JPS6122454B2 - - Google Patents
Info
- Publication number
- JPS6122454B2 JPS6122454B2 JP55103454A JP10345480A JPS6122454B2 JP S6122454 B2 JPS6122454 B2 JP S6122454B2 JP 55103454 A JP55103454 A JP 55103454A JP 10345480 A JP10345480 A JP 10345480A JP S6122454 B2 JPS6122454 B2 JP S6122454B2
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- gas
- tube
- reaction tube
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P32/00—
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10345480A JPS5728328A (en) | 1980-07-28 | 1980-07-28 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10345480A JPS5728328A (en) | 1980-07-28 | 1980-07-28 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5728328A JPS5728328A (en) | 1982-02-16 |
| JPS6122454B2 true JPS6122454B2 (cg-RX-API-DMAC10.html) | 1986-05-31 |
Family
ID=14354465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10345480A Granted JPS5728328A (en) | 1980-07-28 | 1980-07-28 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5728328A (cg-RX-API-DMAC10.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03297132A (ja) * | 1990-04-16 | 1991-12-27 | Nec Corp | 半導体ウェハの熱処理炉 |
-
1980
- 1980-07-28 JP JP10345480A patent/JPS5728328A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5728328A (en) | 1982-02-16 |
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