JPS61232271A - 高密度窒化珪素焼結体の製造方法 - Google Patents
高密度窒化珪素焼結体の製造方法Info
- Publication number
- JPS61232271A JPS61232271A JP60072532A JP7253285A JPS61232271A JP S61232271 A JPS61232271 A JP S61232271A JP 60072532 A JP60072532 A JP 60072532A JP 7253285 A JP7253285 A JP 7253285A JP S61232271 A JPS61232271 A JP S61232271A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- glass
- temperature
- sintered body
- nitrogen gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 24
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 24
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 33
- 239000011521 glass Substances 0.000 claims description 29
- 239000000463 material Substances 0.000 claims description 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 12
- 230000004888 barrier function Effects 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 9
- 229910052906 cristobalite Inorganic materials 0.000 claims description 8
- 238000002844 melting Methods 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 6
- 239000012298 atmosphere Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 4
- 238000009849 vacuum degassing Methods 0.000 claims description 4
- 230000009257 reactivity Effects 0.000 claims description 3
- 238000001513 hot isostatic pressing Methods 0.000 claims description 2
- 238000005245 sintering Methods 0.000 description 12
- 235000012239 silicon dioxide Nutrition 0.000 description 10
- 229910052582 BN Inorganic materials 0.000 description 9
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 9
- 239000000377 silicon dioxide Substances 0.000 description 9
- 239000000843 powder Substances 0.000 description 8
- 238000011161 development Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052593 corundum Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 241000276425 Xiphophorus maculatus Species 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000005394 sealing glass Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000007569 slipcasting Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60072532A JPS61232271A (ja) | 1985-04-08 | 1985-04-08 | 高密度窒化珪素焼結体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60072532A JPS61232271A (ja) | 1985-04-08 | 1985-04-08 | 高密度窒化珪素焼結体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61232271A true JPS61232271A (ja) | 1986-10-16 |
| JPH0159996B2 JPH0159996B2 (enrdf_load_stackoverflow) | 1989-12-20 |
Family
ID=13492046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60072532A Granted JPS61232271A (ja) | 1985-04-08 | 1985-04-08 | 高密度窒化珪素焼結体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61232271A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006273643A (ja) * | 2005-03-29 | 2006-10-12 | Kyocera Corp | 焼結体および配線基板ならびにその製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258714A (en) * | 1975-11-08 | 1977-05-14 | Sumitomo Electric Industries | Thermal static hydraulic pressure molding method |
| JPS57106575A (en) * | 1980-12-19 | 1982-07-02 | Kobe Steel Ltd | Manufacture of high density silicon nitride sintered body |
-
1985
- 1985-04-08 JP JP60072532A patent/JPS61232271A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258714A (en) * | 1975-11-08 | 1977-05-14 | Sumitomo Electric Industries | Thermal static hydraulic pressure molding method |
| JPS57106575A (en) * | 1980-12-19 | 1982-07-02 | Kobe Steel Ltd | Manufacture of high density silicon nitride sintered body |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006273643A (ja) * | 2005-03-29 | 2006-10-12 | Kyocera Corp | 焼結体および配線基板ならびにその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0159996B2 (enrdf_load_stackoverflow) | 1989-12-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4351858A (en) | Process for the manufacture of substantially pore-free shaped polycrystalline articles by isostatic hot-pressing | |
| US4381931A (en) | Process for the manufacture of substantially pore-free shaped polycrystalline articles by isostatic hot-pressing in glass casings | |
| US5145833A (en) | Method for producing ceramic bodies | |
| SE460025B (sv) | Saett att framstaella foeremaal av pulverformi gt material genom varm isostatisk pressning i en glasomslutning | |
| CA1148772A (en) | Method of manufacturing an object of metallic or ceramic material | |
| EP0010834A1 (en) | Method of sintering beta-alumina ceramic bodies, encapsulation chamber for use in such a method, and method of manufacturing such a chamber | |
| JPS641283B2 (enrdf_load_stackoverflow) | ||
| SE456651B (sv) | Saett att framstaella ett foeremaal av i en kapsel inneslutet pulverformigt material genom isostatisk pressning | |
| JPS61232271A (ja) | 高密度窒化珪素焼結体の製造方法 | |
| US4952353A (en) | Hot isostatic pressing | |
| SE414920B (sv) | Sett att framstella ett foremal av ett material i form av ett pulver genom isostatisk pressning av en av pulvret forformad kropp | |
| US5443773A (en) | Process for producing high strength alumina | |
| JP2002220282A (ja) | 窒化アルミニウム焼結体とその製造方法 | |
| EP0895974A1 (en) | Direct coating hot isostatic pressing encapsulation method | |
| KR960012868B1 (ko) | 등압 또는 유사-등압 압축 성형에 의해 분말재료로 물체 제조방법 | |
| JPH0424142B2 (enrdf_load_stackoverflow) | ||
| EP0358530B1 (en) | Novel method for producing ceramic bodies | |
| JPS6236087A (ja) | 粒状ＳｉＣを分散配置させた金属シリコン耐熱材料 | |
| JPH0114194B2 (enrdf_load_stackoverflow) | ||
| JP3941542B2 (ja) | セラミックスと金属の気密接合構造及び該構造を有する装置部品 | |
| JPS6146432B2 (enrdf_load_stackoverflow) | ||
| Leriche et al. | Study of Glass Ceramic Diffusion During Hot Isostatic Pressing of Encapsulated PZT Ceramics | |
| JPS5888179A (ja) | セラミツクスの熱間静水圧プレス方法 | |
| JPS6350285B2 (enrdf_load_stackoverflow) | ||
| JPS649270B2 (enrdf_load_stackoverflow) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |