JPS6125645B2 - - Google Patents

Info

Publication number
JPS6125645B2
JPS6125645B2 JP55170166A JP17016680A JPS6125645B2 JP S6125645 B2 JPS6125645 B2 JP S6125645B2 JP 55170166 A JP55170166 A JP 55170166A JP 17016680 A JP17016680 A JP 17016680A JP S6125645 B2 JPS6125645 B2 JP S6125645B2
Authority
JP
Japan
Prior art keywords
ozone
ozone generator
water
nitrogen oxides
washing tower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55170166A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5795808A (en
Inventor
Akira Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP17016680A priority Critical patent/JPS5795808A/ja
Publication of JPS5795808A publication Critical patent/JPS5795808A/ja
Publication of JPS6125645B2 publication Critical patent/JPS6125645B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
JP17016680A 1980-12-02 1980-12-02 Generating apparatus for ozone Granted JPS5795808A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17016680A JPS5795808A (en) 1980-12-02 1980-12-02 Generating apparatus for ozone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17016680A JPS5795808A (en) 1980-12-02 1980-12-02 Generating apparatus for ozone

Publications (2)

Publication Number Publication Date
JPS5795808A JPS5795808A (en) 1982-06-14
JPS6125645B2 true JPS6125645B2 (enExample) 1986-06-17

Family

ID=15899900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17016680A Granted JPS5795808A (en) 1980-12-02 1980-12-02 Generating apparatus for ozone

Country Status (1)

Country Link
JP (1) JPS5795808A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005058753A1 (ja) * 2003-12-17 2005-06-30 Tokyo Electron Limited オゾン処理方法及びオゾン処理装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02208204A (ja) * 1989-02-08 1990-08-17 Ishikawajima Harima Heavy Ind Co Ltd ＮＯｘ含有量の少ないオゾン製造方法及び装置
DE69535054T2 (de) * 1994-08-24 2007-01-04 Ebara Corp. Verfahren zur Ozonerzeugung und Methoden zur Benutzung der Vorrichtung
FR2746385B1 (fr) * 1996-03-19 1998-05-15 Ozonia Int Sa Procede et dispositif pour eviter la corrosion dans les equipements de compression d'un gaz contenant de l'ozone
US6528022B1 (en) * 1999-11-29 2003-03-04 Yukio Kinoshita Ozone generating apparatus and corona generating apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5210093B2 (enExample) * 1971-12-09 1977-03-22
JPS5910925B2 (ja) * 1977-03-15 1984-03-12 三菱電機株式会社 酸素リサイクルオゾン発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005058753A1 (ja) * 2003-12-17 2005-06-30 Tokyo Electron Limited オゾン処理方法及びオゾン処理装置

Also Published As

Publication number Publication date
JPS5795808A (en) 1982-06-14

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