JPS61225625A - 表面温度計測法 - Google Patents
表面温度計測法Info
- Publication number
- JPS61225625A JPS61225625A JP6813185A JP6813185A JPS61225625A JP S61225625 A JPS61225625 A JP S61225625A JP 6813185 A JP6813185 A JP 6813185A JP 6813185 A JP6813185 A JP 6813185A JP S61225625 A JPS61225625 A JP S61225625A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- temperature
- diffracted
- solid material
- intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009529 body temperature measurement Methods 0.000 title claims description 7
- 238000010894 electron beam technology Methods 0.000 claims abstract description 16
- 239000011343 solid material Substances 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 abstract description 45
- 239000013078 crystal Substances 0.000 abstract description 18
- 238000005259 measurement Methods 0.000 abstract description 6
- 239000013307 optical fiber Substances 0.000 abstract description 5
- 238000005162 X-ray Laue diffraction Methods 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 description 22
- 230000008020 evaporation Effects 0.000 description 21
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000010355 oscillation Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 229920006172 Tetrafluoroethylene propylene Polymers 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/30—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on X-radiation, gamma radiation or particle radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6813185A JPS61225625A (ja) | 1985-03-29 | 1985-03-29 | 表面温度計測法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6813185A JPS61225625A (ja) | 1985-03-29 | 1985-03-29 | 表面温度計測法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61225625A true JPS61225625A (ja) | 1986-10-07 |
| JPH0545128B2 JPH0545128B2 (enExample) | 1993-07-08 |
Family
ID=13364878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6813185A Granted JPS61225625A (ja) | 1985-03-29 | 1985-03-29 | 表面温度計測法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61225625A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4995493B2 (ja) * | 2006-06-06 | 2012-08-08 | 一般財団法人電力中央研究所 | 温度測定装置、温度測定方法および電子顕微鏡 |
| JP5256334B2 (ja) * | 2011-10-11 | 2013-08-07 | 一般財団法人電力中央研究所 | 温度測定装置、温度測定方法および電子顕微鏡 |
-
1985
- 1985-03-29 JP JP6813185A patent/JPS61225625A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0545128B2 (enExample) | 1993-07-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |