JPH0718010B2 - Method for manufacturing metal thin film - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing apparatus for stably forming a metal thin film by using a multi-component material in vacuum vapor deposition, and particularly, to prevent foreign matter and metal thin film on the surface of the metal thin film. The present invention relates to an apparatus for producing a metal thin film such as a perpendicular magnetic recording medium which is excellent in high density recording characteristics and whose composition has an important effect on its function.

2. Description of the Related Art Generally, the vacuum deposition method is used as a thin film forming method for large area and mass production because of its high deposition rate, and is also suitable as a method for manufacturing a metal thin film type recording medium, for example. As a metal thin film type medium, a Co-based magnetic thin film medium is known to have excellent short wavelength recording characteristics. Since the Co-based alloy has a high melting point, it is melted by the electron beam heating method as shown in FIG.

In FIG. 3, 1 is a film, 2 is a can roller, 3
Is an electron beam heating device, 4 is a vapor deposition material put in a crucible,
5 is a bias power supply.

In the conventional example shown in FIG. 3, the film 1 is connected to the can roller 2
The vapor deposition material 4 heated and melted by the electron beam heating device 3 is vapor-deposited on the film 1 while traveling above. In order to bring the film 1 into close contact with the can roller 2,
The bias power source 5 applies a negative bias to the metal film on the film 1.

At this time, a wide and long polymer film is used as the substrate on which the magnetic thin film is formed, and the thin film is continuously formed while moving through a roll system.

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention When a magnetic recording medium formed on a polymer film by the vacuum deposition method is contacted with a magnetic head for recording and reproduction, a spacing loss occurs between the medium and the head. It is necessary that there be no such foreign matter (for example, wrinkles or dust on the film) and that the magnetic characteristics be maintained uniform over a long length.

However, the conventional example as shown in FIG. 3 has the following problems.

That is, since the film 1 is brought into close contact with the can roller 2 by the bias voltage, the film 1 shown in FIG.
When the film 1 is deposited in this state along the unevenness of the surface of the can roller 2 as shown in the enlarged sectional view of the part), the unevenness is left on the film 1. The unevenness causes a large problem such as an increase in spacing loss with respect to the magnetic head, and further, missing recording.

Further, the film expands or contracts due to rapid heating during vapor deposition, but since it is in close contact with the can roller, the expansion or contraction causes wrinkles on the surface, which causes the same problem as described above. .

In order to solve the above problems, it is an object of the present invention to provide a method for producing a metal thin film, which can easily prevent the occurrence of irregularities and wrinkles on the film surface when forming a film on a film by vapor deposition. It is a thing.

Means for Solving the Problems In order to achieve the above object, the present invention comprises a step of strongly interposing a gas partially between a film and a can roller when depositing a metal thin film on the film. It is characterized by including.

Effect According to the present invention, the wrinkles due to the expansion or contraction due to the abrupt heat received during the vapor deposition of the film adhered to the can roller are caused by the unevenness on the surface of the can roller and the pressure of the gas interposed between the film and the wrinkle. It can be smoothed by sliding on the can roller. That is, wrinkles due to the sagging of the film on the can roller and unevenness on the film due to the unevenness on the surface of the can roller do not occur.

Embodiment An embodiment of the present invention will be described with reference to FIGS. 1 and 2.

FIG. 1a is a schematic configuration diagram of a metal thin film manufacturing apparatus used in this embodiment. In the figure, 6 is a gas discharge pipe, 7 is a gas flow controller, and 8 is a gas cylinder. In this embodiment, argon gas 9 is used as this gas. Further, 11 is a differential pressure plate.

The argon gas 9 is supplied from the gas cylinder 8 to the gas flow controller 7
From the hole provided at the end of the gas discharge pipe 6 through FIG.
It is discharged as shown by 10 and enters between the film 1 and the can roller 2. Then, as shown in FIG. 2, the film 1 accumulates in the concave portion of the surface of the can roller 2, and the film 1 does not follow the unevenness.
Therefore, unevenness does not occur on the surface of the film 1. At this time, since excess gas escapes in the direction of the arrow in FIG. 2 and the like, sliding the film 1 in the direction of the arrow with respect to the surface of the can roller 2 causes heat expansion or contraction of the film 1 during vapor deposition. The slack can be removed and wrinkles can be prevented.

As a result, it is possible to prevent unevenness and wrinkles on the surface of the film formed on the film 1.

EFFECTS OF THE INVENTION As described above, according to the present invention, since it is possible to prevent the occurrence of unevenness and wrinkles on the film surface formed into a film, it is possible to mass-produce coated products of high quality with good reproducibility and yield. It is possible and industrially very advantageous.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an embodiment of the present invention, FIG. 2 is an operation explanatory diagram thereof, FIG. 3 is a schematic configuration diagram of a conventional example, and FIG. 4 is an operation explanatory diagram thereof. 1 ... film, 2 ... can roller, 9 ... argon gas.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tomoaki Ando 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (56) References JP 61-24025 (JP, A) JP 62-173621 (JP, A)

Claims (1)

[Claims] 1. When a metal thin film is vapor-deposited on a film along a can roller, a gas is uniformly applied to the contact portion between the can roller on the entrance side of the film to the can roller and the film over the entire width of the film. A method for producing a metal thin film, which comprises the steps of spraying and partially interposing a gas between a film and a can roller.