JPH0545128B2 - - Google Patents

Info

Publication number
JPH0545128B2
JPH0545128B2 JP6813185A JP6813185A JPH0545128B2 JP H0545128 B2 JPH0545128 B2 JP H0545128B2 JP 6813185 A JP6813185 A JP 6813185A JP 6813185 A JP6813185 A JP 6813185A JP H0545128 B2 JPH0545128 B2 JP H0545128B2
Authority
JP
Japan
Prior art keywords
substrate
temperature
evaporation
solid material
period
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6813185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61225625A (ja
Inventor
Kimihiro Oota
Takeshi Kojima
Naoyuki Kawai
Itaru Nakagawa
Suminori Sakamoto
Mitsuo Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP6813185A priority Critical patent/JPS61225625A/ja
Publication of JPS61225625A publication Critical patent/JPS61225625A/ja
Publication of JPH0545128B2 publication Critical patent/JPH0545128B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/30—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on X-radiation, gamma radiation or particle radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP6813185A 1985-03-29 1985-03-29 表面温度計測法 Granted JPS61225625A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6813185A JPS61225625A (ja) 1985-03-29 1985-03-29 表面温度計測法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6813185A JPS61225625A (ja) 1985-03-29 1985-03-29 表面温度計測法

Publications (2)

Publication Number Publication Date
JPS61225625A JPS61225625A (ja) 1986-10-07
JPH0545128B2 true JPH0545128B2 (enExample) 1993-07-08

Family

ID=13364878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6813185A Granted JPS61225625A (ja) 1985-03-29 1985-03-29 表面温度計測法

Country Status (1)

Country Link
JP (1) JPS61225625A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007327766A (ja) * 2006-06-06 2007-12-20 Central Res Inst Of Electric Power Ind 温度測定装置、温度測定方法および電子顕微鏡
JP2012018937A (ja) * 2011-10-11 2012-01-26 Central Res Inst Of Electric Power Ind 温度測定装置、温度測定方法および電子顕微鏡

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007327766A (ja) * 2006-06-06 2007-12-20 Central Res Inst Of Electric Power Ind 温度測定装置、温度測定方法および電子顕微鏡
JP2012018937A (ja) * 2011-10-11 2012-01-26 Central Res Inst Of Electric Power Ind 温度測定装置、温度測定方法および電子顕微鏡

Also Published As

Publication number Publication date
JPS61225625A (ja) 1986-10-07

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term