JPS6123670B2 - - Google Patents

Info

Publication number
JPS6123670B2
JPS6123670B2 JP52082238A JP8223877A JPS6123670B2 JP S6123670 B2 JPS6123670 B2 JP S6123670B2 JP 52082238 A JP52082238 A JP 52082238A JP 8223877 A JP8223877 A JP 8223877A JP S6123670 B2 JPS6123670 B2 JP S6123670B2
Authority
JP
Japan
Prior art keywords
film
oxide film
thermal oxide
polycrystalline silicon
oxidation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52082238A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5417679A (en
Inventor
Yoji Yamanaka
Toshio Wada
Mototaka Kamoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP8223877A priority Critical patent/JPS5417679A/ja
Publication of JPS5417679A publication Critical patent/JPS5417679A/ja
Publication of JPS6123670B2 publication Critical patent/JPS6123670B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP8223877A 1977-07-08 1977-07-08 Semiconductor device and its manufacture Granted JPS5417679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8223877A JPS5417679A (en) 1977-07-08 1977-07-08 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8223877A JPS5417679A (en) 1977-07-08 1977-07-08 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS5417679A JPS5417679A (en) 1979-02-09
JPS6123670B2 true JPS6123670B2 (enExample) 1986-06-06

Family

ID=13768821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8223877A Granted JPS5417679A (en) 1977-07-08 1977-07-08 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5417679A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59227224A (ja) * 1983-06-09 1984-12-20 松本　利明 こんぶ育成用ブロツク

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940872A (enExample) * 1972-08-25 1974-04-17
JPS5075775A (enExample) * 1973-11-06 1975-06-21

Also Published As

Publication number Publication date
JPS5417679A (en) 1979-02-09

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