JPS6122900B2 - - Google Patents
Info
- Publication number
- JPS6122900B2 JPS6122900B2 JP16209579A JP16209579A JPS6122900B2 JP S6122900 B2 JPS6122900 B2 JP S6122900B2 JP 16209579 A JP16209579 A JP 16209579A JP 16209579 A JP16209579 A JP 16209579A JP S6122900 B2 JPS6122900 B2 JP S6122900B2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- bridge
- conductive material
- electric heater
- bridge portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 11
- 239000012777 electrically insulating material Substances 0.000 claims description 3
- 239000003779 heat-resistant material Substances 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16209579A JPS5684542A (en) | 1979-12-13 | 1979-12-13 | Electric heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16209579A JPS5684542A (en) | 1979-12-13 | 1979-12-13 | Electric heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5684542A JPS5684542A (en) | 1981-07-09 |
| JPS6122900B2 true JPS6122900B2 (US06486227-20021126-C00005.png) | 1986-06-03 |
Family
ID=15747971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16209579A Granted JPS5684542A (en) | 1979-12-13 | 1979-12-13 | Electric heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5684542A (US06486227-20021126-C00005.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0325760Y2 (US06486227-20021126-C00005.png) * | 1986-07-11 | 1991-06-04 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4542650A (en) * | 1983-08-26 | 1985-09-24 | Innovus | Thermal mass flow meter |
-
1979
- 1979-12-13 JP JP16209579A patent/JPS5684542A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0325760Y2 (US06486227-20021126-C00005.png) * | 1986-07-11 | 1991-06-04 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5684542A (en) | 1981-07-09 |
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