JPS61237357A - 質量分析装置 - Google Patents

質量分析装置

Info

Publication number
JPS61237357A
JPS61237357A JP60078137A JP7813785A JPS61237357A JP S61237357 A JPS61237357 A JP S61237357A JP 60078137 A JP60078137 A JP 60078137A JP 7813785 A JP7813785 A JP 7813785A JP S61237357 A JPS61237357 A JP S61237357A
Authority
JP
Japan
Prior art keywords
magnetic field
ion
slit
ions
mass spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60078137A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0572701B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Yamamoto
宏 山本
Mitsuhiro Murata
充弘 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP60078137A priority Critical patent/JPS61237357A/ja
Publication of JPS61237357A publication Critical patent/JPS61237357A/ja
Publication of JPH0572701B2 publication Critical patent/JPH0572701B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP60078137A 1985-04-11 1985-04-11 質量分析装置 Granted JPS61237357A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60078137A JPS61237357A (ja) 1985-04-11 1985-04-11 質量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60078137A JPS61237357A (ja) 1985-04-11 1985-04-11 質量分析装置

Publications (2)

Publication Number Publication Date
JPS61237357A true JPS61237357A (ja) 1986-10-22
JPH0572701B2 JPH0572701B2 (enrdf_load_stackoverflow) 1993-10-12

Family

ID=13653489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60078137A Granted JPS61237357A (ja) 1985-04-11 1985-04-11 質量分析装置

Country Status (1)

Country Link
JP (1) JPS61237357A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10206272A (ja) * 1997-01-23 1998-08-07 Ulvac Japan Ltd 漏洩検知用磁場偏向型質量分析管の分解能向上方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10206272A (ja) * 1997-01-23 1998-08-07 Ulvac Japan Ltd 漏洩検知用磁場偏向型質量分析管の分解能向上方法

Also Published As

Publication number Publication date
JPH0572701B2 (enrdf_load_stackoverflow) 1993-10-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term