JPH03141026A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPH03141026A JPH03141026A JP27591789A JP27591789A JPH03141026A JP H03141026 A JPH03141026 A JP H03141026A JP 27591789 A JP27591789 A JP 27591789A JP 27591789 A JP27591789 A JP 27591789A JP H03141026 A JPH03141026 A JP H03141026A
- Authority
- JP
- Japan
- Prior art keywords
- polymer film
- magnetic recording
- heat
- rotating drum
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 229920006254 polymer film Polymers 0.000 claims abstract description 23
- 239000002184 metal Substances 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 abstract description 7
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005422 blasting Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気ディスク、磁気テープの如く磁気記録媒体
の製造方法に係り、特にその磁性面の平坦化に有効な製
造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for manufacturing magnetic recording media such as magnetic disks and magnetic tapes, and particularly to a manufacturing method effective for flattening the magnetic surface thereof.
近年、磁気記録媒体の高密度化に伴い、金属薄膜型磁気
記録媒体の研究、開発が活発に行われ、その一部は既に
実用化されている。In recent years, with the increase in the density of magnetic recording media, research and development of metal thin film magnetic recording media has been actively conducted, and some of them have already been put into practical use.
この様な金属薄膜型磁気記録媒体の中には、Ｃ・−Ｃ，
垂直磁気記録媒体等のように、製作時に基板を高温に加
熱する必要のある媒体がある。基板の加熱を必要とする
媒体を耐熱性高分子フィルム上に一形成させるには、通
常、加熱した回転ドラム上に耐熱性高分子フィルムを巻
き付け、耐熱性高分子フィルムを巻き取りつつペーパー
デイポジション法（金属を蒸気状態にして膜を形成する
方法で、真空蒸着法、スパッタリング法、イオンブレー
ティング法、ＣＶＤ法等を指す）によって媒体を付着さ
せる。Among these metal thin film magnetic recording media, there are C・-C,
There are media, such as perpendicular magnetic recording media, that require a substrate to be heated to a high temperature during manufacture. To form a medium on a heat-resistant polymer film that requires heating the substrate, the heat-resistant polymer film is usually wound around a heated rotating drum, and the paper day position is applied while winding the heat-resistant polymer film. The medium is attached by a method (a method of forming a film by turning a metal into a vapor state, which refers to a vacuum evaporation method, a sputtering method, an ion blasting method, a CVD method, etc.).
（発明が解決しようとする問題点）
上記の方法によって製造された金属薄膜型磁気記録媒体
は、その磁性面を凸とする高さ０．１〜１．０〔μｍ〕
程度の突起が多数発生する。(Problems to be Solved by the Invention) The metal thin film magnetic recording medium manufactured by the above method has a convex magnetic surface with a height of 0.1 to 1.0 [μm].
Many protrusions of some degree occur.
本発明者等の検討によれば、上記突起発生の原因は、加
熱された回転ドラム表面の荒れ及びフィルムに付着した
ゴミにある。According to studies by the present inventors, the cause of the above protrusion is the roughness of the surface of the heated rotating drum and the dust adhering to the film.
即ち、耐熱性高分子フィルムは高温になると剛性が弱く
なり変形し易くなる。このため、回転ドラムと耐熱性高
分子フィルムの間にゴミがはさまったりすると、フィル
ム上にこれが転写され突起となる。そこで回転ドラム表
面を、Ｒｗａｘで０．１〔μｍ〕以下の平滑度にし且つ
ゴミが付着しないようにすればよいのであるが、耐熱性
高分子フィルムを走行させていると回転ドラム表面に傷
がつくことは避けられず、この様な平滑度を常時保つの
は極めて困難である。That is, when a heat-resistant polymer film becomes high temperature, its rigidity decreases and it becomes easily deformed. Therefore, if dirt gets caught between the rotating drum and the heat-resistant polymer film, it will be transferred onto the film and form protrusions. Therefore, it is best to make the surface of the rotating drum as smooth as 0.1 [μm] or less in terms of Rwax and to prevent dust from adhering to it. However, when running a heat-resistant polymer film, the surface of the rotating drum may be scratched. This is unavoidable, and it is extremely difficult to maintain such smoothness all the time.
本発明は上記問題点を解消するためになされたもので、
磁性面の平坦性に優れた磁気記録媒体の製造方法の提供
を目的としている。The present invention was made to solve the above problems, and
The object of the present invention is to provide a method for manufacturing a magnetic recording medium with excellent flatness of the magnetic surface.
上記目的を達成するために、本発明は、２００℃〜４０
０℃に加熱された回転ドラムに巻き付けられつつ連続的
に供給される耐熱性高分子フィルム上に一金属蒸気を付
着せしめて金属磁性薄膜を形成する磁気記録媒体の製造
方法において、前記耐熱性高分子フィルムが加熱された
回転ドラムに接触している時間を１０秒以下とすること
を特徴としている。In order to achieve the above object, the present invention
A method for manufacturing a magnetic recording medium in which a metal magnetic thin film is formed by depositing a metal vapor on a heat-resistant polymer film that is continuously supplied while being wound around a rotating drum heated to 0°C. It is characterized in that the time during which the molecular film is in contact with the heated rotating drum is 10 seconds or less.
本発明の実施例を図面とともに説明する。第１図は本発
明の製造方法を採用する真空蒸着装置の概略構成図であ
る。Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram of a vacuum evaporation apparatus employing the manufacturing method of the present invention.
容器ｌ内にはその下部に蒸発源（磁性金属）２が設置さ
れ、蒸発源２の側方には電子銃３が蒸発源２に向けて配
設されている。容器１内の上部には、耐熱性高分子フィ
ルム４を供給及び巻き取るためのロール群５が設けられ
、これらのロール群５中に比較的径の大なる回転ドラム
６が配され、回転ドラム６の下面が蒸発源２と対面し、
この回転ドラム６上を走行する耐熱性高分子フィルム４
上に磁性金属が付着される。An evaporation source (magnetic metal) 2 is placed in the lower part of the container 1, and an electron gun 3 is placed on the side of the evaporation source 2, facing the evaporation source 2. A group of rolls 5 for supplying and winding up the heat-resistant polymer film 4 is provided in the upper part of the container 1, and a rotating drum 6 having a relatively large diameter is disposed in the group of rolls 5. The lower surface of 6 faces the evaporation source 2,
Heat-resistant polymer film 4 running on this rotating drum 6
Magnetic metal is deposited on top.
本実施例では、上記真空蒸着装置を用い、耐熱性高分子
フィルムの巻取速度を２．５ （ｍ／ｗｉｎ）（耐熱性
高分子フィルム４と回転ドラム６の接触時間〜１２０秒
）〜９０ Ｃｍ／５ｉｎ） （耐熱性高分子フィルム
４と回転ドラム６の接触時間：２秒）の範囲で変え、厚
さ３０［μｍ〕のポリイミドフィルム上に厚さ０．２Ｃ
μｍ〕のＣ０−Ｃｒ垂直磁化膜を形成した。蒸着時の真
空度は５ ｘｔｏ−’ （Ｔｏｒｒ） 。In this example, the above-mentioned vacuum evaporation apparatus was used, and the winding speed of the heat-resistant polymer film was set to 2.5 (m/win) (contact time between the heat-resistant polymer film 4 and the rotating drum 6 ~120 seconds) to 90 m/win. Cm/5in) (contact time between heat-resistant polymer film 4 and rotating drum 6: 2 seconds), and a 0.2C thick film was placed on a 30 [μm] thick polyimide film.
A C0-Cr perpendicularly magnetized film of [μm] was formed. The degree of vacuum during vapor deposition was 5 xto-' (Torr).
回転ドラム６の温度は２５０℃とした。The temperature of the rotating drum 6 was 250°C.
上記製造方法にて得られた媒体の表面を干渉式光学顕微
鏡で観察し、干渉縞から突起の高さを測定した。The surface of the medium obtained by the above manufacturing method was observed using an interference optical microscope, and the height of the protrusions was measured from the interference fringes.
第２図は、回転ドラム６と一耐熱性高分子フィルム４と
の接触−時間に対する磁性面上の突起の高さ及び密度を
表わしたものである。FIG. 2 shows the height and density of protrusions on the magnetic surface as a function of contact time between the rotating drum 6 and the heat-resistant polymer film 4.
第２図かられかるように、回転ドラム６と耐熱性高分子
フィルム４との接触時間が１０秒以下になると、突起の
高さｈ並びに突起の密度Ｐが著しく小さ（なる。As can be seen from FIG. 2, when the contact time between the rotating drum 6 and the heat-resistant polymer film 4 becomes 10 seconds or less, the height h of the protrusions and the density P of the protrusions become significantly small.
因みに、接触時間が１０秒である場合の突起の高さｈは
０．４ （μｍ） 、突起の密度Ｐは１０ （個／ｃｄ
）であった。Incidentally, when the contact time is 10 seconds, the height h of the protrusions is 0.4 (μm), and the density P of the protrusions is 10 (pcs/cd).
)Met.
本発明は以上の通り、耐熱性高分子フィルムと回転ドラ
ムの接触時間を１０秒以下とすることにより、耐熱性高
分子フィルム上に形成付着する金属磁性薄膜の突起の発
生及びその高さを抑制することができ、平滑性が良好で
記録再生性能に優れた磁気記録媒体を得ることができる
ものである。As described above, the present invention suppresses the occurrence and height of protrusions of the metal magnetic thin film formed and adhered on the heat-resistant polymer film by controlling the contact time between the heat-resistant polymer film and the rotating drum to 10 seconds or less. This makes it possible to obtain a magnetic recording medium with good smoothness and excellent recording and reproducing performance.
第１図は本発明の実施例を採用する真空蒸着装置の概略
構成図、第２図は本発明の詳細な説明するための突起の
高さ及び密度と、回転ドラムと耐熱性高分子フィルムと
の接触時間との関係を示す相関図である。
ｌ・・・・・・容器、２・・・・・・蒸発源、３・・・
・・・電子銃、４・・・・・・耐熱性高分子フィルム、
５・・・・・・ロール群、６・・・・・・回転ドラム、
ｈ・・・・・・突起高さ、Ｐ・・・・・・突起密度。Fig. 1 is a schematic configuration diagram of a vacuum evaporation apparatus that employs an embodiment of the present invention, and Fig. 2 shows the height and density of protrusions, a rotating drum, and a heat-resistant polymer film for explaining the present invention in detail. FIG. 3 is a correlation diagram showing the relationship between contact time and time. l... Container, 2... Evaporation source, 3...
...Electron gun, 4...Heat-resistant polymer film,
5...roll group, 6...rotating drum,
h: Protrusion height, P: Protrusion density.
Claims (1)
られつつ連続的に供給される耐熱性高分子フィルム上に
→金属蒸気を付着せしめて金属磁性薄膜を形成する磁気
記録媒体の製造方法において、前記耐熱性高分子フィル
ムが加熱された回転ドラムに接触している時間を１０秒
以下とすることを特徴とする磁気記録媒体の製造方法。A method for manufacturing a magnetic recording medium, in which a metal magnetic thin film is formed by depositing metal vapor on a heat-resistant polymer film that is continuously supplied while being wound around a rotating drum heated to 200°C to 400°C. A method for manufacturing a magnetic recording medium, characterized in that the time during which a heat-resistant polymer film is in contact with a heated rotating drum is 10 seconds or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27591789A JPH03141026A (en) | 1989-10-25 | 1989-10-25 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27591789A JPH03141026A (en) | 1989-10-25 | 1989-10-25 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03141026A true JPH03141026A (en) | 1991-06-17 |
Family
ID=17562225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27591789A Pending JPH03141026A (en) | 1989-10-25 | 1989-10-25 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03141026A (en) |
-
1989
- 1989-10-25 JP JP27591789A patent/JPH03141026A/en active Pending
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