JPH08176797A - Can cleaning device - Google Patents

Abstract

PURPOSE: To provide a can cleaning device which rapidly and efficiently cleans the can surface of a vapor deposition device stuck with a material to be deposited by evaporation and has excellent durability. CONSTITUTION: This can cleaning device is constituted to remove the deposits on the can 5 of the vapor deposition device having an evaporating source for the material to be deposited by evaporation in which the material to be deposited by evaporation is housed and the can disposed to face this evaporating source by a cleaning means 11. This cleaning means 11 has a scraper 12 for removing the deposits on the can 5 and a pressing means 24 for pressing the scraper 12 to the can 5. In addition, the material of this scraper 12 consists of zirconia based ceramics.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a can cleaning device in a vapor deposition device for vapor depositing plastic, film or the like.

[0002]

2. Description of the Related Art In recent years, vapor deposition apparatuses have been widely used for vapor deposition of metal films such as magnetic recording tapes and film capacitors. An example of a conventional vapor deposition device will be described below with reference to the drawings. FIG. 8 shows a vapor deposition apparatus described in JP-A-2-294480. In FIG. 8, 3
Reference numeral 01 is a film on which the vapor deposition material 302 is vapor deposited, 303 is a vapor deposition material evaporation source that melts and vaporizes the vapor deposition material 302 by, for example, resistance heating, high frequency induction heating, electron beam, etc., and 304 is opposed to the vapor deposition material evaporation source 303. A can for cooling the film vapor deposition surface from the back side, 305 is a film supply roller as a supply mechanism for supplying the film 301 to the can 304, and 306 is vapor deposition. Film take-up roller as a take-up mechanism for taking up the formed film, 3
Reference numeral 07 is a free roller that assists winding and running of the film 301, 308 is a cylindrical vacuum chamber, and 30 is a vacuum chamber.
Reference numeral 9 denotes a vacuum pump for evacuating the inside of the vacuum chamber 308.

The operation of the vapor deposition apparatus having the above structure will be described below. First, the vacuum chamber 308 is evacuated to a vacuum degree of 0.01 to 0.00001 Torr by a vacuum pump 309 including, for example, a rotary pump, an oil diffusion pump, a cryopump and the like. Next, the supply roller 305, the can 304, and the winding roller 306 are rotated. The film 301 includes a supply roller 305, a free roller 307, and a can 30.
4, the free roller 307, and the winding roller 306. At the same time, the material evaporation source 30
3, the vapor deposition material 302 is melted and evaporated. Evaporated particles of the vapor deposition material 302 are scattered and vapor-deposited on the surface of the film 301 running on the opposing can 304. At this time, the film 301 is cooled by the can 304 in which the cooling liquid is circulated. The vapor-deposited film 301 runs on the free roller 307 and is finally wound up by the winding roller 306.

The reason why cleaning is necessary in the above operation will be described. In the vapor deposition device as shown in FIG. 8, as shown in FIGS.
Is longer than the width of the film 301 in the width direction. Therefore, during the vapor deposition, the vapor deposition material 302 does not deposit on the surface of the can 304 covered with the film 301, but in the portion where the surface of the can 304 is exposed, the vapor deposition material 302 adheres and deposits on the surface of the can 304. The winding length of the film 301 is usually about 20,000 to 50,000 meters. For example, if the winding length is 20,000 meters and the diameter of the can 304 is 0.6 meters, the can 3 is
The thickness of the deposition material 310 deposited on the film 04 is
Since the thickness of the vapor deposition material 302 deposited on 1 is more than 10,000 times, it is necessary to clean the can 304 frequently.

However, no cleaning device has been proposed that can automatically and efficiently clean the can 304 of the vacuum vapor deposition device as described above.

As the can cleaning device as described above, the one described in "Cleaning device for sheet conveying roll" (Japanese Patent Laid-Open No. 5-278887) previously proposed by the present applicant as shown in FIG. 11 is used. Can also be considered. In FIG. 11, 201 is a can, and 202 is a cleaning unit that removes adhered matter adhering to the surface of the can 201. The cleaning unit 202 is provided with a scraper 203 for removing the adhered matter and a suction means 204 for sucking the removed adhered matter. The suction means 204 includes a suction nozzle 206 having a suction port 205 that opens and a suction nozzle. It comprises a suction duct 207 connected to 206, and a suction source (not shown) (for example, a blower, a factory vacuum source, etc.). Scraper 203
Is formed in a blade shape having a cutting edge that comes into contact with the peripheral surface of the can 201, and is held by the blade holder 208 via the wedge-shaped spacer 209.
It is attached to 0.

As shown in FIG. 12, the cleaning unit 202 has a transverse frame 21 arranged in parallel with the can 201.
4, the can 201 can be moved in the longitudinal direction of the can 201 by moving means. The traverse driving means may be a mechanism that moves the cleaning unit 202 by a chain or a ball screw mechanism, a mechanism in which the cleaning unit 202 itself has a self-propelled device (for example, a self-propelled motor), and the like.

Limit switches 215 are provided at the front and rear portions in the transverse direction of the cleaning unit 202 (only one of them is shown in FIG. 12). When the can 201 travels in the longitudinal direction for a predetermined length, the limit switches 215 are provided. 215 hits the striker, and the signal from the limit switch 215 stops the traverse or changes the direction. In FIG. 12, reference numeral 216 denotes an air cylinder. The air cylinder 216 rotates the pressing holder 210 around the shaft 213 to press the scraper 203 against the can 201 or separate it from the roll 201. Has become.

As shown in FIG. 13, the scraper 203 can rotate about a pin 211 as a center of rotation so as to follow the peripheral surface of the can 201, and the scraper 203 has an optimum posture, that is, the cutting edge of the scraper 203 is perfectly aligned. In a state of being in contact with the peripheral surface of the can 201, the blade holder 208 and the bolts 212 are fixed to the pressing holder 210 via the spacer 209.

In the cleaning device according to the above proposal,
Can scraper 203 evenly and with good controllability
01 can be pressed against the surface of the scraper 203
The adhered matter can be scraped off by the scraper, and the scraped sticky matter is efficiently sucked and removed by the suction means 204 facing the scraper 203. Therefore, by moving the cleaning unit 202 in the longitudinal direction of the can 201, Can 20
The deposit can be reliably removed over the entire length of 1.

[0011]

However, the previously proposed cleaning device has not been proposed for removing adhered substances such as metal adhered firmly like vapor deposition. Therefore, if the cleaning device as proposed above is simply used for the can cleaning device of the vapor deposition device, the scraper may be worn early or cracked, and excellent cleaning efficiency is exhibited for a long time. It is difficult to get it done. Further, the material of the scraping tool such as a scraper is generally made of metal containing iron as a main component, but it is highly accurately polished in a vapor deposition process in which depressurization and atmospheric opening are repeated in a vacuum chamber. It is not well known that the blade surface of the scraper rusts due to the temperature change and dew condensation caused by the above-mentioned decompression and opening to the atmosphere. Further, as a material other than metal, zirconia-based ceramics are known to exert good performance, but no one using this material for a can cleaning scraper of a vapor deposition apparatus is found, and for the scraper. If only a general combination of materials is used, cracks may occur during use, and no proposal has been made on a combination of materials that does not cause cracks.

The present invention has been made in view of the above problems, and provides a can cleaning device that automatically cleans a can surface to which a vapor deposition material is attached, and is excellent in cleaning efficiency and durability. The purpose is to present the specific composition of the optimum zirconia-based ceramics for the scraper.

[0013]

According to the present invention, there is provided a can cleaning apparatus for vacuum cleaning, vacuuming means for reducing the pressure in the vacuum chamber, and at least one vapor deposition material containing vapor deposition material. Source, a can provided opposite to the evaporation source for cooling the film being conveyed from the back side of the vapor deposition surface, a film supply mechanism for supplying the film to the can, and a film winding for winding the vapor deposited film. A can cleaning device for removing deposits on the can by cleaning means of a vapor deposition device having a take-out mechanism, wherein the cleaning means presses the scraper for removing deposits on the can and the scraper against the can. And a pressing means, and the scraper is made of zirconia-based ceramics.

The contact length in the longitudinal direction of the scraper can in the longitudinal direction (hereinafter also simply referred to as a blade width) is preferably short in order to improve the uniformity and controllability of the scraper pressing force, and the cleaning time is shortened. Longer is better for shortening. The specific contact length is preferably about 30 mm to 100 mm.

The shape of the blade of the scraper (the angle of the blade)
A sharper angle has higher cleaning ability, and an obtuse angle has higher abrasion resistance. Specifically, a blade edge angle of 10 ° to 40 ° is preferable. The thickness of the scraper is preferably thin to improve the re-polishing property of the cutting edge, and thick to improve the resistance to tearing. Specifically, it is preferably about 0.1 mm to 1 mm.

In the above apparatus, there are two positions, one for pressing the scraper against the can and the other for separating it from the can.
It is preferable to have an attaching / detaching means for moving to one position so that the scraper can be pressed and separated at any timing or position. In particular, it is preferable to use a controller or the like that can automatically control pressing and separation.

It is preferable that a cleaning means is formed by the scraper, the pressing means and the attaching / detaching means, and that the cleaning means is provided in a number corresponding to the number of portions requiring cleaning for one can. It is optimal to have two cleaning means when one can only needs to be cleaned at two positions on both ends.

It is preferable that the pressing means of the scraper has a rotating means capable of rotating around a shaft and a pressing portion pressing through the shaft. When the blade width of the scraper is 40 mm, the pressing force is preferably 500 g to 2000 g, and it is optimal to apply this force by a spring.

It is preferable that the cleaning means has a flexible hose, a hose joining means connected to the flexible hose, and a suction means composed of an external suction source. Examples of external suction sources include vacuum cleaners and blowers,
A factory vacuum source or the like can be used. It is also preferable to have two or more cleaning means provided with suction means.

Further, it is preferable that the cleaning means has traverse means capable of moving the cleaning means in parallel with the longitudinal direction of the can. This makes it possible to clean the area beyond the blade width. In particular, a traversing means which can be arbitrarily selected from rightward, leftward, low speed, high speed, etc. is preferable. As a result, an arbitrary range can be cleaned, and the time required for cleaning can be minimized by separating the scraper and traversing at high speed except during cleaning.

Zirconia-based ceramics are used as the material of the scraper. Among them, a mixture of zirconia and alumina is preferable as the zirconia-based ceramics, and a mixture having a mixing ratio of about 80:20 is most suitable.

[0022]

In the can cleaning device of the present invention, the deposits adhering to the surface of the can are scraped off by the scraper, and the deposits removed from the surface of the can are sucked by the suction port of the suction means provided in parallel with the scraper. At the same time as being sucked from the cleaning means, the cleaning means is moved in the longitudinal direction of the roll by the moving means. After cleaning the predetermined width, the scraper is separated from the can to stop the cleaning, move to the other cleaning place at high speed, and restart the cleaning after moving. This makes it possible to efficiently and effectively clean the entire part that needs cleaning. Further, by using zirconia-based ceramics as the material of the scraper, even if the vapor deposition material firmly adhered to the surface of the can is scraped off, the scraper is hardly worn, and the efficiency of removing adhered substances is prevented, and the device The durability is improved.

By using zirconia-based ceramics as a mixture of zirconia and alumina and setting the mixing ratio to 80:20, it is possible to obtain the optimum scraper to be applied to the cleaning device.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a can cleaning device of the present invention will be described below with reference to the drawings. FIG. 1 shows a can cleaning device according to an embodiment of the present invention and a vapor deposition device to which the device is applied. In the figure, 1 indicates a vacuum chamber. The inside of the vacuum chamber 1 is divided by a wall 2 into two chambers 1a and 1b. A vapor deposition material evaporation source 4 that accommodates the vapor deposition material 3 is provided in the chamber 1b. The vapor deposition material evaporation source 4 melts and vaporizes the vapor deposition material 3 by resistance heating. Although the vapor deposition material evaporation source 4 melts and vaporizes the vapor deposition material 3 by resistance heating in this embodiment, the vapor deposition material 3 is not limited to this, and the vapor deposition material 3 is heated by, for example, high frequency dielectric heating or electron beam. It is also possible to melt and evaporate.

Further, in this embodiment, one vapor deposition material evaporation source 4 is provided, but the number is not limited to this, and it is also possible to provide two or more.

In the vacuum chamber 1, there is provided a can 5 in which a cooling liquid (for example, cooling water) is circulated inside the chamber 1a and the chamber 1b. The part bulges from the chamber 1a to the chamber 1b. The vapor deposition material evaporation source 4 in the chamber 1b is provided in a positional relationship facing the can 5.

A film supply mechanism 7 for supplying the film 6 to the can 5 is provided in the chamber 1a so that the film 6 is unwound from the film winding roll 7a. The unwound film 6 is cooled by the can 5 via the free roller 8a, the evaporation material 3 evaporated from the evaporation material evaporation source 4 is evaporated, and the film 6 is further wound up via the free roller 8b. The film take-up mechanism 9 takes up the film as a film take-up roll 9a.

Reference numeral 10 denotes a vacuum pump for reducing the pressure in the vacuum chamber 1. Vacuum pump 1
Examples of 0 include a rotary pump, an oil diffusion pump, and a cryopump.

Next, the can cleaning device of the vapor deposition device will be described. In FIG. 2, reference numeral 11 indicates a cleaning unit that removes the deposits attached to the surface of the can 5.

The cleaning means 11 includes a scraper 12 for removing adhered matters and a suction means 1 for sucking the removed adhered matters.
3 is provided. The suction means 13 is a suction nozzle 15 having a suction port 14 which is located on the upstream side in the transport direction of the film 6 and which faces the scraper 12 and opens.
5, a suction hose 16 and a suction source (not shown) such as a blower or a factory vacuum source. The suction port 14 is built in the head 17, and the positional relationship with the scraper 12 is always fixed.

The scraper 12 is fixed to the head 17, and the head 17 is pressed against the can 5 by the pressing means 24. The pressing means 24 includes a rotating shaft 18 around which the head 17 can rotate about a rotation center, an arm 26 fixed to the rotating shaft 18, and a spring 25 for pressing the scraper 12 via the arm 26. By adjusting, the pressing pressure of the scraper 12 can be adjusted. Further, the scraper 12 can be controlled to come into contact with the can 5 and to be separated from the can 5 by the attaching / detaching means 27. The attaching / detaching means 27 is composed of an eccentric shaft 19 and a rotating means (not shown) for rotating the eccentric shaft 19.

In the present embodiment, the scraper 12 is made of zirconia ceramics (zirconia: alumina = 80: 2).
0), thickness 0.25 mm, height 20 mm, can 5
The length in the longitudinal direction (= blade width) is 40 mm. The scraper 12 is pressed against the can 5 with a force of 1 kgf with the rotating shaft 18 as a fulcrum.

The cleaning means 11 has a moving means 20. The moving means 20 includes a transverse screw 22 extending in the longitudinal direction of the cassette 21 and the can 5, and a rail 23 on which the cassette 21 is placed.

Here, as will be described with reference to FIGS. 9 and 10, the length of the can 304 in the axial direction is the film 30.
It is generally longer than the length in the width direction of 1. In this case, there are two portions on both ends of the can 304 that need cleaning. It is also conceivable that the scraper 40 and the pressing means 24 for pressing the scraper 40 are respectively provided at the portions requiring cleaning. Also, one scraper 40 and pressing means 24
The cassette 21 having the detaching means 27 and the moving means 2
0 to move the can 304 by moving it in the longitudinal direction.
You may make it clean two places of both ends.

In the apparatus having the above-described structure, the scraper 12 is pressed against the surface of the rotating can 5, the vapor deposition material adhered from the surface of the can 5 is scraped off by the scraper 12, and the can surface is removed. The removed vapor deposition material 3 is sucked and removed from the suction port 14. At the same time, the cassette 21 has the traverse screw 22 and the traverse rail 2
Since it is traversed in the longitudinal direction of the can by means of 3, the surface of the can that needs to be cleaned is covered over the entire circumference and
Evaporated metal deposits can be removed efficiently over the entire length or in the concentrated portions of the film width direction on both sides where the vapor deposition material is likely to adhere.

Next, the results of testing the relationship between the scraper material and the sharpness will be described. In the test apparatus of FIGS. 3 and 4, 40 is a scraper, 41 is a roll (outer diameter 12
0 mm) and 42 are motors for rotating the roll 41. In the test, the pressing angle (rake angle B) for pressing the scraper 40 against the roll 41 was constant at 30 °, the roll peripheral speed was 30 m / min, and the pressing force was 1000 g.

The blade material of the scraper 40 is a leather blade made of carbon steel, an ion plating blade made by implanting titanium ions into carbon steel, a cemented carbide blade made of cemented carbide, and a zirconia blade made of 100% zirconia ceramic. , Zirconia 80% alumina 20% ceramic alumina 20
Blade (hereinafter simply referred to as T20 blade), zirconia 80%
Tungsten carbide 20% ceramic tungsten carbide 20 blades (hereinafter simply referred to as TZPW blades) were used as 6 types. Table 1 shows the hardness (Vickers hardness Hv) of each cutting edge.

[0039]

[Table 1]

In addition, in the measuring device of FIGS.
Is a weight, 52 is an object to be cut, 53 is a guide rail, and A is a cutting amount. The scraper 40, which is forcibly worn by the test apparatus of FIGS. 3 and 4, is set on the weight 51. The weight weighs 400 g and is allowed to fall freely from a height of 500 mm. The scraper 40 is guided by the guide 53 so as to vertically cut into the cut object 52. Since the material of the cut object 52 is comparatively evaluated, any material may be used, and the commercially available eraser is used this time.

The above results are shown in FIG. FIG. 7 shows the change rate of the cut amount due to the forced wear time when the cut amount when the scraper is new is 1.0. The zirconia-based ceramics showed good tendency, but the zirconia blade,
The TZPW20 blade cracked during the measurement. Also,
Similarly in the apparatus of the embodiment, a zirconia blade, TZP
Cracking occurred on the W20 blade.

[0042]

According to the can cleaning device of the present invention,
Since the scraper is made of zirconia-based ceramics, it is possible to effectively remove deposits on the surface of the can of the vapor deposition device to which the vapor deposition material is firmly attached, for a long period of time without degrading the performance. Further, even if the can is a metal surface, especially a plated surface, cleaning can be performed without causing deterioration of removal performance due to wear of the cutting edge. Further, by constructing the scraper with ceramics of 80% zirconia and 20% alumina, an optimum scraper can be obtained by using the can cleaning device.

[Brief description of drawings]

FIG. 1 is a schematic vertical cross-sectional view of a vapor deposition device to which a can cleaning device according to an embodiment of the present invention is applied.

FIG. 2 is an enlarged vertical cross-sectional view of a main part of the can cleaning device of FIG.

FIG. 3 is a front view of the test apparatus.

FIG. 4 is a longitudinal sectional view of a main part of the test apparatus.

FIG. 5 is a longitudinal sectional view of a main part of the measuring device.

FIG. 6 is a perspective view of a scraper and an object to be cut.

FIG. 7 is a relationship diagram between a forced wear time and a cutting rate in a test.

FIG. 8 is a schematic vertical sectional view of a conventional vapor deposition device.

9 is an enlarged perspective view of a can portion of the apparatus shown in FIG.

10 is an enlarged front view of a can of the device of FIG.
(However, since it was also used for the description of the present invention, the members 40, 1
6 is added. )

FIG. 11 is a longitudinal sectional view of a main part of the cleaning device according to the above proposal.

12 is a front view of the device of FIG. 11. FIG.

13 is a view on arrow XIII of the apparatus of FIG. 11. FIG.

[Explanation of symbols]

 1 vacuum chamber 1a, 1b chamber 2 wall 3 vapor deposition material 4 vapor deposition material evaporation source 5 can 6 film 7 film supply mechanism 7a film roll 8a, 8b free roller 9 film winding mechanism 9a film roll 10 vacuum pump 11 cleaning means 12 scraper 13 Suction means 14 Suction port 15 Suction nozzle 16 Suction hose 17 Head 18 Rotating shaft 19 Eccentric shaft 20 Moving means 21 Cassette 22 Rail 23 Traverse screw 24 Pressing means 25 Spring 26 Arm 27 Detaching means 40 Scraper

Claims (7)

[Claims] 1. A vacuum chamber, a decompression means for reducing the pressure inside the vacuum chamber, at least one evaporation source for accommodating an evaporation material, and an evaporation source provided so as to face the evaporation source, which is being conveyed. The deposit on the can of a vapor deposition apparatus having a can for cooling the film from the back side of the vapor deposition surface, a film supply mechanism for supplying the film to the can, and a film winding mechanism for winding the vapor-deposited film. A can cleaning device for removing by a cleaning means, wherein the cleaning means comprises a scraper for removing deposits on the can, and a pressing means for pressing the scraper against the can, and the material of the scraper is A can cleaning device characterized by being zirconia-based ceramics. 2. The can cleaning device according to claim 1, further comprising attachment / detachment means for moving the scraper to two positions, a position where the scraper is pressed against the can and a position where the scraper is separated from the can. 3. At least two cleaning devices having the attaching / detaching means are provided for one can.
The can cleaning device according to claim 2. 4. The can cleaning device according to claim 1, wherein the pressing unit has a rotating unit that rotates about an axis and a pressing unit that presses the scraper via the shaft. . 5. The cleaning means has a flexible hose connected to the cleaning means, a hose joining means connected to the flexible hose, and a suction means connected to an external suction source. The can cleaning device according to any one of 1 to 4. 6. The can cleaning device according to claim 1, further comprising traversing means for moving the cleaning means in parallel with a longitudinal direction of the can. 7. The can cleaning device according to claim 1, wherein the material of the scraper is a ceramic obtained by firing a mixture of zirconia and alumina mixed at a mixing ratio of 80:20.