JPS61257232A - 液体材料ガス発生方法 - Google Patents

液体材料ガス発生方法

Info

Publication number
JPS61257232A
JPS61257232A JP9609585A JP9609585A JPS61257232A JP S61257232 A JPS61257232 A JP S61257232A JP 9609585 A JP9609585 A JP 9609585A JP 9609585 A JP9609585 A JP 9609585A JP S61257232 A JPS61257232 A JP S61257232A
Authority
JP
Japan
Prior art keywords
liquid material
vapor pressure
saturated vapor
bubbling
carrier gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9609585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0536097B2 (enrdf_load_stackoverflow
Inventor
Yoshitaka Ina
伊奈　義高
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON TAIRAN KK
Original Assignee
NIPPON TAIRAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON TAIRAN KK filed Critical NIPPON TAIRAN KK
Priority to JP9609585A priority Critical patent/JPS61257232A/ja
Publication of JPS61257232A publication Critical patent/JPS61257232A/ja
Publication of JPH0536097B2 publication Critical patent/JPH0536097B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/87—Controlling the temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP9609585A 1985-05-08 1985-05-08 液体材料ガス発生方法 Granted JPS61257232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9609585A JPS61257232A (ja) 1985-05-08 1985-05-08 液体材料ガス発生方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9609585A JPS61257232A (ja) 1985-05-08 1985-05-08 液体材料ガス発生方法

Publications (2)

Publication Number Publication Date
JPS61257232A true JPS61257232A (ja) 1986-11-14
JPH0536097B2 JPH0536097B2 (enrdf_load_stackoverflow) 1993-05-28

Family

ID=14155832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9609585A Granted JPS61257232A (ja) 1985-05-08 1985-05-08 液体材料ガス発生方法

Country Status (1)

Country Link
JP (1) JPS61257232A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0696472A1 (en) 1994-08-05 1996-02-14 Shin-Etsu Handotai Company Limited Method and apparatus for supply of liquid raw material gas
JP2000319095A (ja) * 1999-04-30 2000-11-21 Komatsu Electronic Metals Co Ltd トリクロロシランガス気化供給装置及び方法
KR20030005648A (ko) * 2001-07-09 2003-01-23 주식회사 세미텔 자동 리필 기능을 갖는 버블러

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4278458A (en) * 1979-02-07 1981-07-14 Bell Telephone Laboratories, Incorporated Optical fiber fabrication method and apparatus
JPS60248228A (ja) * 1984-05-24 1985-12-07 Sumitomo Electric Ind Ltd バブリング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4278458A (en) * 1979-02-07 1981-07-14 Bell Telephone Laboratories, Incorporated Optical fiber fabrication method and apparatus
JPS60248228A (ja) * 1984-05-24 1985-12-07 Sumitomo Electric Ind Ltd バブリング装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0696472A1 (en) 1994-08-05 1996-02-14 Shin-Etsu Handotai Company Limited Method and apparatus for supply of liquid raw material gas
JP2000319095A (ja) * 1999-04-30 2000-11-21 Komatsu Electronic Metals Co Ltd トリクロロシランガス気化供給装置及び方法
KR20030005648A (ko) * 2001-07-09 2003-01-23 주식회사 세미텔 자동 리필 기능을 갖는 버블러

Also Published As

Publication number Publication date
JPH0536097B2 (enrdf_load_stackoverflow) 1993-05-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term