JPS5795808A - Generating apparatus for ozone - Google Patents

Generating apparatus for ozone

Info

Publication number
JPS5795808A
JPS5795808A JP17016680A JP17016680A JPS5795808A JP S5795808 A JPS5795808 A JP S5795808A JP 17016680 A JP17016680 A JP 17016680A JP 17016680 A JP17016680 A JP 17016680A JP S5795808 A JPS5795808 A JP S5795808A
Authority
JP
Japan
Prior art keywords
nox
ozone
ozonized gas
outlet
remove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17016680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6125645B2 (enExample
Inventor
Akira Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP17016680A priority Critical patent/JPS5795808A/ja
Publication of JPS5795808A publication Critical patent/JPS5795808A/ja
Publication of JPS6125645B2 publication Critical patent/JPS6125645B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
JP17016680A 1980-12-02 1980-12-02 Generating apparatus for ozone Granted JPS5795808A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17016680A JPS5795808A (en) 1980-12-02 1980-12-02 Generating apparatus for ozone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17016680A JPS5795808A (en) 1980-12-02 1980-12-02 Generating apparatus for ozone

Publications (2)

Publication Number Publication Date
JPS5795808A true JPS5795808A (en) 1982-06-14
JPS6125645B2 JPS6125645B2 (enExample) 1986-06-17

Family

ID=15899900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17016680A Granted JPS5795808A (en) 1980-12-02 1980-12-02 Generating apparatus for ozone

Country Status (1)

Country Link
JP (1) JPS5795808A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02208204A (ja) * 1989-02-08 1990-08-17 Ishikawajima Harima Heavy Ind Co Ltd ＮＯｘ含有量の少ないオゾン製造方法及び装置
FR2746385A1 (fr) * 1996-03-19 1997-09-26 Ozonia Int Sa Procede et dispositif pour eviter la corrosion dans les equipements de compression d'un gaz contenant de l'ozone
EP0703187A3 (en) * 1994-08-24 1999-11-10 Ebara Corporation Method and apparatus for generating ozone and methods of its use
EP1103519A3 (en) * 1999-11-29 2003-10-22 Yukio Kinoshita Ozone generating apparatus and corona generating apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4361056B2 (ja) * 2003-12-17 2009-11-11 東京エレクトロン株式会社 オゾン処理方法及びオゾン処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4875454A (enExample) * 1971-12-09 1973-10-11
JPS53113295A (en) * 1977-03-15 1978-10-03 Mitsubishi Electric Corp Oxygen recycle ozone generator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4875454A (enExample) * 1971-12-09 1973-10-11
JPS53113295A (en) * 1977-03-15 1978-10-03 Mitsubishi Electric Corp Oxygen recycle ozone generator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02208204A (ja) * 1989-02-08 1990-08-17 Ishikawajima Harima Heavy Ind Co Ltd ＮＯｘ含有量の少ないオゾン製造方法及び装置
EP0703187A3 (en) * 1994-08-24 1999-11-10 Ebara Corporation Method and apparatus for generating ozone and methods of its use
FR2746385A1 (fr) * 1996-03-19 1997-09-26 Ozonia Int Sa Procede et dispositif pour eviter la corrosion dans les equipements de compression d'un gaz contenant de l'ozone
EP1103519A3 (en) * 1999-11-29 2003-10-22 Yukio Kinoshita Ozone generating apparatus and corona generating apparatus

Also Published As

Publication number Publication date
JPS6125645B2 (enExample) 1986-06-17

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