JPS59110040A - Vapor-depositing device of magnetic tape - Google Patents

Abstract

PURPOSE:To manufacture an excellent magnetic tape which has superior surface smoothness and less dropouts of a signal by running a cleaning tape on a rotating can relatively. CONSTITUTION:When a crucible 6 is heated on the inside 1a of a vapor-depositing device made into a vacuum layer by a vacuum pump 2, fused cobalt 5 vaporizes and goes out. On the other hand, a tape 3 runs in a direction A while wound around the cleaning can 4 and the vaporized cobalt is vapor-deposited slantingly on the tape within the range of an angle of incidence specified by a vapor-deposition area specifying plate and a mask to manufacture a vapor-deposited plate. Then, the cleaning tape 9 is brought into press contact with the flank of the cleaning can 4 by nip rolls 9c and 9d during the rotation of the cleaning can 4 to specific length, so even if cobalt sticks to the flank of the cleaning can 4 or if powder falls out of the back coat of the tape, the sticking matter is scraped off the cleaning can 4 and cleaned up by the cleaning tape 9.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is directed to, for example, forming a metal magnetic layer on a non-magnetic support by obliquely depositing a metal magnetic material on the non-magnetic support within a predetermined incident angle range. The present invention relates to a magnetic tape deposition apparatus used in the production of magnetic tape.

BACKGROUND ART AND PROBLEMS Conventionally, magnetic tape evaporation apparatuses have been used to obliquely evaporate a metal magnetic material onto a non-magnetic support within a predetermined incident angle range to form a metal magnetic layer on the non-magnetic support. Something like the one shown in Figure 1 was proposed.

In FIG. 1, (1) generally shows a magnetic tape deposition apparatus for obtaining a magnetic tape by so-called oblique deposition.
The interior (1a) of this magnetic tape deposition apparatus (1) is equipped with a button so that it can be evacuated using a vacuum pump (2). (3) shows a non-magnetic support, for example a polyethylene terephthalate film tape having a thickness of 12 μm, and this non-magnetic support (3) K is provided with a back coat. In addition, this non-magnetic support (3) is wrapped around a cooling can (4) for a predetermined length, which rotates around a rotation axis (4a) and has a cylindrical appearance and is cooled to lower its temperature. , it moves in the direction indicated by the arrow at a predetermined speed. Here, the non-magnetic support (3) is supplied from the non-magnetic support supply roll (3a), wound around the cooling can (4) by a predetermined length, and then fed to the take-up roll (3b). has been done. (5) indicates molten cobalt;
This molten cobalt (5) is placed in a crucible (6). When this crucible (6) is heated by an electron gun (not shown), the vacuum pump (2)
Cobalt (5) is evaporated and ejected into the inside (1a) of the magnetic tape evaporation device, which is a vacuum layer of torr, and cobalt as a metal magnetic material is evaporated onto the non-magnetic support (3). There is. On the other hand, the incident angle θ, which is the angle between the normal direction of the circumference as a horizontal cross section of the cooling can (4) and the direction in which cobalt (5) flies to the non-magnetic support (3), is determined as the predetermined incident angle. only within the corner,
In order to allow cobalt to be deposited obliquely, deposition area defining masks (7a), (7b), and (7c) and deposition area defining plates (8a, 8b, and 8c) are provided as shown. Here, the regulating plates (8a) and (8b) respectively define the interval in the longitudinal direction of the tape to define the range of the incident angle in the vapor deposition region, and the regulating plate (8C) defines the lower part in the tape width direction. Although not shown, a regulation plate for defining the upper side is also provided corresponding to the regulation plate (8C). In addition, masks (7
a) (7b) (7C) is provided in an arc shape close to the non-magnetic support, and the masks (7a) and (7b) define the interval in the longitudinal direction to define the range of the incident angle, and the mask (7C) defines one side in the tape width direction, and a mask (not shown) that defines the other side in the tape width direction is provided corresponding to the mask (7C).

Therefore, these regulation plates (8a) (8b) (8c)
By changing the relative positions of the masks (7a), (7b), and (7c), the cooling can (4), and the crucible (6), the angle of incidence of the co-gurt onto the non-magnetic support (3) can be limited, allowing the desired An oblique vapor deposition will be performed. According to this oblique deposition method, a metal magnetic layer of magnetic powder with a good acicular ratio is formed, and the coercive force He of the manufactured magnetic tape increases, making it possible to record short wavelength signals and achieve high-density recording. It is known that the performance of magnetic tape can be improved.

However, in this magnetic tape evaporation equipment, the cooling can (4) 4111 side is caused by a misalignment of the non-magnetic support (3) during the evaporation of the magnetic material cobalt (5). Cobalt (5) is deposited in the area where the non-magnetic support (3) is wrapped around, causing the cooling can (4)
has become contaminated with vapor-deposited substances. There is also a problem in that the cooling can (4) becomes dirty due to powder falling off from the back-coated non-magnetic support (3), which adversely affects the running system.

OBJECTS OF THE INVENTION In view of the above-mentioned problems, it is an object of the present invention to provide a magnetic tape vapor deposition apparatus that can perform magnetic tape deposition satisfactorily.

SUMMARY OF THE INVENTION The magnetic tape deposition apparatus of the present invention is configured to run a cleaning tape on a rotating can relative to the rotating can, and is capable of good magnetic tape deposition.

Embodiment An embodiment of the magnetic tape deposition apparatus of the present invention will be described with reference to FIG. In FIG. 2, parts corresponding to those in FIG. 1 are designated by the same reference numerals, and detailed explanation thereof will be omitted.

In Fig. 2, (9) indicates a cleaning tape for removing vapor deposited substances adhering to the side surface of the cooling can (4). Polymer is formed by vapor deposition. Then, one end of this cleaning tape (9) is wound around the supply reel (9a), and the nip roll (9) is wound from the supply reel (9a) side.
The other end of the cleaning tape (9) is wound onto the take-up reel (9b) via C) and (9d). Then, use the nip rolls (9C) and (9d) to move the cleaning Teso (9) to a predetermined length of the cooling can (4
) Crimp the sides. Incidentally, after a predetermined period of time has elapsed, a new cleaning tape is supplied from the supply reel side and pressed onto the cooling can. Note that the other parts are constructed in the same manner as a conventional magnetic tape deposition apparatus.

In this embodiment configured as described above, the vacuum pump (2) is used to create a vacuum layer of, for example, 10" torr inside the magnetic tape deposition apparatus (1a), and the electron beam of the electron gun is used to generate the vacuum layer. When the crucible (6) is heated, the molten cobalt (5) evaporates and flies out.Meanwhile, a tape serving as a non-magnetic support is supplied from the supply roll (3a) and placed in the cooling can (4) for a predetermined length. As the tape travels in the direction of the arrow while being wrapped around it, cobalt is diagonally deposited onto the tape within the incident angle defined by the deposition area defining plate and the mask, producing a deposition tape. Here, nip roll (9C
) and (9d) K Yoshi Cleaning Te-7' (9)
is the cooling can (4) while it is rotating.
ヰ) The cooling can (
4) Even if there is cobalt adhering to the sides or powder falling from the tape coating, the Cleanini/Guteso (9) will remove these adhering substances from the cooling can (4) and clean it. When it is done, it becomes.

In this way, according to this embodiment, the cleaning tape (9
) is pressed onto the side surface of the cooling can (4) to remove dirt from the cooling can (4) and cleaning the side surface, so that the traveling system of the cooling can (4) operates in good condition. Therefore, compared to the conventional method, there is an advantage in that a magnetic tape can be produced with better vapor deposition, excellent surface properties, and less signal dropout.

Further, in the above embodiment, the cleaning chip 7' (9) is always pressed to the cooling can (4), but it is also possible to use a construction in which the cleaning tool 7' (9) is pressed intermittently to clean it, or to perform a vapor deposition operation. Rotate the cooling can (4) back and forth and clean the cleaning chinier (9
) to the side surface of the cooling can (4) for cleaning.

This cleaning tape (9) is not limited to the above-mentioned example, for example, Az2o3 t TiO2p 5i02 pFe30
4 $ Formed by depositing a hard substance such as Fe2O3 on a support such as polyethylene terephthalate,
Cr2O3, At203 *TiO2, 5i02,
It is also possible to deposit hard particles such as Fe3O4e Fe2O3 together with a binder onto a support.

Also, attach the cleaning tape (9) to the cooling can (
4) It is easy to understand that the same effects as in the above-mentioned embodiments can be obtained even if the cooling can (4) is moved in a direction opposite to the running direction of the cooling can (4) while being crimped on the side surface for cleaning.

It should be noted that the present invention is not limited to the above-described embodiments, and it goes without saying that various other configurations may be adopted without departing from the gist of the present invention.

Effects of the Invention As described above, according to the magnetic tape deposition apparatus of the present invention, since cleaning is performed using a cleaning tape, a good magnetic tape with excellent surface properties and little signal dropout can be obtained. It is profitable to manufacture

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing an example of a conventional magnetic tape vapor deposition apparatus, and FIG. 2 is a cross-sectional view showing an embodiment of the magnetic tape vapor deposition apparatus of the present invention. (4) is a cooling can, (9) is a cleaning tape, (9a) is a supply reel, (9b) is a take-up reel, and (9C) and (9d) are Nitzoroll. Agent: Sadakase ItoContinued from page 1 Inventor: Yoshikatsu Kato, 6-5-6, Kitashinyo, Tokyo Parts District, Sony Magne Products Co., Ltd. Inventor: Hiroyuki Sayo, Tokyo Parts District Kitashinyo 6-7-35 Sony Corporation 267-

Claims (1)

[Claims] 1. A magnetic tape deposition apparatus characterized in that a cooling can is caused to travel on a rotating can relative to the rotating can.