JPS61217575A - 光化学気相薄膜形成装置及び方法 - Google Patents
光化学気相薄膜形成装置及び方法Info
- Publication number
- JPS61217575A JPS61217575A JP5457485A JP5457485A JPS61217575A JP S61217575 A JPS61217575 A JP S61217575A JP 5457485 A JP5457485 A JP 5457485A JP 5457485 A JP5457485 A JP 5457485A JP S61217575 A JPS61217575 A JP S61217575A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- substrate
- reaction vessel
- raw material
- material gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5457485A JPS61217575A (ja) | 1985-03-20 | 1985-03-20 | 光化学気相薄膜形成装置及び方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5457485A JPS61217575A (ja) | 1985-03-20 | 1985-03-20 | 光化学気相薄膜形成装置及び方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61217575A true JPS61217575A (ja) | 1986-09-27 |
| JPH0582477B2 JPH0582477B2 (enrdf_load_stackoverflow) | 1993-11-19 |
Family
ID=12974461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5457485A Granted JPS61217575A (ja) | 1985-03-20 | 1985-03-20 | 光化学気相薄膜形成装置及び方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61217575A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6481220A (en) * | 1987-09-22 | 1989-03-27 | Semiconductor Res Found | Formation of metal and semiconductor contact |
-
1985
- 1985-03-20 JP JP5457485A patent/JPS61217575A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6481220A (en) * | 1987-09-22 | 1989-03-27 | Semiconductor Res Found | Formation of metal and semiconductor contact |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0582477B2 (enrdf_load_stackoverflow) | 1993-11-19 |
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