JPS6121789Y2 - - Google Patents

Info

Publication number
JPS6121789Y2
JPS6121789Y2 JP11894480U JP11894480U JPS6121789Y2 JP S6121789 Y2 JPS6121789 Y2 JP S6121789Y2 JP 11894480 U JP11894480 U JP 11894480U JP 11894480 U JP11894480 U JP 11894480U JP S6121789 Y2 JPS6121789 Y2 JP S6121789Y2
Authority
JP
Japan
Prior art keywords
gas
adsorbent
ion gun
cylinder
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11894480U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5741247U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11894480U priority Critical patent/JPS6121789Y2/ja
Publication of JPS5741247U publication Critical patent/JPS5741247U/ja
Application granted granted Critical
Publication of JPS6121789Y2 publication Critical patent/JPS6121789Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP11894480U 1980-08-22 1980-08-22 Expired JPS6121789Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11894480U JPS6121789Y2 (enrdf_load_stackoverflow) 1980-08-22 1980-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11894480U JPS6121789Y2 (enrdf_load_stackoverflow) 1980-08-22 1980-08-22

Publications (2)

Publication Number Publication Date
JPS5741247U JPS5741247U (enrdf_load_stackoverflow) 1982-03-05
JPS6121789Y2 true JPS6121789Y2 (enrdf_load_stackoverflow) 1986-06-30

Family

ID=29479621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11894480U Expired JPS6121789Y2 (enrdf_load_stackoverflow) 1980-08-22 1980-08-22

Country Status (1)

Country Link
JP (1) JPS6121789Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2012341B1 (en) * 2007-07-06 2012-05-02 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Modular gas ion source

Also Published As

Publication number Publication date
JPS5741247U (enrdf_load_stackoverflow) 1982-03-05

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