JPS61242963A - セラミツクス筒状部材の製造方法 - Google Patents
セラミツクス筒状部材の製造方法Info
- Publication number
- JPS61242963A JPS61242963A JP8312285A JP8312285A JPS61242963A JP S61242963 A JPS61242963 A JP S61242963A JP 8312285 A JP8312285 A JP 8312285A JP 8312285 A JP8312285 A JP 8312285A JP S61242963 A JPS61242963 A JP S61242963A
- Authority
- JP
- Japan
- Prior art keywords
- base
- cvd reaction
- cvd
- heat
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims description 38
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 claims description 17
- 239000012210 heat-resistant fiber Substances 0.000 claims description 16
- 239000000835 fiber Substances 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 description 24
- 239000002244 precipitate Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 16
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 238000005245 sintering Methods 0.000 description 8
- 239000012495 reaction gas Substances 0.000 description 7
- 238000001947 vapour-phase growth Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000011226 reinforced ceramic Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910005091 Si3N Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
- 239000011225 non-oxide ceramic Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8312285A JPS61242963A (ja) | 1985-04-18 | 1985-04-18 | セラミツクス筒状部材の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8312285A JPS61242963A (ja) | 1985-04-18 | 1985-04-18 | セラミツクス筒状部材の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61242963A true JPS61242963A (ja) | 1986-10-29 |
| JPH058147B2 JPH058147B2 (enrdf_load_stackoverflow) | 1993-02-01 |
Family
ID=13793399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8312285A Granted JPS61242963A (ja) | 1985-04-18 | 1985-04-18 | セラミツクス筒状部材の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61242963A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538449B (zh) * | 2012-01-09 | 2013-11-20 | 宁波市鄞州圣安炉业有限公司 | 加热炉 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3462340A (en) * | 1965-07-28 | 1969-08-19 | Us Air Force | Fiber-containing pyrolytic composite material |
| JPS5551769A (en) * | 1972-03-28 | 1980-04-15 | Ducommun Inc | Manufacture of high strength fiberrreinforced compounded product |
-
1985
- 1985-04-18 JP JP8312285A patent/JPS61242963A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3462340A (en) * | 1965-07-28 | 1969-08-19 | Us Air Force | Fiber-containing pyrolytic composite material |
| JPS5551769A (en) * | 1972-03-28 | 1980-04-15 | Ducommun Inc | Manufacture of high strength fiberrreinforced compounded product |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058147B2 (enrdf_load_stackoverflow) | 1993-02-01 |
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