heat due to air from the thin film medium sent out from the heating roll, and it is possible to prevent rapid shrinkage due to rapid cooling of the thin film medium.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION

First Embodiment A method and an apparatus for manufacturing a thin film medium according to a first embodiment of the present invention will be described with reference to FIG. In FIG. 1, 1 is a heating device, 2 is a thin film medium, 3 is a supply side roll, 4 is a nip roll, 5 is a first heating roll, 6 is a second heating roll, 7 is a third heating roll, and 8 is a winding side. The roll 9 is a vacuum chamber. The running means is constituted by the supply roll 3, the nip roll 4, and the winding roll 8.

The thin film medium 2 is, for example, a magnetic recording tape in which a metal thin film is provided on a substrate. After the inside of the vacuum chamber 9 of the heating device 1 is evacuated to a vacuum degree of about 10 ^-2 to 10 ^-4 Torr, the thin film medium 2 sent from the supply roll 3 is brought into contact with the first heating roll 5. . At this time, the thin film medium 2 is urged by an urging member 4a such as a spring, a hydraulic cylinder, or an air cylinder so as to be sandwiched between the first heating roll 5 and the nip roll 4. Then, the thin film medium 2 sent from the first heating roll 5 is brought into contact with the second heating roll 6.
At this time, the other surface opposite to the one surface of the thin film medium 2 that is in contact with the first heating roll 5 is in contact with the second heating roll 6. Further, the thin film medium 2 sent from the second heating roll 6 is brought into contact with the third heating roll 7. At this time, the other surface opposite to the one surface of the thin film medium 2 that is in contact with the second heating roll 6 is in contact with the third heating roll 7. Next, the thin-film medium 2 sent from the third heating roll 7 is taken up by the winding roll 8.
And roll it up.

A method for manufacturing a thin film medium in the apparatus for manufacturing a thin film medium having the above-described configuration will be described. In the heating step, a winding force is applied to the supply-side roll 3 and the winding-side roll 8 so that tension is applied to the thin-film medium 2.
That is, the thin-film medium 2 is run with the thin-film medium 2 pressed against the first heating roll 5, the second heating roll 6, and the third heating roll 7.

At this time, the inside of the vacuum chamber 9 is 10 ⁻² to 10.
Under a vacuum of about ^-4 Torr, tension is applied to the thin film medium 2, and the thin film medium 2 is pressed against each of the heating rolls 5, 6, 7. Because of the pressure bonding, the thin film medium 2 and the second heating roll 6 are located between the thin film medium 2 and the first heating roll 5.
And between the thin film medium 2 and the third heating roll 7 are extremely good, and the heat transfer is performed quickly and uniformly.

Here, the temperature of the first heating roll 5, the second heating roll 6, and the third heating roll 7 is set to a temperature suitable for the material (PET, PEN, aramid, etc.) of the substrate of the thin film medium 2, and Abrupt temperature changes are not applied to the medium 2. According to the method and apparatus for manufacturing a thin film medium configured as described above, the thin film medium 2 travels while being alternately attached to the heating rolls 5, 6, and 7 in a reduced-pressure vacuum. And the heating rolls 5, 6, and 7 are prevented from being caught by air, the thin film medium 2 comes into close contact with the heating rolls 5, 6, and 7, and heat is transferred to the thin film medium 2 quickly and uniformly.

Further, the pressure in the vacuum chamber 9 is 10 ^-2 to 10 ^-4.
Because it is under a vacuum of about Torr,
There is no escape of heat due to air from the thin film medium 2 which has been sent out, and there is no temperature drop due to rapid cooling of the thin film medium 2 due to this, and rapid contraction of the thin film medium 2 is prevented. it can. Therefore, heat wrinkles due to uneven heating and heat shrinkage do not occur, and the curl of the thin film medium 2 can be efficiently removed.

If the degree of vacuum in the vacuum chamber 9 is increased, it is not necessary to use the nip roll 4 which may affect the thin film medium 2. Heating rolls 5, 6, 7
Is three in this example, but depending on the material of the substrate,
It suffices if it is two or more. Second Embodiment A method and an apparatus for manufacturing a thin film medium according to a second embodiment of the present invention will be described with reference to FIG.

In FIG. 2, 1 is a heating device, 2 is a thin film medium, 3 is a supply roll, 4 is a nip roll, 5 is a first heating roll, 6 is a second heating roll, 7 is a third heating roll,
8 is a take-up roll, 9 is a vacuum chamber, 11 is a vapor deposition device, 12 is a substrate, 13 is a cooling can roll, 14 is a shield plate, 15 is an oxygen gas supply nozzle, 16 is a crucible, 17
Is a magnetic metal material supplied into the crucible 16, 18 is an electron gun, and 19 is a vacuum chamber. Note that a film forming unit is configured by the vapor deposition device 11.

In the apparatus for manufacturing a thin film medium configured as described above, the inside of the vacuum chamber 19 of the vapor deposition apparatus 11 is set to 10 ⁻⁴ to 10 ^−4.
After evacuating to a vacuum of about ^-6 Torr,
The magnetic metal material 17 in the crucible 16 is melted and evaporated by the beam heating from 8. Here, the substrate 12 delivered from the supply-side roll 3 is caused to travel while being in contact with the cooling can roll 13, and the substrate 12 to be in contact with the cooling can roll 13 is moved by 0.05 mm.
A magnetic metal material 17 having a thickness of about 1 μm
Is formed. At this time, a take-up force is applied to the supply-side roll 3, and the thin-film medium 2
Is formed. At the time of forming the thin film medium 2, oxygen is supplied to the deposition portion from the oxygen gas supply nozzle 15, and the surface portion of the thin film medium 2 is oxidized by forced oxidation,
A protective film made of an oxide film is formed.

The pressure in the vacuum chamber 9 of the heating device 1 is 10
^The air is evacuated to a vacuum degree of about ^-2 to 10 ^-4 Torr. The following configuration is the same as in the first embodiment. In the first embodiment, the thin film medium 2 supplied from the supply roll 3 is brought into contact with the first heating roll 5, whereas in the present embodiment, the thin film medium 2 supplied from the vapor deposition device 11 is subjected to the first heating. The only difference is that the roll 5 is attached to the roll 5 and the other basic techniques are the same.

A method for manufacturing a thin film medium in the apparatus for manufacturing a thin film medium having the above-described configuration will be described. In the above vapor deposition step, when the magnetic metal material 17 is vapor-deposited and the thin film medium 2 is formed, excessive heat is applied to the vapor-deposited portion. However, since the thin film medium 2 runs while being attached to the cooling can roll 13, heat generated by vapor deposition is removed by the cooling can roll 13 and a traveling metal roll.
When the thin-film medium 2 is rapidly cooled to about room temperature, the thin-film medium 2 contracts heat and generates wrinkles. Therefore, in the subsequent heating step, cooling is performed gradually so that rapid cooling does not occur.

First, a winding force is applied to the winding roll 8 to apply tension to the thin film medium 2, that is, the first heating roll 5, the second heating roll 6, and the third heating roll 7
The thin film medium 2 is caused to run in a state where the thin film medium 2 is pressure-bonded. At this time, the pressure inside the vacuum chamber 9 is 10 ⁻² to 10 ⁻⁴ Torr.
Under a vacuum of about r, the tension is applied to the thin-film medium 2 and the thin-film medium 2 is pressed against each of the heating rolls 5, 6, and 7, and the thin-film medium 2 is pressed against the first heating roll 5 by the nip roll 4. Therefore, the adhesion between the thin film medium 2 and the first heating roll 5, between the thin film medium 2 and the second heating roll 6, and between the thin film medium 2 and the third heating roll 7 are extremely good. The movement is performed quickly and uniformly.

Here, the temperatures of the first heating roll 5, the second heating roll 6, and the third heating roll 7 are set to appropriate temperatures so that a rapid temperature change is not applied to the thin film medium 2. According to the method and apparatus for manufacturing a thin film medium configured as described above, the thin film medium 2 travels while being alternately attached to the heating rolls 5, 6, and 7 in a reduced-pressure vacuum. To prevent air from being trapped between the heating rolls 5, 6, and 7, and
6 and 7, the heat is transferred to the thin film medium 2 quickly and uniformly.

Further, the pressure in the vacuum chamber 9 is 10 ^-2 to 10 ^-4.
Because it is under a vacuum of about Torr,
There is no escape of heat due to air from the thin film medium 2 which has been sent out, and there is no temperature drop due to rapid cooling of the thin film medium 2 due to this, and rapid contraction of the thin film medium 2 is prevented. it can. Therefore, in the vapor deposition process, heat wrinkles due to uneven heating and heat shrinkage do not occur, and the curl of the thin film medium 2 can be efficiently removed.

[0023]

According to the method for manufacturing a thin-film medium according to the first aspect, the thin-film medium travels while alternately contacting the front and back surfaces of the thin-film medium with the heating roll in a reduced-pressure vacuum. Air is prevented from being trapped, the thin-film medium comes into close contact with the heating roll, and heat is transferred to the thin-film medium quickly and uniformly. Further, under reduced pressure vacuum, there is no escape of heat due to air from the thin film medium sent out from the heating roll, and it is possible to prevent rapid shrinkage due to rapid cooling of the thin film medium. Accordingly, no thermal wrinkles due to uneven heating or thermal shrinkage are generated, the curl of the thin film medium can be efficiently removed, and a high quality thin film medium without thermal wrinkles can be obtained.

According to the apparatus for manufacturing a thin film medium according to the second aspect, since the thin film medium travels while being alternately attached to the heating roll under reduced pressure vacuum, the air between the thin film medium and the heating roll is moved. Biting is prevented, the thin-film medium comes into close contact with the heating roll, and heat is transferred to the thin-film medium quickly and uniformly. Further, under reduced pressure vacuum, there is no escape of heat due to air from the thin film medium sent out from the heating roll, and it is possible to prevent rapid shrinkage due to rapid cooling of the thin film medium. Accordingly, no thermal wrinkles due to uneven heating or thermal shrinkage are generated, the curl of the thin film medium can be efficiently removed, and a high quality thin film medium without thermal wrinkles can be obtained.

According to the apparatus for manufacturing a thin film medium according to the third aspect, since the thin film medium travels while being alternately attached to the heating roll in a reduced pressure vacuum, the air flowing between the thin film medium and the heating roll is reduced. Biting is prevented, the thin-film medium comes into close contact with the heating roll, and heat is transferred to the thin-film medium quickly and uniformly. Further, under reduced pressure vacuum, there is no escape of heat due to air from the thin film medium sent out from the heating roll, and it is possible to prevent rapid shrinkage due to rapid cooling of the thin film medium. Therefore, in the vapor deposition process, heat wrinkles due to uneven heating and heat shrinkage do not occur, the curl of the thin film medium can be efficiently removed, and a high quality thin film medium without heat wrinkles can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic view of an apparatus for manufacturing a thin film medium according to a first embodiment of the present invention.

FIG. 2 is a schematic view of an apparatus for manufacturing a thin film medium according to a second embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Heating device 2 Thin film medium 3 Supply side roll 5 1st heating roll 6 2nd heating roll 7 3rd heating roll 8 Take-up side roll 9 Decompression vacuum tank 11 Evaporation device 12 Substrate 13 Cooling can roll 16 Crucible 17 Magnetic metal material 19 Vacuum chamber

Claims (3)

[Claims] 1. A method for producing a thin film medium comprising a thin film provided on a substrate, wherein the front and back surfaces of the thin film medium are alternately attached to a plurality of continuous heating rolls in a reduced pressure vacuum. A method for manufacturing a thin film medium, comprising a heating step of running the thin film medium. 2. An apparatus for manufacturing a thin film medium comprising a thin film provided on a substrate, comprising: a reduced-pressure vacuum tank; a plurality of continuous heating rolls disposed in the reduced-pressure vacuum tank; Running means for running the thin-film medium by alternately attaching the front and back surfaces to the heating roll, and a running means for running the thin-film medium. 3. An apparatus for producing a thin film medium comprising a thin film provided on a substrate, a film forming means for providing a thin film on a substrate in vacuum to form a thin film medium, a reduced pressure vacuum tank, and a reduced pressure vacuum tank. A thin film comprising: a plurality of continuous heating rolls disposed therein; and running means for running the thin film medium by alternately abutting the front and back surfaces of the plurality of heating rolls. Media manufacturing equipment.