JPS6125962Y2 - - Google Patents
Info
- Publication number
- JPS6125962Y2 JPS6125962Y2 JP5970983U JP5970983U JPS6125962Y2 JP S6125962 Y2 JPS6125962 Y2 JP S6125962Y2 JP 5970983 U JP5970983 U JP 5970983U JP 5970983 U JP5970983 U JP 5970983U JP S6125962 Y2 JPS6125962 Y2 JP S6125962Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- opening
- blower
- suction table
- closing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012535 impurity Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Lift Valve (AREA)
- Multiple-Way Valves (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5970983U JPS59167636U (ja) | 1983-04-21 | 1983-04-21 | 吸着テ−ブル用管路切換弁 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5970983U JPS59167636U (ja) | 1983-04-21 | 1983-04-21 | 吸着テ−ブル用管路切換弁 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59167636U JPS59167636U (ja) | 1984-11-09 |
| JPS6125962Y2 true JPS6125962Y2 (forum.php) | 1986-08-05 |
Family
ID=30189954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5970983U Granted JPS59167636U (ja) | 1983-04-21 | 1983-04-21 | 吸着テ−ブル用管路切換弁 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59167636U (forum.php) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5515250B2 (ja) * | 2008-07-31 | 2014-06-11 | 富士通株式会社 | 集塵機構および基板切断装置 |
| JP5058304B2 (ja) * | 2010-06-16 | 2012-10-24 | 株式会社鷺宮製作所 | スライド弁 |
-
1983
- 1983-04-21 JP JP5970983U patent/JPS59167636U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59167636U (ja) | 1984-11-09 |