JPS6124327B2 - - Google Patents
Info
- Publication number
- JPS6124327B2 JPS6124327B2 JP56153982A JP15398281A JPS6124327B2 JP S6124327 B2 JPS6124327 B2 JP S6124327B2 JP 56153982 A JP56153982 A JP 56153982A JP 15398281 A JP15398281 A JP 15398281A JP S6124327 B2 JPS6124327 B2 JP S6124327B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reactant
- heater
- generated
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000376 reactant Substances 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 5
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 3
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56153982A JPS5855321A (ja) | 1981-09-30 | 1981-09-30 | 定量性coガス発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56153982A JPS5855321A (ja) | 1981-09-30 | 1981-09-30 | 定量性coガス発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5855321A JPS5855321A (ja) | 1983-04-01 |
| JPS6124327B2 true JPS6124327B2 (https=) | 1986-06-10 |
Family
ID=15574317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56153982A Granted JPS5855321A (ja) | 1981-09-30 | 1981-09-30 | 定量性coガス発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5855321A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02305302A (ja) * | 1989-05-18 | 1990-12-18 | Nippon Steel Corp | 抽気蒸気タービン復水器冷却系における冷却水流量制御の方法 |
| GB0515816D0 (en) * | 2005-08-01 | 2005-09-07 | Sata Ltd | Method and apparatus for generating carbon monoxide |
-
1981
- 1981-09-30 JP JP56153982A patent/JPS5855321A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5855321A (ja) | 1983-04-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ES8601474A1 (es) | Perfeccionamientos en detectores de gases para la determinacion selectiva de los componentes de mezclas de gases | |
| ATE177953T1 (de) | Elektrische vorrichtung zum verdunsten von wirkstoffen | |
| DE69839158D1 (de) | Vorrichtung zum tauschen und erzeugen von wärme und feuchtigkeit | |
| GB8813270D0 (en) | Dry exhaust gas conditioning | |
| JPS6124327B2 (https=) | ||
| ES460215A1 (es) | Perfeccionamientos en aparatos para eliminacion de ozono, demezclas de gases, en oxidos de metales. | |
| JP2605100B2 (ja) | オゾン発生装置 | |
| GB2184549A (en) | Arrangement for and method of monitoring heat treatment processes | |
| EP0067437A1 (en) | Oxygen sensor and method of operation | |
| US2577720A (en) | Apparatus for the purification and drying of gases | |
| EP0254411A3 (en) | Thermal copying apparatus | |
| US3706535A (en) | Carbon monoxide burner for undersea habitats | |
| JP2001351910A (ja) | 基板処理装置 | |
| US20030124049A1 (en) | Catalytic reactor apparatus and method for generating high purity water vapor | |
| JPS5523032A (en) | Ozone generating apparatus | |
| US3653844A (en) | Gas purification apparatus | |
| JPS5925178B2 (ja) | 酸自給形分析装置 | |
| JPS5849431A (ja) | 水標準ガスの製造方法 | |
| JPS5944640A (ja) | 水蒸気暴露試験装置 | |
| JPS5542035A (en) | Ammonia gas analyzer | |
| JPH04371367A (ja) | チッソリフロー装置 | |
| JPS5626560A (en) | Electric dust collector | |
| JPS6313243Y2 (https=) | ||
| JPS5523031A (en) | Ozone generating apparatus | |
| JPS5523033A (en) | Ozone generating apparatus |