JPS61228345A - 超音波による固体の表面開口欠陥の深さ測定方法 - Google Patents

超音波による固体の表面開口欠陥の深さ測定方法

Info

Publication number
JPS61228345A
JPS61228345A JP60068379A JP6837985A JPS61228345A JP S61228345 A JPS61228345 A JP S61228345A JP 60068379 A JP60068379 A JP 60068379A JP 6837985 A JP6837985 A JP 6837985A JP S61228345 A JPS61228345 A JP S61228345A
Authority
JP
Japan
Prior art keywords
defect
depth
tip
solid
flaw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60068379A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513263B2 (enrdf_load_stackoverflow
Inventor
Takeshi Miyajima
宮島　猛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP60068379A priority Critical patent/JPS61228345A/ja
Publication of JPS61228345A publication Critical patent/JPS61228345A/ja
Publication of JPH0513263B2 publication Critical patent/JPH0513263B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/07—Analysing solids by measuring propagation velocity or propagation time of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP60068379A 1985-04-02 1985-04-02 超音波による固体の表面開口欠陥の深さ測定方法 Granted JPS61228345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60068379A JPS61228345A (ja) 1985-04-02 1985-04-02 超音波による固体の表面開口欠陥の深さ測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60068379A JPS61228345A (ja) 1985-04-02 1985-04-02 超音波による固体の表面開口欠陥の深さ測定方法

Publications (2)

Publication Number Publication Date
JPS61228345A true JPS61228345A (ja) 1986-10-11
JPH0513263B2 JPH0513263B2 (enrdf_load_stackoverflow) 1993-02-22

Family

ID=13372041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60068379A Granted JPS61228345A (ja) 1985-04-02 1985-04-02 超音波による固体の表面開口欠陥の深さ測定方法

Country Status (1)

Country Link
JP (1) JPS61228345A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63302359A (ja) * 1987-06-02 1988-12-09 Hitachi Constr Mach Co Ltd 超音波による表面開口欠陥深さの測定方法
US5095753A (en) * 1990-02-22 1992-03-17 Abb Reaktor Gmbh Device for ultrasonic testing of a head screw inserted into a component
US5125272A (en) * 1989-03-16 1992-06-30 The Babcock & Wilcox Company Ultrasonic crack sizing method
US6112593A (en) * 1997-11-14 2000-09-05 Hitachi Construction Machinery Co., Ltd. Portable non-destructive inspection device and support casing therefor
JP2012215520A (ja) * 2011-04-01 2012-11-08 Ihi Inspection & Instrumentation Co Ltd 表面亀裂深さの超音波計測方法と装置
JP2013064668A (ja) * 2011-09-20 2013-04-11 Ihi Inspection & Instrumentation Co Ltd 超音波探傷試験による欠陥検出確率の解析方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57203950A (en) * 1981-06-10 1982-12-14 Sumitomo Metal Ind Ltd Electromagnetic ultrasonic flaw detector
JPS587557A (ja) * 1981-07-07 1983-01-17 Mitsubishi Electric Corp 電磁超音波探傷装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57203950A (en) * 1981-06-10 1982-12-14 Sumitomo Metal Ind Ltd Electromagnetic ultrasonic flaw detector
JPS587557A (ja) * 1981-07-07 1983-01-17 Mitsubishi Electric Corp 電磁超音波探傷装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63302359A (ja) * 1987-06-02 1988-12-09 Hitachi Constr Mach Co Ltd 超音波による表面開口欠陥深さの測定方法
US5125272A (en) * 1989-03-16 1992-06-30 The Babcock & Wilcox Company Ultrasonic crack sizing method
US5095753A (en) * 1990-02-22 1992-03-17 Abb Reaktor Gmbh Device for ultrasonic testing of a head screw inserted into a component
US6112593A (en) * 1997-11-14 2000-09-05 Hitachi Construction Machinery Co., Ltd. Portable non-destructive inspection device and support casing therefor
JP2012215520A (ja) * 2011-04-01 2012-11-08 Ihi Inspection & Instrumentation Co Ltd 表面亀裂深さの超音波計測方法と装置
JP2013064668A (ja) * 2011-09-20 2013-04-11 Ihi Inspection & Instrumentation Co Ltd 超音波探傷試験による欠陥検出確率の解析方法

Also Published As

Publication number Publication date
JPH0513263B2 (enrdf_load_stackoverflow) 1993-02-22

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